JPS54109491A - Method and device for detecting leakage - Google Patents

Method and device for detecting leakage

Info

Publication number
JPS54109491A
JPS54109491A JP1698978A JP1698978A JPS54109491A JP S54109491 A JPS54109491 A JP S54109491A JP 1698978 A JP1698978 A JP 1698978A JP 1698978 A JP1698978 A JP 1698978A JP S54109491 A JPS54109491 A JP S54109491A
Authority
JP
Japan
Prior art keywords
detecting leakage
leakage
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1698978A
Other languages
Japanese (ja)
Inventor
Tadashi Sakai
Youichi Ino
Hirohide Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN VARIAN KK filed Critical NICHIDEN VARIAN KK
Priority to JP1698978A priority Critical patent/JPS54109491A/en
Publication of JPS54109491A publication Critical patent/JPS54109491A/en
Pending legal-status Critical Current

Links

JP1698978A 1978-02-15 1978-02-15 Method and device for detecting leakage Pending JPS54109491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1698978A JPS54109491A (en) 1978-02-15 1978-02-15 Method and device for detecting leakage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1698978A JPS54109491A (en) 1978-02-15 1978-02-15 Method and device for detecting leakage

Publications (1)

Publication Number Publication Date
JPS54109491A true JPS54109491A (en) 1979-08-28

Family

ID=11931430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1698978A Pending JPS54109491A (en) 1978-02-15 1978-02-15 Method and device for detecting leakage

Country Status (1)

Country Link
JP (1) JPS54109491A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763634A (en) * 1993-08-24 1995-03-10 Tadahiro Omi Method for measuring external leaking amount
WO1996026426A1 (en) * 1995-02-24 1996-08-29 Osaka Sanso Kogyo Ltd. Method and system for measuring external leakage
JP2003517598A (en) * 1999-12-14 2003-05-27 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Method for inspecting leaks and locating leaks and apparatus suitable for performing the method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123787A (en) * 1975-06-06 1976-02-25 Varian Associates SHITSURYOBUNSEKISOCHIOMOCHIIRUROEIKENSHUTSUSOCHINODOSAJUNBINOTAMENOHOHOTOSOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123787A (en) * 1975-06-06 1976-02-25 Varian Associates SHITSURYOBUNSEKISOCHIOMOCHIIRUROEIKENSHUTSUSOCHINODOSAJUNBINOTAMENOHOHOTOSOCHI

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763634A (en) * 1993-08-24 1995-03-10 Tadahiro Omi Method for measuring external leaking amount
WO1996026426A1 (en) * 1995-02-24 1996-08-29 Osaka Sanso Kogyo Ltd. Method and system for measuring external leakage
US5827949A (en) * 1995-02-24 1998-10-27 Osaka Sanso Kogyo, Ltd. Method and system for measuring external leakage
JP2003517598A (en) * 1999-12-14 2003-05-27 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Method for inspecting leaks and locating leaks and apparatus suitable for performing the method

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