DE3175561D1 - Quartz tube for thermal processing of semiconductor substrates - Google Patents
Quartz tube for thermal processing of semiconductor substratesInfo
- Publication number
- DE3175561D1 DE3175561D1 DE8181303610T DE3175561T DE3175561D1 DE 3175561 D1 DE3175561 D1 DE 3175561D1 DE 8181303610 T DE8181303610 T DE 8181303610T DE 3175561 T DE3175561 T DE 3175561T DE 3175561 D1 DE3175561 D1 DE 3175561D1
- Authority
- DE
- Germany
- Prior art keywords
- quartz tube
- thermal processing
- semiconductor substrates
- substrates
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/005—Oxydation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/04—Other methods of shaping glass by centrifuging
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
- C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Glass Melting And Manufacturing (AREA)
- Laminated Bodies (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55113149A JPS5849290B2 (ja) | 1980-08-18 | 1980-08-18 | 石英反応管 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3175561D1 true DE3175561D1 (en) | 1986-12-11 |
Family
ID=14604802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8181303610T Expired DE3175561D1 (en) | 1980-08-18 | 1981-08-06 | Quartz tube for thermal processing of semiconductor substrates |
Country Status (5)
Country | Link |
---|---|
US (1) | US4382776A (de) |
EP (1) | EP0046355B1 (de) |
JP (1) | JPS5849290B2 (de) |
DE (1) | DE3175561D1 (de) |
IE (1) | IE52616B1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61190693A (ja) * | 1985-02-20 | 1986-08-25 | 能美防災株式会社 | 火災報知機 |
FR2606129B1 (fr) * | 1986-10-30 | 1989-08-18 | Ibm France | Tube en quartz ameliore pour le traitement thermique des tranches semiconductrices |
US4999228A (en) * | 1988-05-06 | 1991-03-12 | Shin-Etsu Chemical Co., Ltd. | Silicon carbide diffusion tube for semi-conductor |
JP3253734B2 (ja) * | 1992-06-19 | 2002-02-04 | 富士通株式会社 | 半導体装置製造用の石英製装置 |
US5452396A (en) * | 1994-02-07 | 1995-09-19 | Midwest Research Institute | Optical processing furnace with quartz muffle and diffuser plate |
CN1079835C (zh) * | 1994-06-01 | 2002-02-27 | 普罗克特和甘保尔公司 | 利用空气分级作用回收聚羟基链烷酸酯的方法 |
JPH11238728A (ja) | 1997-12-16 | 1999-08-31 | Fujitsu Ltd | 半導体デバイスの製造の際に使用される熱処理治具及びその製造法 |
JP4374156B2 (ja) * | 2000-09-01 | 2009-12-02 | 日本碍子株式会社 | Iii−v族窒化物膜の製造装置及び製造方法 |
US20030172870A1 (en) * | 2002-03-14 | 2003-09-18 | Axt, Inc. | Apparatus for growing monocrystalline group II-VI and III-V compounds |
US6879777B2 (en) | 2002-10-03 | 2005-04-12 | Asm America, Inc. | Localized heating of substrates using optics |
US6720531B1 (en) | 2002-12-11 | 2004-04-13 | Asm America, Inc. | Light scattering process chamber walls |
JP5046753B2 (ja) * | 2006-06-26 | 2012-10-10 | 信越化学工業株式会社 | 光ファイバ母材の製造方法及びその装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL37603C (de) * | 1931-12-26 | |||
US4102666A (en) * | 1968-02-22 | 1978-07-25 | Heraeus-Schott Quarzschmelze Gmbh | Method of surface crystallizing quartz |
DE1801187B1 (de) * | 1968-10-04 | 1970-04-16 | Siemens Ag | Vorrichtung zur Waermebehandlung von Siliziumscheiben |
FR2126098B1 (de) * | 1971-02-25 | 1973-11-23 | Quartz & Silice | |
CH566077A5 (de) * | 1972-08-05 | 1975-08-29 | Heraeus Schott Quarzschmelze | |
US4278422A (en) * | 1979-12-31 | 1981-07-14 | David M. Volz | Diffusion tube support collar |
-
1980
- 1980-08-18 JP JP55113149A patent/JPS5849290B2/ja not_active Expired
-
1981
- 1981-08-06 EP EP81303610A patent/EP0046355B1/de not_active Expired
- 1981-08-06 DE DE8181303610T patent/DE3175561D1/de not_active Expired
- 1981-08-07 US US06/290,975 patent/US4382776A/en not_active Expired - Lifetime
- 1981-08-17 IE IE1879/81A patent/IE52616B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
IE52616B1 (en) | 1988-01-06 |
EP0046355A1 (de) | 1982-02-24 |
JPS5745336A (en) | 1982-03-15 |
EP0046355B1 (de) | 1986-11-05 |
IE811879L (en) | 1982-02-18 |
JPS5849290B2 (ja) | 1983-11-02 |
US4382776A (en) | 1983-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |