DE3173512D1 - Patterning process and process for production of electronic devices utilizing said patterning process - Google Patents

Patterning process and process for production of electronic devices utilizing said patterning process

Info

Publication number
DE3173512D1
DE3173512D1 DE8181304436T DE3173512T DE3173512D1 DE 3173512 D1 DE3173512 D1 DE 3173512D1 DE 8181304436 T DE8181304436 T DE 8181304436T DE 3173512 T DE3173512 T DE 3173512T DE 3173512 D1 DE3173512 D1 DE 3173512D1
Authority
DE
Germany
Prior art keywords
patterning process
production
electronic devices
devices utilizing
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181304436T
Other languages
German (de)
English (en)
Inventor
Toshisuke Kitakohji
Shiro Takeda
Minoru Nakajima
Hiroshi Tokunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE3173512D1 publication Critical patent/DE3173512D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H01L21/02137—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material comprising alkyl silsesquioxane, e.g. MSQ
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H01L21/02345—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light
    • H01L21/02348—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light treatment by exposure to UV light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H01L21/02345—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light
    • H01L21/02351—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light treatment by exposure to corpuscular radiation, e.g. exposure to electrons, alpha-particles, protons or ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Silicon Polymers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Formation Of Insulating Films (AREA)
DE8181304436T 1980-09-27 1981-09-25 Patterning process and process for production of electronic devices utilizing said patterning process Expired DE3173512D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55134542A JPS5760330A (en) 1980-09-27 1980-09-27 Resin composition

Publications (1)

Publication Number Publication Date
DE3173512D1 true DE3173512D1 (en) 1986-02-27

Family

ID=15130746

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181304436T Expired DE3173512D1 (en) 1980-09-27 1981-09-25 Patterning process and process for production of electronic devices utilizing said patterning process

Country Status (4)

Country Link
US (1) US4600685A (enExample)
EP (1) EP0049127B1 (enExample)
JP (1) JPS5760330A (enExample)
DE (1) DE3173512D1 (enExample)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1204527A (en) * 1982-08-13 1986-05-13 Theodore F. Retajczyk, Jr. Polymeric films for electronic circuits
US4510173A (en) * 1983-04-25 1985-04-09 Kabushiki Kaisha Toshiba Method for forming flattened film
EP0130599B1 (en) * 1983-06-29 1988-08-10 Fuji Photo Film Co., Ltd. Photosolubilizable composition
JPS60117242A (ja) * 1983-11-29 1985-06-24 Fujitsu Ltd 微細パタ−ン形成材料
DE3574418D1 (en) * 1984-05-30 1989-12-28 Fujitsu Ltd Pattern-forming material and its production and use
JPS60254132A (ja) * 1984-05-31 1985-12-14 Fujitsu Ltd パタ−ン形成材料
JPS60254036A (ja) * 1984-05-30 1985-12-14 Fujitsu Ltd パタ−ン形成方法
JPS6129153A (ja) * 1984-07-20 1986-02-10 Fujitsu Ltd 凹凸基板の平坦化方法
US4670299A (en) * 1984-11-01 1987-06-02 Fujitsu Limited Preparation of lower alkyl polysilsesquioxane and formation of insulating layer of silylated polymer on electronic circuit board
JPS61144639A (ja) * 1984-12-19 1986-07-02 Hitachi Ltd 放射線感応性組成物及びそれを用いたパタ−ン形成法
JPS61201430A (ja) * 1985-03-04 1986-09-06 Fujitsu Ltd 半導体装置用シリコ−ン樹脂膜及びその形成方法
DE3678652D1 (de) * 1985-03-07 1991-05-16 Hughes Aircraft Co Polysiloxanschutzlack fuer ionen- und elektronenstrahl-lithographie.
EP0204963B1 (en) * 1985-05-10 1993-01-13 Hitachi, Ltd. Use of Alkali-Soluble Polyorganosilsesquioxane Polymers in a resist for preparing electronics parts.
US4663414A (en) * 1985-05-14 1987-05-05 Stauffer Chemical Company Phospho-boro-silanol interlayer dielectric films and preparation
JP2607870B2 (ja) * 1985-07-26 1997-05-07 富士写真フイルム株式会社 画像形成方法
DE3760030D1 (en) * 1986-02-07 1989-02-02 Nippon Telegraph & Telephone Photosensitive and high energy beam sensitive resin composition containing substituted polysiloxane
US4782009A (en) * 1987-04-03 1988-11-01 General Electric Company Method of coating and imaging photopatternable silicone polyamic acid
US4855199A (en) * 1987-04-03 1989-08-08 General Electric Company Photopatterned product of silicone polyamic acid on a transparent substrate
US4758620A (en) * 1987-07-02 1988-07-19 Akzo America Inc. Blend of solvent and arylsiloxane interlayer dielectric materials
US4765866A (en) * 1987-07-02 1988-08-23 Akzo America Inc. Energy ray curing of arylsiloxane/silicate compositions and subsequent etching thereof
US4801507A (en) * 1987-07-02 1989-01-31 Akzo American Inc. Arylsiloxane/silicate compositions useful as interlayer dielectric films
US5057396A (en) * 1988-09-22 1991-10-15 Tosoh Corporation Photosensitive material having a silicon-containing polymer
US5089303A (en) * 1989-04-24 1992-02-18 Akzo America Inc. Blend of solvent and photocurable arylsiloxane materials
US5106658A (en) * 1989-04-24 1992-04-21 Akzo Nv Hardness improvement of film containing arylsiloxane and organosilicate
US5118742A (en) * 1989-04-24 1992-06-02 Akzo Nv Blend of silicate and photocurable arylsiloxane materials
US5110711A (en) * 1989-10-10 1992-05-05 International Business Machines Corporation Method for forming a pattern
US5098816A (en) * 1989-10-10 1992-03-24 International Business Machines Corporation Method for forming a pattern of a photoresist
US5059512A (en) * 1989-10-10 1991-10-22 International Business Machines Corporation Ultraviolet light sensitive photoinitiator compositions, use thereof and radiation sensitive compositions
US5024969A (en) * 1990-02-23 1991-06-18 Reche John J Hybrid circuit structure fabrication methods using high energy electron beam curing
EP0464614B1 (en) * 1990-06-25 1999-09-29 Matsushita Electronics Corporation A composition having sensitivity to light or radiation
JPH04233732A (ja) * 1990-08-16 1992-08-21 Motorola Inc 半導体の製造工程で使用するスピン・オン誘電体
US5093225A (en) * 1990-09-14 1992-03-03 Gte Laboratories Incorporated Processing method for fabricating electrical contacts to mesa structures in semiconductor devices
US5312684A (en) * 1991-05-02 1994-05-17 Dow Corning Corporation Threshold switching device
JPH05197304A (ja) * 1992-01-20 1993-08-06 Hitachi Ltd 溶着部材
JP2934353B2 (ja) * 1992-06-24 1999-08-16 三菱電機株式会社 半導体装置およびその製造方法
US5397741A (en) * 1993-03-29 1995-03-14 International Business Machines Corporation Process for metallized vias in polyimide
TW434458B (en) * 1995-04-04 2001-05-16 Shinetsu Chemical Co Chemically amplified positive resist compositions
US6607991B1 (en) 1995-05-08 2003-08-19 Electron Vision Corporation Method for curing spin-on dielectric films utilizing electron beam radiation
MY113904A (en) * 1995-05-08 2002-06-29 Electron Vision Corp Method for curing spin-on-glass film utilizing electron beam radiation
JP2697680B2 (ja) * 1995-05-31 1998-01-14 日本電気株式会社 珪素含有高分子化合物および感光性樹脂組成物
US6157079A (en) * 1997-11-10 2000-12-05 Citizen Watch Co., Ltd Semiconductor device with a bump including a bump electrode film covering a projecting photoresist
JP3543669B2 (ja) * 1999-03-31 2004-07-14 信越化学工業株式会社 絶縁膜形成用塗布液及び絶縁膜の形成方法
WO2000077575A1 (en) * 1999-06-10 2000-12-21 Alliedsignal Inc. Spin-on-glass anti-reflective coatings for photolithography
KR20000063142A (ko) * 2000-02-17 2000-11-06 이응찬 폴리오르가노실세스키옥산 제조용 출발물질,폴리오르가노실세스키옥산 및 폴리오르가노실세스키옥산제조방법
US6368400B1 (en) * 2000-07-17 2002-04-09 Honeywell International Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography
US6653045B2 (en) * 2001-02-16 2003-11-25 International Business Machines Corporation Radiation sensitive silicon-containing negative resists and use thereof
EP1490454B1 (en) * 2002-01-17 2012-08-15 Silecs OY Method for making an integrated circuit device and corresponding integrated circuit device
US8053159B2 (en) 2003-11-18 2011-11-08 Honeywell International Inc. Antireflective coatings for via fill and photolithography applications and methods of preparation thereof
US7659050B2 (en) * 2005-06-07 2010-02-09 International Business Machines Corporation High resolution silicon-containing resist
US20070212886A1 (en) * 2006-03-13 2007-09-13 Dong Seon Uh Organosilane polymers, hardmask compositions including the same and methods of producing semiconductor devices using organosilane hardmask compositions
US8642246B2 (en) 2007-02-26 2014-02-04 Honeywell International Inc. Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof
US8557877B2 (en) 2009-06-10 2013-10-15 Honeywell International Inc. Anti-reflective coatings for optically transparent substrates
KR101249798B1 (ko) * 2010-08-18 2013-04-03 한국과학기술연구원 선택적으로 구조가 제어된 폴리실세스퀴옥산의 제조방법 및 이로부터 제조된 폴리실세스퀴옥산
US8864898B2 (en) 2011-05-31 2014-10-21 Honeywell International Inc. Coating formulations for optical elements
JP6803842B2 (ja) 2015-04-13 2020-12-23 ハネウェル・インターナショナル・インコーポレーテッドＨｏｎｅｙｗｅｌｌ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｉｎｃ． オプトエレクトロニクス用途のためのポリシロキサン製剤及びコーティング

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US162017A (en) * 1875-04-13 Improvement in door-bolts
US3162614A (en) * 1962-02-23 1964-12-22 Gen Electric Process for making benzene-soluble phenyl silsesquioxane
NL290390A (enExample) * 1962-03-29
US3294738A (en) * 1963-12-23 1966-12-27 Gen Electric Method for making arylsilsesquioxane ladder polymers
US4041190A (en) * 1971-06-29 1977-08-09 Thomson-Csf Method for producing a silica mask on a semiconductor substrate
US3944520A (en) * 1974-04-18 1976-03-16 Andrianov Kuzma A Cyclolinear polyorganosiloxanes and method for preparing same
US4209356A (en) * 1978-10-18 1980-06-24 General Electric Company Selective etching of polymeric materials embodying silicones via reactor plasmas
US4209358A (en) * 1978-12-04 1980-06-24 Western Electric Company, Incorporated Method of fabricating a microelectronic device utilizing unfilled epoxy adhesive
US4349609A (en) * 1979-06-21 1982-09-14 Fujitsu Limited Electronic device having multilayer wiring structure

Also Published As

Publication number Publication date
EP0049127B1 (en) 1986-01-15
EP0049127A1 (en) 1982-04-07
JPS6360374B2 (enExample) 1988-11-24
JPS5760330A (en) 1982-04-12
US4600685A (en) 1986-07-15

Similar Documents

Publication Publication Date Title
DE3173512D1 (en) Patterning process and process for production of electronic devices utilizing said patterning process
JPS5568700A (en) Wiring device and method of manufacturing same
PH16171A (en) De(mycinosyltlosin)and process for its production
JPS5496775A (en) Method of forming circuit
JPS54140968A (en) Method of forming circuit
ZA811303B (en) Process and device for the production of liquefield iron
JPS5496764A (en) Method of producing electronic components
JPS54158657A (en) Method of producing electronic component
JPS5553476A (en) Method of manufacturing electronic circuit device
JPS5575297A (en) Method of fabricating electronic equipment
JPS5676590A (en) Method of wiring electronic part
JPS556822A (en) Method of manufacturing ceramic multiilayer wiring board
JPS5494667A (en) Method of forming circuit
JPS54139064A (en) Method of forming circuit board
JPS5749129A (en) Method of producing electronic part
JPS54163355A (en) Mold method of electronic component
JPS54129362A (en) Method of producing circuit device
PT70533A (en) Process for the manufacture of electronic devices and electronic devices obtained by means of same process
JPS5768012A (en) Method of producing electronic part
DE3171056D1 (en) Process for the production of slag elements and device for its implementation
JPS5565496A (en) Method of arranging electronic parts
JPS54108268A (en) Method of producing electronic circuit device
JPS5468826A (en) Method of making inorganic substrate
JPS556823A (en) Method of manufacturing ceramic multiilayer wiring board
JPS5766693A (en) Method of producing electronic circuit device

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee