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G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
Beleuchtungsoptik für die EUV-Projektions-Mikrolithographie, Projektionsbelichtungsanlage und Verfahren zur Herstellung eines mikrostrukturierten Bauteils