DE3038155C2 - - Google Patents
Info
- Publication number
- DE3038155C2 DE3038155C2 DE19803038155 DE3038155A DE3038155C2 DE 3038155 C2 DE3038155 C2 DE 3038155C2 DE 19803038155 DE19803038155 DE 19803038155 DE 3038155 A DE3038155 A DE 3038155A DE 3038155 C2 DE3038155 C2 DE 3038155C2
- Authority
- DE
- Germany
- Prior art keywords
- time
- tungsten oxide
- gluing
- glow
- carried out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 238000004026 adhesive bonding Methods 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 5
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 230000006641 stabilisation Effects 0.000 claims 1
- 238000011105 stabilization Methods 0.000 claims 1
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000008929 regeneration Effects 0.000 description 4
- 238000011069 regeneration method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000001294 propane Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000006187 pill Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000002101 lytic effect Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- -1 oxygen ions Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19803038155 DE3038155A1 (de) | 1980-10-09 | 1980-10-09 | Verfahren zur stabilisierung der kenndaten von duennschcht-gassensoren auf oxidhalbleiterbasis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19803038155 DE3038155A1 (de) | 1980-10-09 | 1980-10-09 | Verfahren zur stabilisierung der kenndaten von duennschcht-gassensoren auf oxidhalbleiterbasis |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3038155A1 DE3038155A1 (de) | 1982-04-29 |
| DE3038155C2 true DE3038155C2 (enrdf_load_stackoverflow) | 1988-06-30 |
Family
ID=6113997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19803038155 Granted DE3038155A1 (de) | 1980-10-09 | 1980-10-09 | Verfahren zur stabilisierung der kenndaten von duennschcht-gassensoren auf oxidhalbleiterbasis |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3038155A1 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4317879A1 (de) * | 1993-05-28 | 1994-12-01 | Rump Elektronik Tech | Vorrichtung zur Detektion halogenisierter Kohlewasserstoffe, insbesondere zur Detektion von Insektiziden, Pestiziden und anderen anorganischen-organischen Verbindungen |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3504499C1 (de) * | 1985-02-09 | 1986-06-12 | Drägerwerk AG, 2400 Lübeck | Verfahren zur Sensibilisierung und Stabilisierung des Betriebszustandes von Halbleitergassensoren |
-
1980
- 1980-10-09 DE DE19803038155 patent/DE3038155A1/de active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4317879A1 (de) * | 1993-05-28 | 1994-12-01 | Rump Elektronik Tech | Vorrichtung zur Detektion halogenisierter Kohlewasserstoffe, insbesondere zur Detektion von Insektiziden, Pestiziden und anderen anorganischen-organischen Verbindungen |
| DE4317879B4 (de) * | 1993-05-28 | 2005-02-10 | I.T.V.I. International Techno Venture Invest Ag | Vorrichtung zum Nachweis von anorganisch-organischen Verbindungen, Narkosegasen, Pestiziden, Insektiziden und halogenisierten Kohlenwasserstoffen in Gasströmen mittels Halbleiter-Gassensoren |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3038155A1 (de) | 1982-04-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Koo et al. | The effects of hydrostatic pressure, temperature, and voltage duration on the electric strengths of hydrocarbon liquids | |
| DE3832298C2 (enrdf_load_stackoverflow) | ||
| EP0046989B1 (de) | Selektiver Dünnschicht-Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung von gasförmigen Kohlenwasserstoff-Verunreinigungen in der Luft auf der Basis von Wolframoxid (WOx)-Halbleitern, sowie ein Verfahren zu seiner Herstellung | |
| DE1621599B1 (de) | Einrichtung zum abtragen von verunreinigungen einer auf einem halbleiterkoerper aufgebrachten metallischen schicht im bereich von kleinen oeffnungen einer isolierschicht durch kathodenzerstaeubung | |
| DE2601656A1 (de) | Hochohmige metallkeramikschicht und verfahren zu deren herstellung | |
| Christy | Electrical properties of thin polymer films. Part II. Thickness 50–150 Å | |
| DE1690276B1 (de) | Kathodenzerstaeubungsvrfahren zur herstellung ohmscher kontakte auf einem halbleitersubstrat und vorrichtung zur durchfuehrung des verfahrens | |
| DE1514359B1 (de) | Feldeffekt-Halbleiterbauelement und Verfahren zu seiner Herstellung | |
| DE3038155C2 (enrdf_load_stackoverflow) | ||
| De Mierry et al. | Effect of Surface Preparations on Electrical and Chemical Surface Properties of P‐Type Silicon | |
| Sluzky et al. | Electrophoretic preparation of phosphor screens | |
| DE4132562C2 (enrdf_load_stackoverflow) | ||
| DE3336652C2 (de) | Vorrichtung zum Auftragen von Materialien, insbesondere amorphen wasserstoffhaltigen Kohlenstoffs | |
| DE2019091A1 (de) | Verfahren zur Herstellung stabiler Duennfilmwiderstaende | |
| EP0021204B1 (de) | Ionengenerator | |
| DD227800A1 (de) | Verfahren zur herstellung einer fluoridsensitiven membran | |
| Breyer et al. | Alternating current polarography of organic compounds. III. Chloranilic acid | |
| DE4000664A1 (de) | Transparente elektrode aus leitfaehigem oxid fuer photodioden und verfahren zu ihrer herstellung | |
| Hancox | The breakdown of liquid dielectrics and its dependence on oxidation of the electrodes | |
| DE2616270C3 (de) | Verfahren zum Herstellen einer schweroxidierbaren Schicht auf einem Körper aus einem leichtoxidierenden Metall oder einer entsprechenden Metallegierung | |
| DE2909359C2 (de) | Verfahren zur Herstellung einer elektrochromen Anzeigevorrichtung | |
| Hennig et al. | The Influence of the Preparation on Layer Properties of Transparent Indium–Tin Oxide Electrodes | |
| DE2236074C3 (de) | Chemisch hochresistenter -Werkstoff und Verfahren zur Herstellung dünner Oberflächenschichten aus diesem Werkstoff | |
| DE19721520C1 (de) | Hochtemperatur-Gassensor | |
| DE3440351A1 (de) | Feuchtigkeitssensor und verfahren zu dessen herstellung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |