DE3034903C2 - - Google Patents

Info

Publication number
DE3034903C2
DE3034903C2 DE3034903A DE3034903A DE3034903C2 DE 3034903 C2 DE3034903 C2 DE 3034903C2 DE 3034903 A DE3034903 A DE 3034903A DE 3034903 A DE3034903 A DE 3034903A DE 3034903 C2 DE3034903 C2 DE 3034903C2
Authority
DE
Germany
Prior art keywords
laser
scanning
light
laser radiation
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3034903A
Other languages
German (de)
English (en)
Other versions
DE3034903A1 (de
Inventor
Frank Arthur Norwalk Conn. Us Slaker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTEC CORP TRUMBULL CONN US
Original Assignee
INTEC CORP TRUMBULL CONN US
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTEC CORP TRUMBULL CONN US filed Critical INTEC CORP TRUMBULL CONN US
Publication of DE3034903A1 publication Critical patent/DE3034903A1/de
Application granted granted Critical
Publication of DE3034903C2 publication Critical patent/DE3034903C2/de
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE19803034903 1979-07-27 1980-09-16 System zur erfassung von defekten Granted DE3034903A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/061,451 US4265545A (en) 1979-07-27 1979-07-27 Multiple source laser scanning inspection system

Publications (2)

Publication Number Publication Date
DE3034903A1 DE3034903A1 (de) 1982-04-29
DE3034903C2 true DE3034903C2 (US20030199744A1-20031023-C00003.png) 1990-04-19

Family

ID=22035865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803034903 Granted DE3034903A1 (de) 1979-07-27 1980-09-16 System zur erfassung von defekten

Country Status (3)

Country Link
US (1) US4265545A (US20030199744A1-20031023-C00003.png)
DE (1) DE3034903A1 (US20030199744A1-20031023-C00003.png)
SE (1) SE450602B (US20030199744A1-20031023-C00003.png)

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US20020146171A1 (en) * 2000-10-01 2002-10-10 Applied Science Fiction, Inc. Method, apparatus and system for black segment detection
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US6551750B2 (en) * 2001-03-16 2003-04-22 Numerical Technologies, Inc. Self-aligned fabrication technique for tri-tone attenuated phase-shifting masks
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US7263240B2 (en) * 2002-01-14 2007-08-28 Eastman Kodak Company Method, system, and software for improving signal quality using pyramidal decomposition
US6934029B1 (en) * 2002-04-22 2005-08-23 Eugene Matzan Dual laser web defect scanner
CA2446368C (en) * 2002-10-29 2014-10-14 Bayer Healthcare Llc Diffuse reflectance readhead
FR2852533B1 (fr) * 2003-03-20 2006-10-06 Arck Electronique Dispositif de detection de trous dans des materiaux defilant en bandes continues
US7190458B2 (en) * 2003-12-09 2007-03-13 Applied Materials, Inc. Use of scanning beam for differential evaluation of adjacent regions for change in reflectivity
US20050276451A1 (en) * 2004-05-27 2005-12-15 Hunking Maurice J Method and apparatus for sorting
US8405837B2 (en) * 2004-06-30 2013-03-26 Georgetown Rail Equipment Company System and method for inspecting surfaces using optical wavelength filtering
US8958079B2 (en) 2004-06-30 2015-02-17 Georgetown Rail Equipment Company System and method for inspecting railroad ties
WO2009153792A2 (en) * 2008-06-19 2009-12-23 Utilight Ltd. Light induced patterning
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US20170234728A1 (en) * 2010-12-01 2017-08-17 Mks Technology (D/B/A Snowy Range Instruments) Spectrometer
US9791313B2 (en) * 2010-12-01 2017-10-17 MKS Technology Spectrometer
JP6590793B2 (ja) * 2013-05-31 2019-10-16 エムケイエス・テクノロジー,インコーポレーテッド 分光器、及び分光サンプルの表面全体に分光器の集束入射ビームを移動させる方法
JP5686394B1 (ja) * 2014-04-11 2015-03-18 レーザーテック株式会社 ペリクル検査装置
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DE2404972A1 (de) * 1974-02-01 1975-08-07 Ciba Geigy Ag Vorrichtung zur ermittlung von fehlstellen auf der oberflaeche eines bewegten reflektierenden materials
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US3980891A (en) * 1975-05-16 1976-09-14 Intec Corporation Method and apparatus for a rotary scanner flaw detection system

Also Published As

Publication number Publication date
DE3034903A1 (de) 1982-04-29
SE450602B (sv) 1987-07-06
SE8006088L (sv) 1982-03-02
US4265545A (en) 1981-05-05

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee