DE3032306C2 - - Google Patents

Info

Publication number
DE3032306C2
DE3032306C2 DE3032306A DE3032306A DE3032306C2 DE 3032306 C2 DE3032306 C2 DE 3032306C2 DE 3032306 A DE3032306 A DE 3032306A DE 3032306 A DE3032306 A DE 3032306A DE 3032306 C2 DE3032306 C2 DE 3032306C2
Authority
DE
Germany
Prior art keywords
field effect
gate insulating
effect transistor
electron beam
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3032306A
Other languages
German (de)
English (en)
Other versions
DE3032306A1 (de
Inventor
William George Prof. El Cerrito Calif. Us Oldham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19803032306 priority Critical patent/DE3032306A1/de
Priority to EP81106345A priority patent/EP0046552B1/de
Priority to US06/294,300 priority patent/US4441036A/en
Priority to JP56133917A priority patent/JPS5772366A/ja
Publication of DE3032306A1 publication Critical patent/DE3032306A1/de
Application granted granted Critical
Publication of DE3032306C2 publication Critical patent/DE3032306C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/08—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using semiconductor devices, e.g. bipolar elements
    • G11C17/10—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using semiconductor devices, e.g. bipolar elements in which contents are determined during manufacturing by a predetermined arrangement of coupling elements, e.g. mask-programmable ROM
    • G11C17/12—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using semiconductor devices, e.g. bipolar elements in which contents are determined during manufacturing by a predetermined arrangement of coupling elements, e.g. mask-programmable ROM using field-effect devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
    • G11C13/047—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam using electro-optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs

Landscapes

  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Hardware Redundancy (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE19803032306 1980-08-27 1980-08-27 Monolithisch integrierte schaltung mit zu- und/oder abschaltbaren schaltungsteilen Granted DE3032306A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19803032306 DE3032306A1 (de) 1980-08-27 1980-08-27 Monolithisch integrierte schaltung mit zu- und/oder abschaltbaren schaltungsteilen
EP81106345A EP0046552B1 (de) 1980-08-27 1981-08-14 Monolithisch integrierte Schaltung mit zu- und/oder abschaltbaren Schaltungsteilen
US06/294,300 US4441036A (en) 1980-08-27 1981-08-19 Monolithically integrated circuit with connectible and/or disconnectible circuit portions
JP56133917A JPS5772366A (en) 1980-08-27 1981-08-26 Monolithic integrated circuit and method of driving same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803032306 DE3032306A1 (de) 1980-08-27 1980-08-27 Monolithisch integrierte schaltung mit zu- und/oder abschaltbaren schaltungsteilen

Publications (2)

Publication Number Publication Date
DE3032306A1 DE3032306A1 (de) 1982-04-08
DE3032306C2 true DE3032306C2 (en, 2012) 1989-10-19

Family

ID=6110511

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803032306 Granted DE3032306A1 (de) 1980-08-27 1980-08-27 Monolithisch integrierte schaltung mit zu- und/oder abschaltbaren schaltungsteilen

Country Status (4)

Country Link
US (1) US4441036A (en, 2012)
EP (1) EP0046552B1 (en, 2012)
JP (1) JPS5772366A (en, 2012)
DE (1) DE3032306A1 (en, 2012)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4608668A (en) * 1981-09-03 1986-08-26 Tokyo Shibaura Denki Kabushiki Kaisha Semiconductor device
US4633572A (en) * 1983-02-22 1987-01-06 General Motors Corporation Programming power paths in an IC by combined depletion and enhancement implants
EP0159601A3 (de) * 1984-04-10 1987-08-19 Hartwig Wolfgang Prof.Dr. Thim Logik-Schaltungsanordnung mit dazu angepasst ausgebildeten Feldeffekt-Transistoren
DE3788318T2 (de) * 1986-06-23 1994-06-16 Canon Kk Verfahren und Anordnung zur Datenübertragung unter Verwendung eines Elektronenstrahls.
JP2613960B2 (ja) * 1990-08-16 1997-05-28 山形日本電気株式会社 半導体集積回路
US5802395A (en) * 1996-07-08 1998-09-01 International Business Machines Corporation High density memory modules with improved data bus performance
WO2013024386A2 (en) * 2011-08-16 2013-02-21 0Ec Sa System for a contactless control of a field effect transistor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528064A (en) * 1966-09-01 1970-09-08 Univ California Semiconductor memory element and method
US3634927A (en) * 1968-11-29 1972-01-18 Energy Conversion Devices Inc Method of selective wiring of integrated electronic circuits and the article formed thereby
US3721962A (en) * 1970-08-03 1973-03-20 Ncr Beam accessed mos memory with beam reading,writing,and erasing
GB1377859A (en) * 1972-08-03 1974-12-18 Catt I Digital integrated circuits
JPS532308B2 (en, 2012) * 1972-09-25 1978-01-26
US3940740A (en) * 1973-06-27 1976-02-24 Actron Industries, Inc. Method for providing reconfigurable microelectronic circuit devices and products produced thereby
JPS588588B2 (ja) * 1975-05-28 1983-02-16 株式会社日立製作所 半導体集積回路
JPS5244585A (en) * 1975-10-06 1977-04-07 Fujitsu Ltd Process for production of semiconductor integrated circuit
JPS5291661A (en) * 1976-01-28 1977-08-02 Toshiba Corp Semiconductor integrated circuit
US4190849A (en) * 1977-09-19 1980-02-26 Motorola, Inc. Electronic-beam programmable semiconductor device structure
JPS54113278A (en) * 1978-02-24 1979-09-04 Hitachi Ltd Selective wiring in lsi
US4233674A (en) * 1978-08-07 1980-11-11 Signetics Corporation Method of configuring an integrated circuit

Also Published As

Publication number Publication date
JPS5772366A (en) 1982-05-06
EP0046552B1 (de) 1988-06-08
EP0046552A2 (de) 1982-03-03
EP0046552A3 (en) 1984-10-10
DE3032306A1 (de) 1982-04-08
JPH0546103B2 (en, 2012) 1993-07-13
US4441036A (en) 1984-04-03

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition