DE2938240A1 - Druckempfindliche einrichtung und verfahren zu ihrer herstellung - Google Patents

Druckempfindliche einrichtung und verfahren zu ihrer herstellung

Info

Publication number
DE2938240A1
DE2938240A1 DE19792938240 DE2938240A DE2938240A1 DE 2938240 A1 DE2938240 A1 DE 2938240A1 DE 19792938240 DE19792938240 DE 19792938240 DE 2938240 A DE2938240 A DE 2938240A DE 2938240 A1 DE2938240 A1 DE 2938240A1
Authority
DE
Germany
Prior art keywords
support member
iron
metal
metal support
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19792938240
Other languages
German (de)
English (en)
Other versions
DE2938240C2 (US20100012521A1-20100121-C00001.png
Inventor
Mitsuo Ai
Yoshitaka Matsuoka
Kenji Miyauchi
Hideyuki Nemoto
Michitaka Shimazoe
Masanori Tanabe
Masatoshi Tsuchiya
Yoshimi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE2938240A1 publication Critical patent/DE2938240A1/de
Application granted granted Critical
Publication of DE2938240C2 publication Critical patent/DE2938240C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE19792938240 1978-09-22 1979-09-21 Druckempfindliche einrichtung und verfahren zu ihrer herstellung Granted DE2938240A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11591878A JPS5543819A (en) 1978-09-22 1978-09-22 Pressure detecting equipment

Publications (2)

Publication Number Publication Date
DE2938240A1 true DE2938240A1 (de) 1980-03-27
DE2938240C2 DE2938240C2 (US20100012521A1-20100121-C00001.png) 1987-02-12

Family

ID=14674425

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792938240 Granted DE2938240A1 (de) 1978-09-22 1979-09-21 Druckempfindliche einrichtung und verfahren zu ihrer herstellung

Country Status (3)

Country Link
US (1) US4303903A (US20100012521A1-20100121-C00001.png)
JP (1) JPS5543819A (US20100012521A1-20100121-C00001.png)
DE (1) DE2938240A1 (US20100012521A1-20100121-C00001.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3315266A1 (de) * 1983-04-27 1984-10-31 Fuji Electric Co., Ltd., Kawasaki, Kanagawa Halbleiter-drucksensor
EP0140992A1 (de) * 1983-11-10 1985-05-15 Kristal Instrumente AG Wandlerelement, Verfahren zu seiner Herstellung sowie Verwendung für einen Druckaufnehmer
EP0337380A2 (en) * 1988-04-15 1989-10-18 Honeywell Inc. Semiconductor pressure sensor
EP0420569A2 (en) * 1989-09-26 1991-04-03 Honeywell Inc. Glass tube/stainless steel header interface for pressure sensor

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723830A (en) * 1980-07-18 1982-02-08 Hitachi Ltd Post material for pressure transducer of semiconductor and its preparation
JPS5780532A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor load converter
US4399707A (en) * 1981-02-04 1983-08-23 Honeywell, Inc. Stress sensitive semiconductor unit and housing means therefor
JPS58103634A (ja) * 1981-12-16 1983-06-20 Yamatake Honeywell Co Ltd 半導体圧力変換器
US4527428A (en) * 1982-12-30 1985-07-09 Hitachi, Ltd. Semiconductor pressure transducer
US4600912A (en) * 1985-01-25 1986-07-15 Bourns Instruments, Inc. Diaphragm pressure sensor with improved tensile loading characteristics
ATE42637T1 (de) * 1985-09-11 1989-05-15 Kunz Manfred Drucksensor.
JPS63177030A (ja) * 1987-01-19 1988-07-21 Nippon Denso Co Ltd 半導体圧力センサ
US4888992A (en) * 1988-04-15 1989-12-26 Honeywell Inc. Absolute pressure transducer and method for making same
US5049421A (en) * 1989-01-30 1991-09-17 Dresser Industries, Inc. Transducer glass bonding technique
JP2595829B2 (ja) * 1991-04-22 1997-04-02 株式会社日立製作所 差圧センサ、及び複合機能形差圧センサ
JPH06132545A (ja) * 1992-10-19 1994-05-13 Mitsubishi Electric Corp 圧力検出装置
US5565629A (en) * 1992-12-11 1996-10-15 Nippondenso Co., Ltd. Semiconductor-type pressure sensor with isolation diaphragm with flat portion between corrugations
DE4435909C2 (de) * 1993-10-08 2000-06-15 Hitachi Ltd Druckmeßvorrichtung mit einer Membran
WO1996034265A1 (en) * 1995-04-28 1996-10-31 Rosemount Inc. Mounting assembly for a pressure transmitter
JP3160796B2 (ja) * 1995-05-30 2001-04-25 株式会社日立製作所 半導体圧力検出器
JP3403294B2 (ja) * 1996-09-10 2003-05-06 忠弘 大見 圧力検出器
US6570485B1 (en) * 2000-11-17 2003-05-27 Honeywell International Inc. Transducer packaging assembly for use in sensing unit subjected to high G forces
US6577224B2 (en) * 2001-03-22 2003-06-10 Kulite Semiconductor Products, Inc. Ultra high pressure transducers
WO2004053449A1 (en) * 2002-12-12 2004-06-24 Danfoss A/S A pressure sensor
US7369032B2 (en) * 2003-01-09 2008-05-06 Kulite Semiconductor Products, Inc. Method of joining a pressure sensor header with an associated transducer element
US7212096B2 (en) * 2003-01-09 2007-05-01 Kulite Semiconductor Products, Inc. Pressure sensor header having an integrated isolation diaphragm
US20040135666A1 (en) * 2003-01-09 2004-07-15 Kurtz Anthony D. Pressure sensor header having an integrated isolation diaphragm
US6883378B2 (en) * 2003-03-28 2005-04-26 Honeywell International, Inc. Low TCE fill fluid for barrier diaphragm pressure sensors
US8371176B2 (en) * 2011-01-06 2013-02-12 Honeywell International Inc. Media isolated pressure sensor
US9873939B2 (en) 2011-09-19 2018-01-23 The Regents Of The University Of Michigan Microfluidic device and method using double anodic bonding
US8516897B1 (en) 2012-02-21 2013-08-27 Honeywell International Inc. Pressure sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397278A (en) * 1965-05-06 1968-08-13 Mallory & Co Inc P R Anodic bonding
US3697918A (en) * 1971-08-03 1972-10-10 Gen Electric Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements
GB1404016A (en) * 1971-08-02 1975-08-28 Bailey Meter Co Pressure transducer
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248087A (en) * 1969-02-28 1971-09-29 Ferranti Ltd Improvements relating to pressure gauges
US3918019A (en) * 1974-03-11 1975-11-04 Univ Leland Stanford Junior Miniature absolute pressure transducer assembly and method
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4129042A (en) * 1977-11-18 1978-12-12 Signetics Corporation Semiconductor transducer packaged assembly

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397278A (en) * 1965-05-06 1968-08-13 Mallory & Co Inc P R Anodic bonding
GB1404016A (en) * 1971-08-02 1975-08-28 Bailey Meter Co Pressure transducer
US3697918A (en) * 1971-08-03 1972-10-10 Gen Electric Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements
US4019388A (en) * 1976-03-11 1977-04-26 Bailey Meter Company Glass to metal seal

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3315266A1 (de) * 1983-04-27 1984-10-31 Fuji Electric Co., Ltd., Kawasaki, Kanagawa Halbleiter-drucksensor
EP0140992A1 (de) * 1983-11-10 1985-05-15 Kristal Instrumente AG Wandlerelement, Verfahren zu seiner Herstellung sowie Verwendung für einen Druckaufnehmer
US4675643A (en) * 1983-11-10 1987-06-23 Kristal Instrumente Ag Pressure transducer utilizing a transduction element
EP0337380A2 (en) * 1988-04-15 1989-10-18 Honeywell Inc. Semiconductor pressure sensor
EP0337380A3 (en) * 1988-04-15 1991-07-03 Honeywell Inc. Semiconductor pressure sensor
EP0420569A2 (en) * 1989-09-26 1991-04-03 Honeywell Inc. Glass tube/stainless steel header interface for pressure sensor
EP0420569A3 (en) * 1989-09-26 1991-09-11 Honeywell Inc. Glass tube/stainless steel header interface for pressure sensor

Also Published As

Publication number Publication date
US4303903A (en) 1981-12-01
DE2938240C2 (US20100012521A1-20100121-C00001.png) 1987-02-12
JPS5543819A (en) 1980-03-27

Similar Documents

Publication Publication Date Title
DE2938240A1 (de) Druckempfindliche einrichtung und verfahren zu ihrer herstellung
EP0140992B1 (de) Wandlerelement, Verfahren zu seiner Herstellung sowie Verwendung für einen Druckaufnehmer
DE4203832C2 (de) Halbleiter-Druckaufnehmer
DE2237535C2 (de) Druckwandler
DE3047276C2 (de) Differenzdruckmesser
DE10153319B4 (de) Mikrosensor
DE3901492C2 (US20100012521A1-20100121-C00001.png)
DE3687271T2 (de) Ultraschallwandler.
DE10029406B4 (de) Oberflächenwellenbauelement
DE8407322U1 (de) Piezoresestive druckmesszelle
DE3913031A1 (de) Drucksensor
DE112009001079B4 (de) Hermetisch abdichtende Kappe
EP0417237A1 (de) Kapazitiver drucksensor und verfahren zu seiner herstellung.
DE10131697A1 (de) Durch eine Basis mit Führung gehaltener Sensor
DE102006007083A1 (de) Druck abtastendes Element und Sensor in welchem dasselbe aufgenommen ist
DE3937522A1 (de) Mit einem traegerelement verbundener halbleiter-drucksensor
DE3025996C2 (de) Verfahren zur Herstellung eines Wegaufnehmers
DE1765164B2 (de) Verfahren zur bindung von stromleitern
DE3017502A1 (de) Verfahren zur herstellung von monolithischen halbleiterbauelementen
DE10134586A1 (de) Sensoreinrichtung zum Erfassen einer Dehnungsbeanspruchung
DE1627762B2 (de) Verfahren zur Herstellung einer Halbleitervorrichtung
DE3200448C2 (de) Verfahren zur Herstellung einer Halbleiter-Druckwandleranordnung
DE1963756C3 (de) Auf Druck ansprechender elektrischer Wandler
DE3033028A1 (de) Praezisionswiderstand und verfahren zu dessen herstellung.
DE3315266A1 (de) Halbleiter-drucksensor

Legal Events

Date Code Title Description
OAP Request for examination filed
OD Request for examination
8125 Change of the main classification

Ipc: G01L 9/06

8181 Inventor (new situation)

Free format text: MATSUOKA, YOSHITAKA, MITO, IBARAKI, JP SHIMAZOE, MICHITAKA, KATSUTA, IBARAKI, JP YAMAMOTO, YOSHIMI,IBARAKI, JP AI, MITSUO, KATSUTA, IBARAKI, JP MIYAUCHI, KENJI, MITO, IBARAKI, JP NEMOTO, HIDEYUKI, KATSUTA, IBARAKI, JP TSUCHIYA, MASATOSHI TANABE, MASANORI, HITACHI, IBARAKI, JP

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee