DE2937741C2 - - Google Patents

Info

Publication number
DE2937741C2
DE2937741C2 DE19792937741 DE2937741A DE2937741C2 DE 2937741 C2 DE2937741 C2 DE 2937741C2 DE 19792937741 DE19792937741 DE 19792937741 DE 2937741 A DE2937741 A DE 2937741A DE 2937741 C2 DE2937741 C2 DE 2937741C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19792937741
Other versions
DE2937741A1 (de
Inventor
Guenter Dr.-Ing. 8150 Holzkirchen De Doemens
Walther Ing.(Grad.) 8031 Puchheim De Huber
Wolfgang 8000 Muenchen De Tesar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19792937741 priority Critical patent/DE2937741A1/de
Publication of DE2937741A1 publication Critical patent/DE2937741A1/de
Application granted granted Critical
Publication of DE2937741C2 publication Critical patent/DE2937741C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19792937741 1979-09-18 1979-09-18 Verfahren und vorrichtung zur optoelektronischen vermessung von mikrostrukturen, insbesondere auf masken und scheiben der halbleitertechnik Granted DE2937741A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19792937741 DE2937741A1 (de) 1979-09-18 1979-09-18 Verfahren und vorrichtung zur optoelektronischen vermessung von mikrostrukturen, insbesondere auf masken und scheiben der halbleitertechnik

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792937741 DE2937741A1 (de) 1979-09-18 1979-09-18 Verfahren und vorrichtung zur optoelektronischen vermessung von mikrostrukturen, insbesondere auf masken und scheiben der halbleitertechnik

Publications (2)

Publication Number Publication Date
DE2937741A1 DE2937741A1 (de) 1981-05-27
DE2937741C2 true DE2937741C2 (de) 1987-03-12

Family

ID=6081192

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792937741 Granted DE2937741A1 (de) 1979-09-18 1979-09-18 Verfahren und vorrichtung zur optoelektronischen vermessung von mikrostrukturen, insbesondere auf masken und scheiben der halbleitertechnik

Country Status (1)

Country Link
DE (1) DE2937741A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972134A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd パタ−ン検出装置
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法
FR2567348B1 (fr) * 1984-07-09 1986-12-26 Sofretec Dispositif de correlation video, et procede de stabilisation d'un mobile utilisant un tel dispositif
GB9304966D0 (en) * 1993-03-11 1993-04-28 British Nucelar Fuels Plc Optical measuring system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2700252C2 (de) * 1977-01-05 1985-03-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Prüfen definierter Strukturen

Also Published As

Publication number Publication date
DE2937741A1 (de) 1981-05-27

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Legal Events

Date Code Title Description
OR8 Request for search as to paragraph 43 lit. 1 sentence 1 patent law
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licenses declared (paragraph 23)
8339 Ceased/non-payment of the annual fee