DE2913769C2 - - Google Patents
Info
- Publication number
- DE2913769C2 DE2913769C2 DE2913769A DE2913769A DE2913769C2 DE 2913769 C2 DE2913769 C2 DE 2913769C2 DE 2913769 A DE2913769 A DE 2913769A DE 2913769 A DE2913769 A DE 2913769A DE 2913769 C2 DE2913769 C2 DE 2913769C2
- Authority
- DE
- Germany
- Prior art keywords
- chamber
- ion source
- outlet slot
- source according
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 55
- 238000010884 ion-beam technique Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 13
- 230000001133 acceleration Effects 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 9
- 238000000889 atomisation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010276 construction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- SUBDBMMJDZJVOS-UHFFFAOYSA-N 5-methoxy-2-{[(4-methoxy-3,5-dimethylpyridin-2-yl)methyl]sulfinyl}-1H-benzimidazole Chemical compound N=1C2=CC(OC)=CC=C2NC=1S(=O)CC1=NC=C(C)C(OC)=C1C SUBDBMMJDZJVOS-UHFFFAOYSA-N 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1331078 | 1978-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2913769A1 DE2913769A1 (de) | 1979-11-08 |
| DE2913769C2 true DE2913769C2 (enEXAMPLES) | 1990-04-05 |
Family
ID=10020642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19792913769 Granted DE2913769A1 (de) | 1978-04-05 | 1979-04-05 | Ionenquelle |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4354113A (enEXAMPLES) |
| JP (1) | JPS54139000A (enEXAMPLES) |
| DE (1) | DE2913769A1 (enEXAMPLES) |
| FR (1) | FR2422253A1 (enEXAMPLES) |
| NL (1) | NL7902620A (enEXAMPLES) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2837023B2 (ja) * | 1991-05-14 | 1998-12-14 | アプライド マテリアルズ インコーポレイテッド | イオン源の寿命を向上させたイオン打ち込み装置 |
| DE4334357A1 (de) * | 1993-10-08 | 1995-04-13 | Zeiss Carl Fa | Sattelfeldquelle |
| US7041984B2 (en) * | 2004-05-20 | 2006-05-09 | Inficon, Inc. | Replaceable anode liner for ion source |
| JP5925084B2 (ja) * | 2012-08-28 | 2016-05-25 | 住友重機械イオンテクノロジー株式会社 | イオン生成方法およびイオン源 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1126466A (fr) * | 1955-03-26 | 1956-11-23 | Commissariat Energie Atomique | Nouvelle source productrice d'ions d'éléments réfractaires ou non |
| GB1158782A (en) * | 1965-05-14 | 1969-07-16 | Nat Res Dev | Improvements in or relating to Oscillation Generators |
| US3411035A (en) * | 1966-05-31 | 1968-11-12 | Gen Electric | Multi-chamber hollow cathode low voltage electron beam apparatus |
| GB1414626A (en) | 1971-11-24 | 1975-11-19 | Franks J | Ion sources |
| US3784858A (en) * | 1972-11-24 | 1974-01-08 | J Franks | Ion sources |
| US3831052A (en) * | 1973-05-25 | 1974-08-20 | Hughes Aircraft Co | Hollow cathode gas discharge device |
| GB1488657A (en) * | 1973-09-24 | 1977-10-12 | Ion Tech Ltd | Ion sources |
-
1979
- 1979-04-03 NL NL7902620A patent/NL7902620A/xx not_active Application Discontinuation
- 1979-04-04 FR FR7908537A patent/FR2422253A1/fr active Granted
- 1979-04-05 JP JP4152979A patent/JPS54139000A/ja active Granted
- 1979-04-05 DE DE19792913769 patent/DE2913769A1/de active Granted
-
1980
- 1980-12-30 US US06/221,308 patent/US4354113A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NL7902620A (nl) | 1979-10-09 |
| US4354113A (en) | 1982-10-12 |
| DE2913769A1 (de) | 1979-11-08 |
| FR2422253B1 (enEXAMPLES) | 1984-02-10 |
| FR2422253A1 (fr) | 1979-11-02 |
| JPS6229862B2 (enEXAMPLES) | 1987-06-29 |
| JPS54139000A (en) | 1979-10-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8128 | New person/name/address of the agent |
Representative=s name: SCHWABE, H., DIPL.-ING. SANDMAIR, K., DIPL.-CHEM. |
|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |