DE2718931A1 - Differenzdruckumformer - Google Patents
DifferenzdruckumformerInfo
- Publication number
- DE2718931A1 DE2718931A1 DE19772718931 DE2718931A DE2718931A1 DE 2718931 A1 DE2718931 A1 DE 2718931A1 DE 19772718931 DE19772718931 DE 19772718931 DE 2718931 A DE2718931 A DE 2718931A DE 2718931 A1 DE2718931 A1 DE 2718931A1
- Authority
- DE
- Germany
- Prior art keywords
- pressure
- fluid
- membrane
- pressure transducer
- sensing element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 claims description 92
- 239000012530 fluid Substances 0.000 claims description 60
- 239000007788 liquid Substances 0.000 claims description 44
- 238000000926 separation method Methods 0.000 claims description 15
- 238000012546 transfer Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 239000000945 filler Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 3
- 230000000295 complement effect Effects 0.000 claims 1
- 230000036540 impulse transmission Effects 0.000 claims 1
- 239000002775 capsule Substances 0.000 description 17
- 239000000523 sample Substances 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- 229910000619 316 stainless steel Inorganic materials 0.000 description 4
- 230000006378 damage Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- JPNWDVUTVSTKMV-UHFFFAOYSA-N cobalt tungsten Chemical compound [Co].[W] JPNWDVUTVSTKMV-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000541 pulsatile effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/682,280 US4072058A (en) | 1976-05-03 | 1976-05-03 | Differential pressure transmitter with pressure sensor protection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2718931A1 true DE2718931A1 (de) | 1977-11-17 |
Family
ID=24739004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19772718931 Withdrawn DE2718931A1 (de) | 1976-05-03 | 1977-04-28 | Differenzdruckumformer |
Country Status (5)
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2375589A1 (fr) * | 1976-12-21 | 1978-07-21 | Siemens Ag | Convertisseur de mesure de pressions differentielles, comportant une protection contre les surcharges |
| EP0086737A1 (de) * | 1982-02-15 | 1983-08-24 | Siemens Aktiengesellschaft | Druck- oder Druckdifferenzmessgerät mit einer vor Überlastung geschützten Drucksensor-Einrichtung |
| DE3928426A1 (de) * | 1988-09-02 | 1990-03-15 | Hitachi Ltd | Differenzdruckmesswertgeber |
| DE3920207A1 (de) * | 1989-06-21 | 1991-01-10 | Endress Hauser Gmbh Co | Vorrichtung zum mechanischen, elektrischen und/oder optoelektronischen verbinden von sensoren und/oder aktoren mit einer informationsverarbeitungs- und/oder energieversorgungszentrale |
| WO1994025843A1 (en) * | 1993-04-23 | 1994-11-10 | Rosemount Inc. | Pressure isolator assembly for sanitary processing |
| FR2754342A1 (fr) * | 1996-10-09 | 1998-04-10 | Schlumberger Ind Sa | Cellule de conversion d'une pression differentielle en signal electrique |
| DE102004017580A1 (de) * | 2004-04-07 | 2005-12-01 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckaufnehmer mit dynamischem Überlastschutz |
| DE102010022642A1 (de) * | 2010-06-04 | 2011-12-08 | Rolls-Royce Deutschland Ltd & Co Kg | Vorrichtung zur Überprüfung des Durchflusses von Öl oder Brennstoff durch eine Filteranordnung |
| DE102019135476A1 (de) * | 2019-12-20 | 2021-06-24 | Endress+Hauser SE+Co. KG | Differenzdruckmessaufnehmer |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1603823A (en) * | 1977-05-02 | 1981-12-02 | Kent Ltd G | Differential pressure sensing device |
| JPS54166842U (US20030220297A1-20031127-C00074.png) * | 1978-05-16 | 1979-11-24 | ||
| US4218925A (en) * | 1979-06-27 | 1980-08-26 | Honeywell Inc. | Differential pressure transmitter with pressure sensor protection |
| JPS5687194A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Differential pressure transmitter |
| US4329877A (en) * | 1980-07-01 | 1982-05-18 | Honeywell Inc. | Adjustable overload mechanism for a differential pressure transmitter |
| JPS5749829A (en) * | 1980-09-10 | 1982-03-24 | Hitachi Ltd | Transmitting device for pressure difference |
| US4370890A (en) * | 1980-10-06 | 1983-02-01 | Rosemount Inc. | Capacitive pressure transducer with isolated sensing diaphragm |
| JPS57196128A (en) * | 1981-05-29 | 1982-12-02 | Toshiba Corp | Differential pressure transmitting device |
| JPS58153341U (ja) * | 1982-03-31 | 1983-10-13 | 株式会社島津製作所 | 光応用差圧伝送器 |
| JPS6065656U (ja) * | 1984-09-25 | 1985-05-09 | 株式会社日立製作所 | 差圧測定装置 |
| JPH02648U (US20030220297A1-20031127-C00074.png) * | 1988-06-14 | 1990-01-05 | ||
| CH687940A5 (de) * | 1993-04-20 | 1997-03-27 | Landis & Gyr Tech Innovat | Kapsel fuer einen Drucksensor und Verfahren zur Einkapselung des Drucksensors. |
| DE29712579U1 (de) * | 1997-07-16 | 1998-08-20 | Siemens AG, 80333 München | Differenzdruck-Meßumformer |
| DE19738704A1 (de) * | 1997-08-29 | 1999-03-04 | Siemens Ag | Verfahren zum Herstellen einer Trennmembrananordnung und eine Trennmembrananordnung für einen Druckmeßumformer |
| US6543291B1 (en) * | 2000-01-06 | 2003-04-08 | Kulite Semiconductor Products, Inc. | Wet-to-wet pressure sensing assembly |
| DE10064871A1 (de) * | 2000-12-27 | 2002-07-04 | Endress & Hauser Gmbh & Co Kg | Druckmessgerät |
| US6886409B2 (en) * | 2001-03-13 | 2005-05-03 | Pamgene International B.V. | System for controlling the flow of a fluid through a substrate |
| US7093495B2 (en) * | 2003-07-28 | 2006-08-22 | Cts Corporation | Pressure sensor |
| US6997059B2 (en) * | 2003-10-07 | 2006-02-14 | Cts Corporation | Pressure sensor |
| DE102004006383A1 (de) * | 2004-02-09 | 2005-08-25 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckaufnehmer mit Überlastmembran |
| US7930943B2 (en) * | 2007-01-30 | 2011-04-26 | Komatsu Ltd. | Differential pressure sensor |
| US7624642B2 (en) * | 2007-09-20 | 2009-12-01 | Rosemount Inc. | Differential pressure sensor isolation in a process fluid pressure transmitter |
| US9259006B2 (en) * | 2008-01-30 | 2016-02-16 | Smartwash Solutions, Llc | Antimicrobial compositions and methods of use thereof |
| DE102008021091A1 (de) | 2008-04-28 | 2009-10-29 | Epcos Ag | Drucksensor |
| US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
| DE102011102837A1 (de) | 2011-05-30 | 2012-12-06 | Epcos Ag | Drucksensor und Verfahren zur Herstellung eines Drucksensors |
| DE102014109491A1 (de) | 2014-07-08 | 2016-02-11 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckmesszelle |
| US9759625B2 (en) | 2015-09-18 | 2017-09-12 | Tecsis Gmbh | Differential pressure transducer assembly with overload protection |
| US9963340B2 (en) | 2015-12-03 | 2018-05-08 | Honeywell International Inc. | Pressure sensor die over pressure protection for high over pressure to operating span ratios |
| US10197462B2 (en) | 2016-05-25 | 2019-02-05 | Honeywell International Inc. | Differential pressure sensor full overpressure protection device |
| US10247632B2 (en) * | 2016-06-23 | 2019-04-02 | Honeywell International | Oil filled gage reference side protection |
| US10378987B2 (en) * | 2017-03-10 | 2019-08-13 | Honeywell International Inc. | Pressure sensor with flow porting having integral flame-proof safety mechanism |
| US10557770B2 (en) * | 2017-09-14 | 2020-02-11 | Sensata Technologies, Inc. | Pressure sensor with improved strain gauge |
| CN108362434A (zh) * | 2018-04-15 | 2018-08-03 | 无锡盛赛传感科技有限公司 | 一种陶瓷压力传感器膜片结构 |
| US11137308B2 (en) * | 2019-01-02 | 2021-10-05 | Baker Hughes, A Ge Company, Llc | High sensitivity pressure sensor package |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2037949A (en) * | 1932-10-01 | 1936-04-21 | Taylor Instrument Co | Force-measuring device |
| US2906095A (en) * | 1956-12-13 | 1959-09-29 | Honeywell Regulator Co | Transmitting apparatus |
| US3277719A (en) * | 1963-10-14 | 1966-10-11 | Motorola Inc | Differential pressure transducer |
| US3400588A (en) * | 1965-05-27 | 1968-09-10 | Lummus Co | Fluid pressure gauge |
| US3590641A (en) * | 1968-06-06 | 1971-07-06 | Microdot Inc | Pressure gage |
| US3722373A (en) * | 1969-06-23 | 1973-03-27 | Sybron Corp | Differential pressure responsive device of welded construction |
| US3559488A (en) * | 1969-08-20 | 1971-02-02 | Honeywell Inc | Differential pressure measuring apparatus |
| US3618390A (en) * | 1969-10-27 | 1971-11-09 | Rosemount Eng Co Ltd | Differential pressure transducer |
| US3712143A (en) * | 1971-12-21 | 1973-01-23 | Honeywell Inc | Differential pressure responsive apparatus |
| US3780588A (en) * | 1972-03-31 | 1973-12-25 | Honeywell Inc | Differential pressure responsive apparatus |
| US3853007A (en) * | 1973-02-09 | 1974-12-10 | Sybron Corp | Volumetric measuring system |
| US3999435A (en) * | 1975-04-24 | 1976-12-28 | Fischer & Porter Co. | Differential pressure transmitter |
-
1976
- 1976-05-03 US US05/682,280 patent/US4072058A/en not_active Expired - Lifetime
-
1977
- 1977-03-11 CA CA273,795A patent/CA1076832A/en not_active Expired
- 1977-04-19 GB GB16158/77A patent/GB1573030A/en not_active Expired
- 1977-04-28 DE DE19772718931 patent/DE2718931A1/de not_active Withdrawn
- 1977-04-28 JP JP4861577A patent/JPS52148181A/ja active Granted
-
1983
- 1983-08-10 JP JP58146263A patent/JPS5951329A/ja active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2375589A1 (fr) * | 1976-12-21 | 1978-07-21 | Siemens Ag | Convertisseur de mesure de pressions differentielles, comportant une protection contre les surcharges |
| EP0086737A1 (de) * | 1982-02-15 | 1983-08-24 | Siemens Aktiengesellschaft | Druck- oder Druckdifferenzmessgerät mit einer vor Überlastung geschützten Drucksensor-Einrichtung |
| DE3928426A1 (de) * | 1988-09-02 | 1990-03-15 | Hitachi Ltd | Differenzdruckmesswertgeber |
| DE3920207A1 (de) * | 1989-06-21 | 1991-01-10 | Endress Hauser Gmbh Co | Vorrichtung zum mechanischen, elektrischen und/oder optoelektronischen verbinden von sensoren und/oder aktoren mit einer informationsverarbeitungs- und/oder energieversorgungszentrale |
| WO1994025843A1 (en) * | 1993-04-23 | 1994-11-10 | Rosemount Inc. | Pressure isolator assembly for sanitary processing |
| FR2754342A1 (fr) * | 1996-10-09 | 1998-04-10 | Schlumberger Ind Sa | Cellule de conversion d'une pression differentielle en signal electrique |
| WO1998015808A1 (fr) * | 1996-10-09 | 1998-04-16 | Schlumberger Industries, S.A. | Cellule de conversion d'une pression differentielle en signal electrique |
| AU725694B2 (en) * | 1996-10-09 | 2000-10-19 | Schlumberger Industries S.A. | A cell for converting a differential pressure into an electric signal |
| DE102004017580A1 (de) * | 2004-04-07 | 2005-12-01 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckaufnehmer mit dynamischem Überlastschutz |
| US7497127B2 (en) | 2004-04-07 | 2009-03-03 | Endress+Hauser Gmbh+Co. Kg | Pressure-difference pickup with dynamic overload protection |
| DE102010022642A1 (de) * | 2010-06-04 | 2011-12-08 | Rolls-Royce Deutschland Ltd & Co Kg | Vorrichtung zur Überprüfung des Durchflusses von Öl oder Brennstoff durch eine Filteranordnung |
| DE102019135476A1 (de) * | 2019-12-20 | 2021-06-24 | Endress+Hauser SE+Co. KG | Differenzdruckmessaufnehmer |
Also Published As
| Publication number | Publication date |
|---|---|
| US4072058A (en) | 1978-02-07 |
| JPS52148181A (en) | 1977-12-09 |
| JPS5737019B2 (US20030220297A1-20031127-C00074.png) | 1982-08-07 |
| CA1076832A (en) | 1980-05-06 |
| JPS5951329A (ja) | 1984-03-24 |
| GB1573030A (en) | 1980-08-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8130 | Withdrawal |