DE2643914C2 - Einrichtung zum Messen des spezifischen Widerstandes von Leitern und Halbleitern - Google Patents
Einrichtung zum Messen des spezifischen Widerstandes von Leitern und HalbleiternInfo
- Publication number
- DE2643914C2 DE2643914C2 DE2643914A DE2643914A DE2643914C2 DE 2643914 C2 DE2643914 C2 DE 2643914C2 DE 2643914 A DE2643914 A DE 2643914A DE 2643914 A DE2643914 A DE 2643914A DE 2643914 C2 DE2643914 C2 DE 2643914C2
- Authority
- DE
- Germany
- Prior art keywords
- measuring
- resistor
- linearization
- coil
- specific resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 239000004020 conductor Substances 0.000 title claims description 6
- 239000000523 sample Substances 0.000 claims description 23
- 238000012937 correction Methods 0.000 claims description 11
- 239000003990 capacitor Substances 0.000 claims description 10
- 238000012360 testing method Methods 0.000 description 19
- 238000005259 measurement Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 230000008859 change Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013166 platelet test Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2637—Circuits therefor for testing other individual devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS756635A CS202665B1 (cs) | 1975-10-01 | 1975-10-01 | Zařízení pro měření specifického odporu vodivých a polovodivých materiálů |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2643914A1 DE2643914A1 (de) | 1977-04-07 |
| DE2643914C2 true DE2643914C2 (de) | 1983-01-13 |
Family
ID=5413852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2643914A Expired DE2643914C2 (de) | 1975-10-01 | 1976-09-29 | Einrichtung zum Messen des spezifischen Widerstandes von Leitern und Halbleitern |
Country Status (5)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2492535A1 (fr) * | 1980-10-17 | 1982-04-23 | Onera (Off Nat Aerospatiale) | Resistivimetre de surface |
| US4842147A (en) * | 1981-12-04 | 1989-06-27 | Gte Products Corporation | Method and apparatus for conductive film detection |
| US4779739A (en) * | 1981-12-04 | 1988-10-25 | Gte Products Corporation | Method and apparatus for conductive film detection |
| DE3706659A1 (de) * | 1987-03-02 | 1988-09-15 | Heidelberger Druckmasch Ag | Einrichtung zum erfassen der wicklungstemperatur eines insbesondere buerstenlosen gleichstrommotors |
| US4922182A (en) * | 1988-08-03 | 1990-05-01 | Monroe Electronics, Inc. | Auto reactance compensated non-contacting resistivity measuring device |
| DE4231392A1 (de) * | 1992-09-19 | 1994-03-24 | Daimler Benz Ag | Verfahren zur Bestimmung der elektronischen Eigenschaften von Halbleiterschichtstrukturen |
| US5432457A (en) * | 1994-01-28 | 1995-07-11 | Northrop Grumman Corporation | Capacitive disk probe |
| CN101315362B (zh) * | 2008-06-26 | 2011-06-22 | 太仓宏大纺织仪器有限公司 | 纤维比电阻仪以及纤维电阻与纤维比电阻测量方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1082671B (de) * | 1958-11-05 | 1960-06-02 | Siemens Ag | Verfahren zur Bestimmung des elektrischen Widerstandes eines Koerpers aus extrem reinem Halbleiter-material fuer elektronische Zwecke |
| US3234461A (en) * | 1960-12-05 | 1966-02-08 | Texas Instruments Inc | Resistivity-measuring device including solid inductive sensor |
| US3151292A (en) * | 1960-11-29 | 1964-09-29 | Shell Oil Co | Method for determining directional inductive anisotropy of materials by measuring q factor |
| US3400331A (en) * | 1965-01-18 | 1968-09-03 | Pratt & Whitney Inc | Gaging device including a probe having a plurality of concentric and coextensive electrodes |
| US3437920A (en) * | 1965-09-14 | 1969-04-08 | Norman J Anderson | Transducer circuits with frequency-amplitude control |
| DE6600158U (de) * | 1966-09-29 | 1969-01-09 | Siemens Ag | Verfahren zum bestimmen des widerstandes eines flachen koerpers, insbesondere einer scheibe aus halbleitermaterial. |
| US3544893A (en) * | 1968-08-05 | 1970-12-01 | Anatoly Ivanovich Savin | Apparatus for noncontact measurement of semiconductor resistivity including a toroidal inductive coil with a gap |
| US4000458A (en) * | 1975-08-21 | 1976-12-28 | Bell Telephone Laboratories, Incorporated | Method for the noncontacting measurement of the electrical conductivity of a lamella |
-
1975
- 1975-10-01 CS CS756635A patent/CS202665B1/cs unknown
-
1976
- 1976-09-15 DD DD7600194794A patent/DD127816A1/xx unknown
- 1976-09-29 DE DE2643914A patent/DE2643914C2/de not_active Expired
- 1976-10-01 FR FR7629680A patent/FR2326708A1/fr active Granted
- 1976-10-01 US US05/728,839 patent/US4075557A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CS202665B1 (cs) | 1981-01-30 |
| FR2326708A1 (fr) | 1977-04-29 |
| FR2326708B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-12-12 |
| DE2643914A1 (de) | 1977-04-07 |
| DD127816A1 (de) | 1977-10-12 |
| US4075557A (en) | 1978-02-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |