DE2637497C3 - Turbomolekular-Hochvakuumpumpe - Google Patents

Turbomolekular-Hochvakuumpumpe

Info

Publication number
DE2637497C3
DE2637497C3 DE2637497A DE2637497A DE2637497C3 DE 2637497 C3 DE2637497 C3 DE 2637497C3 DE 2637497 A DE2637497 A DE 2637497A DE 2637497 A DE2637497 A DE 2637497A DE 2637497 C3 DE2637497 C3 DE 2637497C3
Authority
DE
Germany
Prior art keywords
shaft
pump
speed
ball bearings
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2637497A
Other languages
German (de)
English (en)
Other versions
DE2637497A1 (de
DE2637497B2 (de
Inventor
Viktor Yakovlevitsch Tscherny
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SU762323859A external-priority patent/SU612100A1/ru
Application filed by Individual filed Critical Individual
Publication of DE2637497A1 publication Critical patent/DE2637497A1/de
Publication of DE2637497B2 publication Critical patent/DE2637497B2/de
Application granted granted Critical
Publication of DE2637497C3 publication Critical patent/DE2637497C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
    • H02K7/16—Structural association with mechanical loads, e.g. with hand-held machine tools or fans for operation above the critical speed of vibration of the rotating parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE2637497A 1976-02-11 1976-08-20 Turbomolekular-Hochvakuumpumpe Expired DE2637497C3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU2322616 1976-02-11
SU762323859A SU612100A1 (ru) 1976-02-19 1976-02-19 Устройство дл подачи смазки к подшипникам

Publications (3)

Publication Number Publication Date
DE2637497A1 DE2637497A1 (de) 1977-08-18
DE2637497B2 DE2637497B2 (de) 1979-04-12
DE2637497C3 true DE2637497C3 (de) 1979-11-29

Family

ID=26665573

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2637497A Expired DE2637497C3 (de) 1976-02-11 1976-08-20 Turbomolekular-Hochvakuumpumpe

Country Status (2)

Country Link
DE (1) DE2637497C3 (el)
FR (1) FR2341054A1 (el)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113068A1 (de) * 1991-04-22 1992-11-05 Leybold Ag Verfahren zur ermittlung oder regelung der drehzahl eines asynchronmotors
DE4237972C2 (de) * 1992-11-11 1997-06-12 Leybold Ag Vakuumpumpe mit Rotor
DE4237971B4 (de) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler

Also Published As

Publication number Publication date
DE2637497A1 (de) 1977-08-18
DE2637497B2 (de) 1979-04-12
FR2341054B1 (el) 1978-10-20
FR2341054A1 (fr) 1977-09-09

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee