DE2519170C2 - Verfahren zur Erzeugung von Vakuum in einem Rezipienten und Vakuumpumpe zur Durchführung dieses Verfahrens - Google Patents
Verfahren zur Erzeugung von Vakuum in einem Rezipienten und Vakuumpumpe zur Durchführung dieses VerfahrensInfo
- Publication number
- DE2519170C2 DE2519170C2 DE2519170A DE2519170A DE2519170C2 DE 2519170 C2 DE2519170 C2 DE 2519170C2 DE 2519170 A DE2519170 A DE 2519170A DE 2519170 A DE2519170 A DE 2519170A DE 2519170 C2 DE2519170 C2 DE 2519170C2
- Authority
- DE
- Germany
- Prior art keywords
- recipient
- vacuum
- nitrogen
- liquid
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 259
- 229910052757 nitrogen Inorganic materials 0.000 claims description 130
- 239000007788 liquid Substances 0.000 claims description 103
- 239000007789 gas Substances 0.000 claims description 55
- 239000001307 helium Substances 0.000 claims description 55
- 229910052734 helium Inorganic materials 0.000 claims description 55
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 55
- 239000007787 solid Substances 0.000 claims description 55
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 38
- 239000001257 hydrogen Substances 0.000 claims description 24
- 229910052739 hydrogen Inorganic materials 0.000 claims description 24
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 18
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 13
- 239000001569 carbon dioxide Substances 0.000 claims description 12
- 239000003507 refrigerant Substances 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 12
- 238000005192 partition Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002594 sorbent Substances 0.000 description 25
- 238000009792 diffusion process Methods 0.000 description 23
- 238000001816 cooling Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000003463 adsorbent Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 229910052754 neon Inorganic materials 0.000 description 8
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005086 pumping Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 235000011089 carbon dioxide Nutrition 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910001868 water Inorganic materials 0.000 description 2
- 241000589614 Pseudomonas stutzeri Species 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000009395 breeding Methods 0.000 description 1
- 230000001488 breeding effect Effects 0.000 description 1
- 238000009933 burial Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000029142 excretion Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000028327 secretion Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000005654 stationary process Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU2019987A SU515884A1 (ru) | 1974-04-30 | 1974-04-30 | Криогенный сверхвысоковакуумный насос |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2519170A1 DE2519170A1 (de) | 1975-11-20 |
| DE2519170C2 true DE2519170C2 (de) | 1982-02-04 |
Family
ID=20583231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2519170A Expired DE2519170C2 (de) | 1974-04-30 | 1975-04-30 | Verfahren zur Erzeugung von Vakuum in einem Rezipienten und Vakuumpumpe zur Durchführung dieses Verfahrens |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4009585A (online.php) |
| DE (1) | DE2519170C2 (online.php) |
| FR (1) | FR2269648B1 (online.php) |
| GB (1) | GB1502877A (online.php) |
| SU (1) | SU515884A1 (online.php) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| SU1698481A1 (ru) * | 1987-12-17 | 1991-12-15 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криогенный адсорбционный насос |
| US6330801B1 (en) | 1999-06-11 | 2001-12-18 | Francis J. Whelan | Method and system for increasing cryopump capacity |
| US6367267B1 (en) * | 2000-09-22 | 2002-04-09 | Applied Epi, Inc. | Integrated phase separator for ultra high vacuum system |
| US6718775B2 (en) | 2002-07-30 | 2004-04-13 | Applied Epi, Inc. | Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system |
| US7526917B1 (en) * | 2008-08-11 | 2009-05-05 | Hoffman John C | Gas diffusion vacuum device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3188785A (en) * | 1960-04-29 | 1965-06-15 | James W Butler | Vacuum cold trap |
| US3144756A (en) * | 1962-07-23 | 1964-08-18 | Ion Physics Corp | Vacuum system cooling trap |
| US3216207A (en) * | 1962-10-15 | 1965-11-09 | Continental Oil Co | Cold trap assembly for high vacuum systems |
| US3379132A (en) * | 1965-08-16 | 1968-04-23 | Integral Process Syst Inc | Cryogenic pump |
| US3360949A (en) * | 1965-09-20 | 1968-01-02 | Air Reduction | Cryopumping configuration |
| US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
-
1974
- 1974-04-30 SU SU2019987A patent/SU515884A1/ru active
-
1975
- 1975-04-29 US US05/572,915 patent/US4009585A/en not_active Expired - Lifetime
- 1975-04-29 GB GB17800/75A patent/GB1502877A/en not_active Expired
- 1975-04-30 DE DE2519170A patent/DE2519170C2/de not_active Expired
- 1975-04-30 FR FR7513510A patent/FR2269648B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1502877A (en) | 1978-03-08 |
| FR2269648A1 (online.php) | 1975-11-28 |
| FR2269648B1 (online.php) | 1978-02-24 |
| SU515884A1 (ru) | 1976-05-30 |
| US4009585A (en) | 1977-03-01 |
| DE2519170A1 (de) | 1975-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| D2 | Grant after examination | ||
| 8339 | Ceased/non-payment of the annual fee |