DE2422866C3 - Photoelektrischer Detektor zur Lagebestimmung eines Körpers - Google Patents
Photoelektrischer Detektor zur Lagebestimmung eines KörpersInfo
- Publication number
- DE2422866C3 DE2422866C3 DE2422866A DE2422866A DE2422866C3 DE 2422866 C3 DE2422866 C3 DE 2422866C3 DE 2422866 A DE2422866 A DE 2422866A DE 2422866 A DE2422866 A DE 2422866A DE 2422866 C3 DE2422866 C3 DE 2422866C3
- Authority
- DE
- Germany
- Prior art keywords
- gap
- slit plate
- photoelectric
- imaging
- line mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 238000005070 sampling Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001684 chronic effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/40—Optical focusing aids
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5118573A JPS5525602B2 (enExample) | 1973-05-10 | 1973-05-10 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2422866A1 DE2422866A1 (de) | 1974-11-28 |
| DE2422866B2 DE2422866B2 (de) | 1979-08-09 |
| DE2422866C3 true DE2422866C3 (de) | 1980-04-24 |
Family
ID=12879783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2422866A Expired DE2422866C3 (de) | 1973-05-10 | 1974-05-10 | Photoelektrischer Detektor zur Lagebestimmung eines Körpers |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3912372A (enExample) |
| JP (1) | JPS5525602B2 (enExample) |
| DE (1) | DE2422866C3 (enExample) |
| GB (1) | GB1465791A (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5228339A (en) * | 1975-08-29 | 1977-03-03 | Nippon Kogaku Kk <Nikon> | Differential slit |
| DE3135180A1 (de) * | 1981-09-05 | 1983-04-14 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Einrichtung zum linearen fuehren eines abtasters |
| DE3214375C2 (de) * | 1982-04-20 | 1986-09-04 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Einrichtung zur Bestimmung der Lage eines Satelliten |
| JPS5991304A (ja) * | 1982-11-16 | 1984-05-26 | Matsushita Electric Ind Co Ltd | 位置検出装置 |
| DE3304864A1 (de) * | 1983-02-12 | 1984-08-16 | Bayer Ag, 5090 Leverkusen | Adsorbate von prostaglandinen |
| JPS63221616A (ja) * | 1987-03-11 | 1988-09-14 | Toshiba Corp | マスク・ウエハの位置合わせ方法 |
| JP3100478B2 (ja) * | 1992-10-27 | 2000-10-16 | 株式会社トプコン | 往復レーザ走査システムを有するレーザ回転照射装置 |
| DE19740678A1 (de) * | 1997-09-16 | 1999-03-18 | Polytec Gmbh | Vorrichtung zur berührungslosen Schwingungsmessung |
| NZ563863A (en) | 2005-06-03 | 2011-02-25 | Ono Pharmaceutical Co | Agent for regeneration and/or protection of nerves |
| WO2007029281A1 (ja) * | 2005-09-01 | 2007-03-15 | Sanko Co., Ltd. | 洗浄用ブラシ |
| JP5962657B2 (ja) | 2011-08-05 | 2016-08-03 | 小野薬品工業株式会社 | 軟骨障害治療用化合物 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3540831A (en) * | 1966-06-01 | 1970-11-17 | Gca Corp | Indicium locating apparatus |
| US3560097A (en) * | 1967-05-03 | 1971-02-02 | Anatoly Alexandrovich Gavrilki | Photoelectric microscope |
| GB1231431A (enExample) * | 1967-06-24 | 1971-05-12 | ||
| US3770353A (en) * | 1971-08-25 | 1973-11-06 | Us Navy | Electro-optical sensor |
-
1973
- 1973-05-10 JP JP5118573A patent/JPS5525602B2/ja not_active Expired
-
1974
- 1974-04-30 US US465572A patent/US3912372A/en not_active Expired - Lifetime
- 1974-05-10 DE DE2422866A patent/DE2422866C3/de not_active Expired
- 1974-05-10 GB GB2082174A patent/GB1465791A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2422866B2 (de) | 1979-08-09 |
| GB1465791A (en) | 1977-03-02 |
| DE2422866A1 (de) | 1974-11-28 |
| JPS5525602B2 (enExample) | 1980-07-07 |
| US3912372A (en) | 1975-10-14 |
| JPS503362A (enExample) | 1975-01-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |