DE2363684C3 - Automatische Polarisationsanalysier-Vorrichtung - Google Patents

Automatische Polarisationsanalysier-Vorrichtung

Info

Publication number
DE2363684C3
DE2363684C3 DE19732363684 DE2363684A DE2363684C3 DE 2363684 C3 DE2363684 C3 DE 2363684C3 DE 19732363684 DE19732363684 DE 19732363684 DE 2363684 A DE2363684 A DE 2363684A DE 2363684 C3 DE2363684 C3 DE 2363684C3
Authority
DE
Germany
Prior art keywords
polarization
sample
voltage
circuit
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19732363684
Other languages
German (de)
English (en)
Other versions
DE2363684A1 (de
DE2363684B2 (de
Inventor
Yoshihiro Kaizawa
Toshiyuki Kasai
Kanagawa Kawasaki
Sakuji Urawa Saitama Watanabe
Tadaaki Tokio Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of DE2363684A1 publication Critical patent/DE2363684A1/de
Publication of DE2363684B2 publication Critical patent/DE2363684B2/de
Application granted granted Critical
Publication of DE2363684C3 publication Critical patent/DE2363684C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Control Of Position Or Direction (AREA)
DE19732363684 1972-12-22 1973-12-21 Automatische Polarisationsanalysier-Vorrichtung Expired DE2363684C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12824572A JPS5317312B2 (cs) 1972-12-22 1972-12-22

Publications (3)

Publication Number Publication Date
DE2363684A1 DE2363684A1 (de) 1974-06-27
DE2363684B2 DE2363684B2 (de) 1978-07-06
DE2363684C3 true DE2363684C3 (de) 1979-03-15

Family

ID=14980071

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732363684 Expired DE2363684C3 (de) 1972-12-22 1973-12-21 Automatische Polarisationsanalysier-Vorrichtung

Country Status (3)

Country Link
JP (1) JPS5317312B2 (cs)
DE (1) DE2363684C3 (cs)
GB (1) GB1459410A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8701521D0 (en) * 1987-01-23 1993-12-01 British Aerospace Multi-parameter imaging polarimeter
DE3830398C2 (de) * 1988-09-07 1997-11-27 Bodenseewerk Perkin Elmer Co Antriebsvorrichtung zum Antreiben eines Schwingpolarisators

Also Published As

Publication number Publication date
DE2363684A1 (de) 1974-06-27
JPS5317312B2 (cs) 1978-06-07
DE2363684B2 (de) 1978-07-06
GB1459410A (en) 1976-12-22
JPS4987344A (cs) 1974-08-21

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee