DE2353872A1 - Feldemissions-elektronenkanone - Google Patents

Feldemissions-elektronenkanone

Info

Publication number
DE2353872A1
DE2353872A1 DE19732353872 DE2353872A DE2353872A1 DE 2353872 A1 DE2353872 A1 DE 2353872A1 DE 19732353872 DE19732353872 DE 19732353872 DE 2353872 A DE2353872 A DE 2353872A DE 2353872 A1 DE2353872 A1 DE 2353872A1
Authority
DE
Germany
Prior art keywords
cathode
anode
electron
field emission
control electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732353872
Other languages
German (de)
English (en)
Inventor
Tsutomu Komoda
Yasushi Nakaizumi
Setsuo Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE2353872A1 publication Critical patent/DE2353872A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19732353872 1973-02-23 1973-10-26 Feldemissions-elektronenkanone Pending DE2353872A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48021287A JPS49112565A (enrdf_load_stackoverflow) 1973-02-23 1973-02-23

Publications (1)

Publication Number Publication Date
DE2353872A1 true DE2353872A1 (de) 1974-08-29

Family

ID=12050904

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732353872 Pending DE2353872A1 (de) 1973-02-23 1973-10-26 Feldemissions-elektronenkanone

Country Status (3)

Country Link
US (1) US3925706A (enrdf_load_stackoverflow)
JP (1) JPS49112565A (enrdf_load_stackoverflow)
DE (1) DE2353872A1 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2613533A1 (fr) * 1987-03-30 1988-10-07 Rpc Ind Canon a electrons a plasma ionique
FR2615324A1 (fr) * 1987-03-30 1988-11-18 Rpc Ind Canon a electrons a plasma ionique et procede pour pr oduire des electrons secondaires a partir d'un tel canon
US8938333B2 (en) 2012-06-27 2015-01-20 Bose Corporation Active wheel damping
US9102209B2 (en) 2012-06-27 2015-08-11 Bose Corporation Anti-causal vehicle suspension

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025196A (en) * 1986-06-02 1991-06-18 Canon Kabushiki Kaisha Image forming device with beam current control

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE759247A (fr) * 1969-11-22 1971-05-21 Philips Nv Dispositif muni d'un tube electronique, et tube electronique destine a un tel dispositif
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
US3760383A (en) * 1971-07-01 1973-09-18 Gen Electric Erration storage system with collimated electron beam for minimal spherical ab
US3786305A (en) * 1972-05-15 1974-01-15 Hitachi Ltd Field emission electron gun

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2613533A1 (fr) * 1987-03-30 1988-10-07 Rpc Ind Canon a electrons a plasma ionique
FR2615324A1 (fr) * 1987-03-30 1988-11-18 Rpc Ind Canon a electrons a plasma ionique et procede pour pr oduire des electrons secondaires a partir d'un tel canon
US8938333B2 (en) 2012-06-27 2015-01-20 Bose Corporation Active wheel damping
US9102209B2 (en) 2012-06-27 2015-08-11 Bose Corporation Anti-causal vehicle suspension

Also Published As

Publication number Publication date
US3925706A (en) 1975-12-09
JPS49112565A (enrdf_load_stackoverflow) 1974-10-26

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