JPS49112565A - - Google Patents

Info

Publication number
JPS49112565A
JPS49112565A JP48021287A JP2128773A JPS49112565A JP S49112565 A JPS49112565 A JP S49112565A JP 48021287 A JP48021287 A JP 48021287A JP 2128773 A JP2128773 A JP 2128773A JP S49112565 A JPS49112565 A JP S49112565A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48021287A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48021287A priority Critical patent/JPS49112565A/ja
Priority to DE19732353872 priority patent/DE2353872A1/de
Priority to US410444A priority patent/US3925706A/en
Publication of JPS49112565A publication Critical patent/JPS49112565A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243Beam current control or regulation circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/073Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP48021287A 1973-02-23 1973-02-23 Pending JPS49112565A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP48021287A JPS49112565A (ja) 1973-02-23 1973-02-23
DE19732353872 DE2353872A1 (de) 1973-02-23 1973-10-26 Feldemissions-elektronenkanone
US410444A US3925706A (en) 1973-02-23 1973-10-29 Field emission electron gun device of the automatic control type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48021287A JPS49112565A (ja) 1973-02-23 1973-02-23

Publications (1)

Publication Number Publication Date
JPS49112565A true JPS49112565A (ja) 1974-10-26

Family

ID=12050904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48021287A Pending JPS49112565A (ja) 1973-02-23 1973-02-23

Country Status (3)

Country Link
US (1) US3925706A (ja)
JP (1) JPS49112565A (ja)
DE (1) DE2353872A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025196A (en) * 1986-06-02 1991-06-18 Canon Kabushiki Kaisha Image forming device with beam current control
US4749911A (en) * 1987-03-30 1988-06-07 Rpc Industries Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge
US4786844A (en) * 1987-03-30 1988-11-22 Rpc Industries Wire ion plasma gun
US8938333B2 (en) 2012-06-27 2015-01-20 Bose Corporation Active wheel damping
US9102209B2 (en) 2012-06-27 2015-08-11 Bose Corporation Anti-causal vehicle suspension

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE759247A (fr) * 1969-11-22 1971-05-21 Philips Nv Dispositif muni d'un tube electronique, et tube electronique destine a un tel dispositif
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
US3760383A (en) * 1971-07-01 1973-09-18 Gen Electric Erration storage system with collimated electron beam for minimal spherical ab
US3786305A (en) * 1972-05-15 1974-01-15 Hitachi Ltd Field emission electron gun

Also Published As

Publication number Publication date
US3925706A (en) 1975-12-09
DE2353872A1 (de) 1974-08-29

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