DE2308643B2 - Meßanordnung zur Lagebestimmung mit einem PräzisionsmaBstab - Google Patents
Meßanordnung zur Lagebestimmung mit einem PräzisionsmaBstabInfo
- Publication number
- DE2308643B2 DE2308643B2 DE2308643A DE2308643A DE2308643B2 DE 2308643 B2 DE2308643 B2 DE 2308643B2 DE 2308643 A DE2308643 A DE 2308643A DE 2308643 A DE2308643 A DE 2308643A DE 2308643 B2 DE2308643 B2 DE 2308643B2
- Authority
- DE
- Germany
- Prior art keywords
- light
- scale
- grid
- arrangement according
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000005357 flat glass Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instructional Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH253072A CH564181A5 (enExample) | 1972-02-22 | 1972-02-22 | |
| CH1611272A CH561407A5 (enExample) | 1972-11-06 | 1972-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2308643A1 DE2308643A1 (de) | 1973-08-30 |
| DE2308643B2 true DE2308643B2 (de) | 1979-03-15 |
Family
ID=25690678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2308643A Ceased DE2308643B2 (de) | 1972-02-22 | 1973-02-21 | Meßanordnung zur Lagebestimmung mit einem PräzisionsmaBstab |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3819274A (enExample) |
| JP (1) | JPS5429111B2 (enExample) |
| DE (1) | DE2308643B2 (enExample) |
| FR (1) | FR2173062B1 (enExample) |
| GB (1) | GB1407353A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0451780A1 (en) * | 1990-04-09 | 1991-10-16 | Nippon Telegraph And Telephone Corporation | Encoder |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52163339U (enExample) * | 1976-06-04 | 1977-12-10 | ||
| JPS5429662A (en) * | 1977-08-09 | 1979-03-05 | Fujitsu Ltd | Original reading mechanism |
| US4555767A (en) * | 1982-05-27 | 1985-11-26 | International Business Machines Corporation | Method and apparatus for measuring thickness of epitaxial layer by infrared reflectance |
| GB8729246D0 (en) * | 1987-12-15 | 1988-01-27 | Renishaw Plc | Opto-electronic scale-reading apparatus |
| US5982489A (en) * | 1996-01-29 | 1999-11-09 | Nikon Corporation | Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams |
| US12487081B2 (en) * | 2019-07-24 | 2025-12-02 | Asml Holding N.V. | On chip wafer alignment sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2848921A (en) * | 1952-06-11 | 1958-08-26 | Genevoise Instr Physique | Apparatus for measuring very little lengths |
| US3043182A (en) * | 1960-03-21 | 1962-07-10 | James B Saunders | Interferometer for testing large surfaces |
| US3285124A (en) * | 1964-10-26 | 1966-11-15 | Kollmorgen Corp | High precision pointing interferometer with modified kosters prism |
| US3572937A (en) * | 1968-11-04 | 1971-03-30 | Atomic Energy Commission | Method and apparatus for interferometric measurement of machine slide roll |
-
1973
- 1973-02-05 US US00329318A patent/US3819274A/en not_active Expired - Lifetime
- 1973-02-12 GB GB678673A patent/GB1407353A/en not_active Expired
- 1973-02-20 FR FR7305944A patent/FR2173062B1/fr not_active Expired
- 1973-02-20 JP JP2060473A patent/JPS5429111B2/ja not_active Expired
- 1973-02-21 DE DE2308643A patent/DE2308643B2/de not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0451780A1 (en) * | 1990-04-09 | 1991-10-16 | Nippon Telegraph And Telephone Corporation | Encoder |
Also Published As
| Publication number | Publication date |
|---|---|
| US3819274A (en) | 1974-06-25 |
| FR2173062B1 (enExample) | 1977-12-30 |
| JPS5429111B2 (enExample) | 1979-09-20 |
| FR2173062A1 (enExample) | 1973-10-05 |
| JPS4897562A (enExample) | 1973-12-12 |
| GB1407353A (en) | 1975-09-24 |
| DE2308643A1 (de) | 1973-08-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BHV | Refusal |