JPS5429111B2 - - Google Patents
Info
- Publication number
- JPS5429111B2 JPS5429111B2 JP2060473A JP2060473A JPS5429111B2 JP S5429111 B2 JPS5429111 B2 JP S5429111B2 JP 2060473 A JP2060473 A JP 2060473A JP 2060473 A JP2060473 A JP 2060473A JP S5429111 B2 JPS5429111 B2 JP S5429111B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instructional Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH253072A CH564181A5 (ja) | 1972-02-22 | 1972-02-22 | |
| CH1611272A CH561407A5 (ja) | 1972-11-06 | 1972-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4897562A JPS4897562A (ja) | 1973-12-12 |
| JPS5429111B2 true JPS5429111B2 (ja) | 1979-09-20 |
Family
ID=25690678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2060473A Expired JPS5429111B2 (ja) | 1972-02-22 | 1973-02-20 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3819274A (ja) |
| JP (1) | JPS5429111B2 (ja) |
| DE (1) | DE2308643B2 (ja) |
| FR (1) | FR2173062B1 (ja) |
| GB (1) | GB1407353A (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52163339U (ja) * | 1976-06-04 | 1977-12-10 | ||
| JPS5429662A (en) * | 1977-08-09 | 1979-03-05 | Fujitsu Ltd | Original reading mechanism |
| US4555767A (en) * | 1982-05-27 | 1985-11-26 | International Business Machines Corporation | Method and apparatus for measuring thickness of epitaxial layer by infrared reflectance |
| GB8729246D0 (en) * | 1987-12-15 | 1988-01-27 | Renishaw Plc | Opto-electronic scale-reading apparatus |
| JP3034899B2 (ja) * | 1990-04-09 | 2000-04-17 | 日本電信電話株式会社 | エンコーダ |
| US5982489A (en) * | 1996-01-29 | 1999-11-09 | Nikon Corporation | Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2848921A (en) * | 1952-06-11 | 1958-08-26 | Genevoise Instr Physique | Apparatus for measuring very little lengths |
| US3043182A (en) * | 1960-03-21 | 1962-07-10 | James B Saunders | Interferometer for testing large surfaces |
| US3285124A (en) * | 1964-10-26 | 1966-11-15 | Kollmorgen Corp | High precision pointing interferometer with modified kosters prism |
| US3572937A (en) * | 1968-11-04 | 1971-03-30 | Atomic Energy Commission | Method and apparatus for interferometric measurement of machine slide roll |
-
1973
- 1973-02-05 US US00329318A patent/US3819274A/en not_active Expired - Lifetime
- 1973-02-12 GB GB678673A patent/GB1407353A/en not_active Expired
- 1973-02-20 FR FR7305944A patent/FR2173062B1/fr not_active Expired
- 1973-02-20 JP JP2060473A patent/JPS5429111B2/ja not_active Expired
- 1973-02-21 DE DE2308643A patent/DE2308643B2/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| GB1407353A (en) | 1975-09-24 |
| US3819274A (en) | 1974-06-25 |
| FR2173062B1 (ja) | 1977-12-30 |
| DE2308643A1 (de) | 1973-08-30 |
| DE2308643B2 (de) | 1979-03-15 |
| FR2173062A1 (ja) | 1973-10-05 |
| JPS4897562A (ja) | 1973-12-12 |