JPS5429111B2 - - Google Patents

Info

Publication number
JPS5429111B2
JPS5429111B2 JP2060473A JP2060473A JPS5429111B2 JP S5429111 B2 JPS5429111 B2 JP S5429111B2 JP 2060473 A JP2060473 A JP 2060473A JP 2060473 A JP2060473 A JP 2060473A JP S5429111 B2 JPS5429111 B2 JP S5429111B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2060473A
Other versions
JPS4897562A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH253072A external-priority patent/CH564181A5/fr
Priority claimed from CH1611272A external-priority patent/CH561407A5/fr
Application filed filed Critical
Publication of JPS4897562A publication Critical patent/JPS4897562A/ja
Publication of JPS5429111B2 publication Critical patent/JPS5429111B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instructional Devices (AREA)
JP2060473A 1972-02-22 1973-02-20 Expired JPS5429111B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH253072A CH564181A5 (ja) 1972-02-22 1972-02-22
CH1611272A CH561407A5 (ja) 1972-11-06 1972-11-06

Publications (2)

Publication Number Publication Date
JPS4897562A JPS4897562A (ja) 1973-12-12
JPS5429111B2 true JPS5429111B2 (ja) 1979-09-20

Family

ID=25690678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2060473A Expired JPS5429111B2 (ja) 1972-02-22 1973-02-20

Country Status (5)

Country Link
US (1) US3819274A (ja)
JP (1) JPS5429111B2 (ja)
DE (1) DE2308643B2 (ja)
FR (1) FR2173062B1 (ja)
GB (1) GB1407353A (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52163339U (ja) * 1976-06-04 1977-12-10
JPS5429662A (en) * 1977-08-09 1979-03-05 Fujitsu Ltd Original reading mechanism
US4555767A (en) * 1982-05-27 1985-11-26 International Business Machines Corporation Method and apparatus for measuring thickness of epitaxial layer by infrared reflectance
GB8729246D0 (en) * 1987-12-15 1988-01-27 Renishaw Plc Opto-electronic scale-reading apparatus
JP3034899B2 (ja) * 1990-04-09 2000-04-17 日本電信電話株式会社 エンコーダ
US5982489A (en) * 1996-01-29 1999-11-09 Nikon Corporation Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2848921A (en) * 1952-06-11 1958-08-26 Genevoise Instr Physique Apparatus for measuring very little lengths
US3043182A (en) * 1960-03-21 1962-07-10 James B Saunders Interferometer for testing large surfaces
US3285124A (en) * 1964-10-26 1966-11-15 Kollmorgen Corp High precision pointing interferometer with modified kosters prism
US3572937A (en) * 1968-11-04 1971-03-30 Atomic Energy Commission Method and apparatus for interferometric measurement of machine slide roll

Also Published As

Publication number Publication date
GB1407353A (en) 1975-09-24
US3819274A (en) 1974-06-25
FR2173062B1 (ja) 1977-12-30
DE2308643A1 (de) 1973-08-30
DE2308643B2 (de) 1979-03-15
FR2173062A1 (ja) 1973-10-05
JPS4897562A (ja) 1973-12-12

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