DE2306752C2 - Vorrichtung zur kapazitiven Abtastung von Kreis- und Längenteilungen - Google Patents

Vorrichtung zur kapazitiven Abtastung von Kreis- und Längenteilungen

Info

Publication number
DE2306752C2
DE2306752C2 DE2306752A DE2306752A DE2306752C2 DE 2306752 C2 DE2306752 C2 DE 2306752C2 DE 2306752 A DE2306752 A DE 2306752A DE 2306752 A DE2306752 A DE 2306752A DE 2306752 C2 DE2306752 C2 DE 2306752C2
Authority
DE
Germany
Prior art keywords
line
grid
line grid
length
lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2306752A
Other languages
German (de)
English (en)
Other versions
DE2306752B1 (de
DE2306752A1 (enExample
Inventor
Armin Thalwil Sterki (Schweiz)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maag Zahnrader und Maschinen AG
Original Assignee
Maag Zahnrader und Maschinen AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maag Zahnrader und Maschinen AG filed Critical Maag Zahnrader und Maschinen AG
Publication of DE2306752B1 publication Critical patent/DE2306752B1/de
Publication of DE2306752A1 publication Critical patent/DE2306752A1/de
Application granted granted Critical
Publication of DE2306752C2 publication Critical patent/DE2306752C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/08—Pointers; Scales; Scale illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Hair Curling (AREA)
DE2306752A 1972-09-07 1973-02-12 Vorrichtung zur kapazitiven Abtastung von Kreis- und Längenteilungen Expired DE2306752C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1317372A CH550378A (de) 1972-09-07 1972-09-07 Vorrichtung zur kapazitiven winkel- oder laengenmessung.

Publications (3)

Publication Number Publication Date
DE2306752B1 DE2306752B1 (de) 1974-03-28
DE2306752A1 DE2306752A1 (enExample) 1974-03-28
DE2306752C2 true DE2306752C2 (de) 1974-11-07

Family

ID=4389984

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2306752A Expired DE2306752C2 (de) 1972-09-07 1973-02-12 Vorrichtung zur kapazitiven Abtastung von Kreis- und Längenteilungen

Country Status (5)

Country Link
US (1) US3873916A (enExample)
JP (1) JPS4966155A (enExample)
CH (1) CH550378A (enExample)
DE (1) DE2306752C2 (enExample)
GB (1) GB1391146A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3008396A1 (de) * 1980-03-05 1981-09-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitale elektrische winkelmesseinrichtung

Families Citing this family (42)

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US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
US4082990A (en) * 1976-09-29 1978-04-04 The Singer Company Electrostatic pickoff and torquer
JPS5373154A (en) * 1976-12-10 1978-06-29 Mitsutoyo Seisakusho Electrostatic capacity type displacement detector
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
JPS5575614A (en) * 1978-12-04 1980-06-07 Hiromi Ogasawara Amount of movement measuring unit for straight movement mobile body
US4292632A (en) * 1978-08-29 1981-09-29 Yeakley Lester M Displacement sensing device having capacitance transduction element
CH626991A5 (en) * 1978-09-11 1981-12-15 Meseltron Sa Rotary transducer for position measurement
US4418347A (en) * 1978-12-27 1983-11-29 Nippon Soken, Inc. Rotational position detecting apparatus
US4238781A (en) * 1979-02-09 1980-12-09 Westinghouse Electric Corp. Capacitive angular displacement transducer for remote meter reading
JPS55121129A (en) * 1979-03-13 1980-09-18 Agency Of Ind Science & Technol Thin-wire torsion tester
FR2454083A1 (fr) * 1979-04-09 1980-11-07 Facom Dispositif de mesure de la position relative de deux objets
JPS568508A (en) * 1979-07-02 1981-01-28 Nippon Soken Inc Rotation detector
NL7905562A (nl) * 1979-07-17 1981-01-20 Heerens Willem Christiaan Capacitieve meter.
US4374383A (en) * 1980-12-22 1983-02-15 International Business Machines Corporation Capacitive transducer for sensing a home position
JPS6038221Y2 (ja) * 1981-01-22 1985-11-14 株式会社日本自動車部品総合研究所 静電容量式回転検出器
JPS57148262A (en) * 1981-03-09 1982-09-13 Nippon Soken Inc Detecting device for rotating direction
US4499465A (en) * 1981-03-18 1985-02-12 Nippon Soken, Inc. Capacitive-type incremental and reference angular rotation detecting apparatus
US4404560A (en) * 1981-05-07 1983-09-13 International Business Machines Corporation Capacitive transducer for providing precise angular positional information
JPS5841311A (ja) * 1981-09-07 1983-03-10 Nippon Soken Inc 静電容量式回転検出装置
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
US4477860A (en) * 1983-09-19 1984-10-16 Cain Encoder Company Electrode array
DE3338108A1 (de) * 1983-10-20 1985-05-02 Robert 5446 Engeln Wolff Digitale messvorrichtung fuer drehwinkelabhaengige groessen
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4566193A (en) * 1984-07-31 1986-01-28 Hewlett-Packard Company Use of an electronic vernier for evaluation of alignment in semiconductor processing
US4982509A (en) * 1988-08-19 1991-01-08 Delta International Machinery Corp. Measurement system having multiple display orientations
GB2223589B (en) * 1988-09-14 1991-07-24 Valk Rob V D Measurement of capacitance and parameters related thereto
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
US5414420A (en) * 1992-03-23 1995-05-09 Hewlett-Packard Corporation Switch interconnect for position encoder system
US6492911B1 (en) 1999-04-19 2002-12-10 Netzer Motion Sensors Ltd. Capacitive displacement encoder
US6587093B1 (en) * 1999-11-04 2003-07-01 Synaptics Incorporated Capacitive mouse
DE10048881A1 (de) * 2000-09-29 2002-03-07 Infineon Technologies Ag Vorrichtung und Verfahren zum planen Verbinden zweier Wafer für ein Dünnschleifen und ein Trennen eines Produkt-Wafers
CN101218512A (zh) * 2004-06-23 2008-07-09 Fe技术服务公司 电容传感技术
WO2007139868A2 (en) * 2006-05-24 2007-12-06 Tt Electronics Technology Limited Multiturn rotational sensor
CN101893451B (zh) * 2009-05-22 2013-08-21 鸿富锦精密工业（深圳）有限公司 电容式传感器及陀螺仪
US9092082B2 (en) 2010-12-22 2015-07-28 Synaptics Incorporated Methods and apparatus for mounting a touch sensor device
CN103822571B (zh) * 2014-03-19 2016-11-02 重庆理工大学 基于单排多层结构的电场式时栅直线位移传感器
CN103968750B (zh) * 2014-05-09 2017-01-18 重庆理工大学 一种电场式时栅角位移传感器
US9810314B2 (en) 2015-02-25 2017-11-07 Kongsberg Driveline Systems I, Inc. Rotary shifter assembly
CN105157732A (zh) * 2015-07-14 2015-12-16 程有信 一种多联多扇差动电容传感器系统装置
CN109752030B (zh) * 2019-02-21 2024-12-24 长春通视光电技术股份有限公司 一种贴片式位置检测传感器
EP3805974B1 (en) * 2019-10-11 2025-03-05 Nxp B.V. Tamper detection device, system, and method
CN114485371B (zh) * 2022-02-28 2023-08-25 深蓝汽车科技有限公司 一种拉线位移传感器的拉线安装装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012189A (en) * 1945-06-05 1961-12-05 Electro Mechanical Res Inc Capacitive detector
US2925590A (en) * 1957-08-01 1960-02-16 North American Aviation Inc Capacitive pickoff
US3146394A (en) * 1959-04-29 1964-08-25 Continental Elektro Ind Ag Apparatus for proportionally converting a rotational angle into a phase angle of an alternating voltage
GB859267A (en) * 1959-06-25 1961-01-18 Mullard Ltd Improvements in or relating to measuring apparatus
US3121839A (en) * 1961-08-21 1964-02-18 Gen Motors Corp Capacitive pickoff for displacement signal generator
GB990928A (en) * 1962-11-23 1965-05-05 Ass Elect Ind Improvements relating to apparatus for producing signals indicative of relative position
US3242399A (en) * 1963-02-02 1966-03-22 Continental Elektro Ind Ag Electrical control device
US3515987A (en) * 1967-10-20 1970-06-02 Avco Corp Coplanar dielectric probe having means for minimizing capacitance from stray sources
FR2086854A5 (enExample) * 1970-04-10 1971-12-31 Commissariat Energie Atomique

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3008396A1 (de) * 1980-03-05 1981-09-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitale elektrische winkelmesseinrichtung
US4388758A (en) 1980-03-05 1983-06-21 Johannes Heidenhain Gmbh Digital electrical angle-measuring device

Also Published As

Publication number Publication date
JPS4966155A (enExample) 1974-06-26
DE2306752B1 (de) 1974-03-28
GB1391146A (en) 1975-04-16
DE2306752A1 (enExample) 1974-03-28
US3873916A (en) 1975-03-25
CH550378A (de) 1974-06-14

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee