DE2249518A1 - Verfahren zur herstellung optischer wellenleiterbauteile - Google Patents
Verfahren zur herstellung optischer wellenleiterbauteileInfo
- Publication number
- DE2249518A1 DE2249518A1 DE2249518A DE2249518A DE2249518A1 DE 2249518 A1 DE2249518 A1 DE 2249518A1 DE 2249518 A DE2249518 A DE 2249518A DE 2249518 A DE2249518 A DE 2249518A DE 2249518 A1 DE2249518 A1 DE 2249518A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- substrate
- liquid
- refractive index
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 32
- 230000003287 optical effect Effects 0.000 title claims description 24
- 239000004020 conductor Substances 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 31
- 239000007788 liquid Substances 0.000 claims description 21
- 239000000178 monomer Substances 0.000 claims description 13
- 238000006116 polymerization reaction Methods 0.000 claims description 10
- 239000004033 plastic Substances 0.000 claims description 7
- 229920003023 plastic Polymers 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 239000003989 dielectric material Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000000295 complement effect Effects 0.000 claims description 3
- 238000007373 indentation Methods 0.000 claims description 3
- 230000000977 initiatory effect Effects 0.000 claims description 2
- 239000006193 liquid solution Substances 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 239000003505 polymerization initiator Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 7
- 239000004926 polymethyl methacrylate Substances 0.000 description 7
- 239000000835 fiber Substances 0.000 description 6
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 6
- 238000004049 embossing Methods 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- GHYOCDFICYLMRF-UTIIJYGPSA-N (2S,3R)-N-[(2S)-3-(cyclopenten-1-yl)-1-[(2R)-2-methyloxiran-2-yl]-1-oxopropan-2-yl]-3-hydroxy-3-(4-methoxyphenyl)-2-[[(2S)-2-[(2-morpholin-4-ylacetyl)amino]propanoyl]amino]propanamide Chemical compound C1(=CCCC1)C[C@@H](C(=O)[C@@]1(OC1)C)NC([C@H]([C@@H](C1=CC=C(C=C1)OC)O)NC([C@H](C)NC(CN1CCOCC1)=O)=O)=O GHYOCDFICYLMRF-UTIIJYGPSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229920003319 Araldite® Polymers 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 241000907514 Entebbe bat virus Species 0.000 description 1
- 229920005372 Plexiglas® Polymers 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 241001233037 catfish Species 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229940125797 compound 12 Drugs 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920002776 polycyclohexyl methacrylate Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000033458 reproduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 125000003011 styrenyl group Chemical class [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3696—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier by moulding, e.g. injection moulding, casting, embossing, stamping, stenciling, printing, or with metallic mould insert manufacturing using LIGA or MIGA techniques
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18910171A | 1971-10-14 | 1971-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2249518A1 true DE2249518A1 (de) | 1973-04-19 |
Family
ID=22695934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2249518A Pending DE2249518A1 (de) | 1971-10-14 | 1972-10-10 | Verfahren zur herstellung optischer wellenleiterbauteile |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3767445A (enExample) |
| JP (1) | JPS4848139A (enExample) |
| CA (1) | CA986273A (enExample) |
| DE (1) | DE2249518A1 (enExample) |
| FR (1) | FR2156308B1 (enExample) |
| GB (1) | GB1376770A (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4113897A (en) * | 1973-01-29 | 1978-09-12 | Rca Corporation | Smooth groove formation method employing spin coating of negative replica of inscribed disc |
| FR2303819A1 (fr) * | 1975-03-11 | 1976-10-08 | Thomson Csf | Procede de fabrication d'une resine negative sensible aux electrons, application de ladite resine en optique integree, et guides de lumiere comportant ladite resine |
| JPS5434847A (en) * | 1977-08-23 | 1979-03-14 | Matsushita Electric Ind Co Ltd | Optical propagating device |
| US4382655A (en) * | 1980-04-07 | 1983-05-10 | California Institute Of Technology | At grade optical crossover for monolithic optial circuits |
| JPS56156807A (en) * | 1980-05-08 | 1981-12-03 | Nippon Telegr & Teleph Corp <Ntt> | Production of high molecular optical circuit |
| US4749245A (en) * | 1985-03-11 | 1988-06-07 | Kuraray Co., Ltd. | Thin film waveguide device and manufacturing method for making same |
| GB8709760D0 (en) * | 1987-04-24 | 1987-05-28 | Plessey Co Plc | Doped spun films for waveguides |
| US4961886A (en) * | 1988-06-09 | 1990-10-09 | Dow Corning Corporation | Method of controlling flow by a radiation formed dam |
| US5136678A (en) * | 1990-02-19 | 1992-08-04 | Brother Kogyo Kabushiki Kaisha | Optical wave guide array |
| US5230990A (en) * | 1990-10-09 | 1993-07-27 | Brother Kogyo Kabushiki Kaisha | Method for producing an optical waveguide array using a resist master |
| DE69122359T2 (de) * | 1990-11-28 | 1997-04-03 | Philips Electronics Nv | Verfahren zum Bedecken der Kolbenwand einer Niederdruckquecksilberdampfentladungslampe mit einer Leuchtstoffschicht |
| GB9105436D0 (en) * | 1991-03-14 | 1991-05-01 | Bicc Plc | An improved optical waveguide component |
| US5481385A (en) * | 1993-07-01 | 1996-01-02 | Alliedsignal Inc. | Direct view display device with array of tapered waveguide on viewer side |
| US5343544A (en) * | 1993-07-02 | 1994-08-30 | Minnesota Mining And Manufacturing Company | Integrated optical fiber coupler and method of making same |
| US5462700A (en) * | 1993-11-08 | 1995-10-31 | Alliedsignal Inc. | Process for making an array of tapered photopolymerized waveguides |
| US5747796A (en) * | 1995-07-13 | 1998-05-05 | Sharp Kabushiki Kaisha | Waveguide type compact optical scanner and manufacturing method thereof |
| US6805902B1 (en) * | 2000-02-28 | 2004-10-19 | Microfab Technologies, Inc. | Precision micro-optical elements and the method of making precision micro-optical elements |
| US6875379B2 (en) * | 2000-12-29 | 2005-04-05 | Amkor Technology, Inc. | Tool and method for forming an integrated optical circuit |
| US20030217804A1 (en) * | 2002-05-24 | 2003-11-27 | Guo Lingjie J. | Polymer micro-ring resonator device and fabrication method |
| US6880948B2 (en) | 2002-12-16 | 2005-04-19 | Zeolux Corporation | Illuminant and method |
| JP2007505747A (ja) * | 2003-09-17 | 2007-03-15 | ナノコムス・パテンツ・リミテッド | マイクロ構造デバイス及びその製造方法 |
| EP1542074A1 (en) * | 2003-12-11 | 2005-06-15 | Heptagon OY | Manufacturing a replication tool, sub-master or replica |
| US20070216048A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing optical elements |
| US20070216046A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing miniature structured elements with tool incorporating spacer elements |
| US20070216049A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Method and tool for manufacturing optical elements |
| US20070216047A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing an optical element |
| US20100072640A1 (en) * | 2006-06-09 | 2010-03-25 | Heptagon Oy | Manufacturing a replication tool, sub-master or replica |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2161990A (en) * | 1937-07-12 | 1939-06-13 | Dennison Mfg Co | Decorative method and product |
| US2361055A (en) * | 1938-08-23 | 1944-10-24 | Pittsburgh Plate Glass Co | Acrylate polymers and method of producing same |
| US2320536A (en) * | 1939-12-19 | 1943-06-01 | Pittsburgh Plate Glass Co | Method of coating |
| US2892716A (en) * | 1955-10-03 | 1959-06-30 | Du Pont | Photopolymerizable composition comprising an unsaturated vinyl polymer and a sheet support coated therewith |
| US3084068A (en) * | 1960-11-08 | 1963-04-02 | Du Pont | Process for acrylic polymerizations |
| US3278322A (en) * | 1962-11-30 | 1966-10-11 | Congoleum Nairn Inc | Process for producing a decorative surface covering |
| US3671283A (en) * | 1970-06-03 | 1972-06-20 | Richard P Crowley | Embossed plastic surface covering and method of preparing same |
-
1971
- 1971-10-14 US US00189101A patent/US3767445A/en not_active Expired - Lifetime
-
1972
- 1972-09-18 CA CA151,925A patent/CA986273A/en not_active Expired
- 1972-10-10 DE DE2249518A patent/DE2249518A1/de active Pending
- 1972-10-12 FR FR7236206A patent/FR2156308B1/fr not_active Expired
- 1972-10-13 GB GB4734172A patent/GB1376770A/en not_active Expired
- 1972-10-13 JP JP47101977A patent/JPS4848139A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CA986273A (en) | 1976-03-30 |
| FR2156308B1 (enExample) | 1975-09-12 |
| US3767445A (en) | 1973-10-23 |
| JPS4848139A (enExample) | 1973-07-07 |
| GB1376770A (en) | 1974-12-11 |
| FR2156308A1 (enExample) | 1973-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHN | Withdrawal |