DE2231654A1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
DE2231654A1
DE2231654A1 DE19722231654 DE2231654A DE2231654A1 DE 2231654 A1 DE2231654 A1 DE 2231654A1 DE 19722231654 DE19722231654 DE 19722231654 DE 2231654 A DE2231654 A DE 2231654A DE 2231654 A1 DE2231654 A1 DE 2231654A1
Authority
DE
Germany
Prior art keywords
rotor
blades
stator
turbo molecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19722231654
Other languages
German (de)
English (en)
Inventor
Ruediger Dr Ing Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19722231654 priority Critical patent/DE2231654A1/de
Priority to FR7323813A priority patent/FR2191626A5/fr
Publication of DE2231654A1 publication Critical patent/DE2231654A1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19722231654 1972-06-28 1972-06-28 Turbomolekularpumpe Pending DE2231654A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19722231654 DE2231654A1 (de) 1972-06-28 1972-06-28 Turbomolekularpumpe
FR7323813A FR2191626A5 (enExample) 1972-06-28 1973-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722231654 DE2231654A1 (de) 1972-06-28 1972-06-28 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
DE2231654A1 true DE2231654A1 (de) 1974-01-17

Family

ID=5849084

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722231654 Pending DE2231654A1 (de) 1972-06-28 1972-06-28 Turbomolekularpumpe

Country Status (2)

Country Link
DE (1) DE2231654A1 (enExample)
FR (1) FR2191626A5 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243393A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243393A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ

Also Published As

Publication number Publication date
FR2191626A5 (enExample) 1974-02-01

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