FR2191626A5 - - Google Patents
Info
- Publication number
- FR2191626A5 FR2191626A5 FR7323813A FR7323813A FR2191626A5 FR 2191626 A5 FR2191626 A5 FR 2191626A5 FR 7323813 A FR7323813 A FR 7323813A FR 7323813 A FR7323813 A FR 7323813A FR 2191626 A5 FR2191626 A5 FR 2191626A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722231654 DE2231654A1 (de) | 1972-06-28 | 1972-06-28 | Turbomolekularpumpe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2191626A5 true FR2191626A5 (enExample) | 1974-02-01 |
Family
ID=5849084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7323813A Expired FR2191626A5 (enExample) | 1972-06-28 | 1973-06-27 |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE2231654A1 (enExample) |
| FR (1) | FR2191626A5 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0081890A1 (en) * | 1981-12-14 | 1983-06-22 | Ultra-Centrifuge Nederland N.V. | High-vacuum molecular pump |
| WO2001011240A1 (de) * | 1999-08-07 | 2001-02-15 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven elementen |
| EP1167773A3 (en) * | 2000-06-23 | 2002-02-27 | Ebara Corporation | Turbo-molecular pump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065077B2 (ja) * | 1985-04-30 | 1994-01-19 | 株式会社島津製作所 | ターボ分子ポンプ |
-
1972
- 1972-06-28 DE DE19722231654 patent/DE2231654A1/de active Pending
-
1973
- 1973-06-27 FR FR7323813A patent/FR2191626A5/fr not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0081890A1 (en) * | 1981-12-14 | 1983-06-22 | Ultra-Centrifuge Nederland N.V. | High-vacuum molecular pump |
| WO2001011240A1 (de) * | 1999-08-07 | 2001-02-15 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven elementen |
| EP1167773A3 (en) * | 2000-06-23 | 2002-02-27 | Ebara Corporation | Turbo-molecular pump |
| US6468030B2 (en) | 2000-06-23 | 2002-10-22 | Ebara Corporation | Turbo-molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2231654A1 (de) | 1974-01-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |