DE212005000023U1 - Mobiles PVD/CVD-Beschichtungszentrum - Google Patents

Mobiles PVD/CVD-Beschichtungszentrum Download PDF

Info

Publication number
DE212005000023U1
DE212005000023U1 DE212005000023U DE212005000023U DE212005000023U1 DE 212005000023 U1 DE212005000023 U1 DE 212005000023U1 DE 212005000023 U DE212005000023 U DE 212005000023U DE 212005000023 U DE212005000023 U DE 212005000023U DE 212005000023 U1 DE212005000023 U1 DE 212005000023U1
Authority
DE
Germany
Prior art keywords
coating
transport
equipment
coating center
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE212005000023U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
OC Oerlikon Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OC Oerlikon Balzers AG filed Critical OC Oerlikon Balzers AG
Publication of DE212005000023U1 publication Critical patent/DE212005000023U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/348—Structures composed of units comprising at least considerable parts of two sides of a room, e.g. box-like or cell-like units closed or in skeleton form
    • E04B1/34815—Elements not integrated in a skeleton
    • E04B1/3483—Elements not integrated in a skeleton the supporting structure consisting of metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Civil Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Chemical & Material Sciences (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Ventilation (AREA)
  • Refuse Collection And Transfer (AREA)
DE212005000023U 2004-05-07 2005-03-24 Mobiles PVD/CVD-Beschichtungszentrum Expired - Lifetime DE212005000023U1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP04010880 2004-05-07
EP04010880.5 2004-05-07
PCT/CH2005/000172 WO2005109472A2 (en) 2004-05-07 2005-03-24 Mobile pvd/cvd coating center

Publications (1)

Publication Number Publication Date
DE212005000023U1 true DE212005000023U1 (de) 2007-01-04

Family

ID=35320909

Family Applications (1)

Application Number Title Priority Date Filing Date
DE212005000023U Expired - Lifetime DE212005000023U1 (de) 2004-05-07 2005-03-24 Mobiles PVD/CVD-Beschichtungszentrum

Country Status (4)

Country Link
CN (1) CN201080493Y (zh)
DE (1) DE212005000023U1 (zh)
TW (1) TWI397602B (zh)
WO (1) WO2005109472A2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018008774A1 (de) 2017-12-05 2019-06-06 Sew-Eurodrive Gmbh & Co Kg Anlage, aufweisend ein Gebäude mit Hallenboden

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE532261C2 (sv) * 2007-04-12 2009-11-24 Bau How As Transporterande arrangemang
AU2009330055B2 (en) 2008-12-23 2015-11-05 Xoma (Us) Llc Flexible manufacturing system
CN102287061B (zh) * 2011-06-21 2014-12-24 赣州澳克泰工具技术有限公司 硬质合金厂的总平面布置
FR2992011B1 (fr) * 2012-06-15 2015-01-23 Jean Louis Baal Assemblage des lots techniques et architecturaux
DE102017120649A1 (de) * 2017-09-07 2019-03-07 Khs Corpoplast Gmbh Vorrichtung zum Beschichten von Behältern
FI20175979A1 (en) * 2017-11-03 2019-05-04 Metsi Oy Technology unit and method for providing a building
CN113174581B (zh) * 2021-04-15 2022-11-18 散裂中子源科学中心 真空管道用的磁场移动式镀膜设备及方法
WO2022243693A2 (en) 2021-05-20 2022-11-24 Sano Development Limited Hybrid building system, building and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2638196B1 (fr) * 1988-10-26 1991-01-25 Roche Jean Procede et dispositif de construction modulaire d'edifices industriels
IT1258959B (it) * 1992-06-09 1996-03-11 Impianto a moduli mobili per lo sviluppo e la produzione di prodotti biotecnologici su scala pilota
US6312525B1 (en) * 1997-07-11 2001-11-06 Applied Materials, Inc. Modular architecture for semiconductor wafer fabrication equipment
US6503379B1 (en) * 2000-05-22 2003-01-07 Basic Research, Inc. Mobile plating system and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018008774A1 (de) 2017-12-05 2019-06-06 Sew-Eurodrive Gmbh & Co Kg Anlage, aufweisend ein Gebäude mit Hallenboden
WO2019110142A1 (de) 2017-12-05 2019-06-13 Sew-Eurodrive Gmbh & Co. Kg Anlage, aufweisend ein gebäude mit hallenboden

Also Published As

Publication number Publication date
TW200600604A (en) 2006-01-01
CN201080493Y (zh) 2008-07-02
WO2005109472A3 (en) 2006-04-27
TWI397602B (zh) 2013-06-01
WO2005109472A2 (en) 2005-11-17

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Legal Events

Date Code Title Description
R163 Identified publications notified
R207 Utility model specification

Effective date: 20070208

R150 Utility model maintained after payment of first maintenance fee after three years

Effective date: 20080418

R081 Change of applicant/patentee

Owner name: OERLIKON TRADING AG, TRUEBBACH, CH

Free format text: FORMER OWNER: OC OERLIKON BALZERS AG, BALZERS, LI

Effective date: 20100303

R151 Utility model maintained after payment of second maintenance fee after six years

Effective date: 20110330

R152 Utility model maintained after payment of third maintenance fee after eight years

Effective date: 20130327

R071 Expiry of right
R071 Expiry of right