DE2109687C3 - Verfahren zur Herstellung von integrierten optischen Elementen - Google Patents
Verfahren zur Herstellung von integrierten optischen ElementenInfo
- Publication number
- DE2109687C3 DE2109687C3 DE19712109687 DE2109687A DE2109687C3 DE 2109687 C3 DE2109687 C3 DE 2109687C3 DE 19712109687 DE19712109687 DE 19712109687 DE 2109687 A DE2109687 A DE 2109687A DE 2109687 C3 DE2109687 C3 DE 2109687C3
- Authority
- DE
- Germany
- Prior art keywords
- radiation
- sensitive material
- wave
- section
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title claims description 24
- 238000000034 method Methods 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 230000008569 process Effects 0.000 title claims description 3
- 239000000463 material Substances 0.000 claims description 29
- 230000005855 radiation Effects 0.000 claims description 20
- 229920000159 gelatin Polymers 0.000 claims description 4
- 235000019322 gelatine Nutrition 0.000 claims description 4
- 108010010803 Gelatin Proteins 0.000 claims description 3
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 claims description 3
- 239000008273 gelatin Substances 0.000 claims description 3
- 235000011852 gelatine desserts Nutrition 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000012993 chemical processing Methods 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- -1 silver halide Chemical class 0.000 claims description 2
- 230000035515 penetration Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 239000000839 emulsion Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000004061 bleaching Methods 0.000 description 3
- 239000007844 bleaching agent Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000002253 acid Chemical group 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical group OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
- 239000001828 Gelatine Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- OIPQUBBCOVJSNS-UHFFFAOYSA-L bromo(iodo)silver Chemical compound Br[Ag]I OIPQUBBCOVJSNS-UHFFFAOYSA-L 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N cinnamic acid group Chemical group C(C=CC1=CC=CC=C1)(=O)O WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000586 desensitisation Methods 0.000 description 1
- NZZFYRREKKOMAT-UHFFFAOYSA-N diiodomethane Chemical compound ICI NZZFYRREKKOMAT-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712109687 DE2109687C3 (de) | 1971-03-02 | 1971-03-02 | Verfahren zur Herstellung von integrierten optischen Elementen |
| CH281372A CH546958A (de) | 1971-03-02 | 1972-02-28 | Verfahren zur herstellung integrierter optischer elemente und nach dem verfahren hergestelltes optisches element. |
| CA135,791A CA979263A (en) | 1971-03-02 | 1972-02-29 | Integrated optical circuits |
| IT2122472A IT954896B (it) | 1971-03-02 | 1972-02-29 | Processo per la produzione di elementi ottici integrati |
| GB953272A GB1387483A (en) | 1971-03-02 | 1972-03-01 | Process for the production of integrated optical elements |
| FR7207149A FR2128497B1 (enExample) | 1971-03-02 | 1972-03-02 | |
| US416918A US3864130A (en) | 1971-03-02 | 1973-11-19 | Integrated optical circuits |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712109687 DE2109687C3 (de) | 1971-03-02 | 1971-03-02 | Verfahren zur Herstellung von integrierten optischen Elementen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2109687A1 DE2109687A1 (de) | 1972-09-21 |
| DE2109687B2 DE2109687B2 (de) | 1979-03-08 |
| DE2109687C3 true DE2109687C3 (de) | 1979-11-08 |
Family
ID=5800179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712109687 Expired DE2109687C3 (de) | 1971-03-02 | 1971-03-02 | Verfahren zur Herstellung von integrierten optischen Elementen |
Country Status (6)
| Country | Link |
|---|---|
| CA (1) | CA979263A (enExample) |
| CH (1) | CH546958A (enExample) |
| DE (1) | DE2109687C3 (enExample) |
| FR (1) | FR2128497B1 (enExample) |
| GB (1) | GB1387483A (enExample) |
| IT (1) | IT954896B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1506400A (en) * | 1975-12-08 | 1978-04-05 | Rank Organisation Ltd | Diffraction gratings |
| DE3008029A1 (de) * | 1980-03-03 | 1981-09-10 | Siemens AG, 1000 Berlin und 8000 München | Optischer baustein fuer multiplexer/demultiplexer |
-
1971
- 1971-03-02 DE DE19712109687 patent/DE2109687C3/de not_active Expired
-
1972
- 1972-02-28 CH CH281372A patent/CH546958A/xx not_active IP Right Cessation
- 1972-02-29 IT IT2122472A patent/IT954896B/it active
- 1972-02-29 CA CA135,791A patent/CA979263A/en not_active Expired
- 1972-03-01 GB GB953272A patent/GB1387483A/en not_active Expired
- 1972-03-02 FR FR7207149A patent/FR2128497B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2109687A1 (de) | 1972-09-21 |
| IT954896B (it) | 1973-09-15 |
| GB1387483A (en) | 1975-03-19 |
| CH546958A (de) | 1974-03-15 |
| CA979263A (en) | 1975-12-09 |
| FR2128497A1 (enExample) | 1972-10-20 |
| DE2109687B2 (de) | 1979-03-08 |
| FR2128497B1 (enExample) | 1975-10-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |