DE2064649A1 - Raumliches Filter zur Umwandlung eines Phasenbildes in ein Intensitatsbild - Google Patents
Raumliches Filter zur Umwandlung eines Phasenbildes in ein IntensitatsbildInfo
- Publication number
- DE2064649A1 DE2064649A1 DE19702064649 DE2064649A DE2064649A1 DE 2064649 A1 DE2064649 A1 DE 2064649A1 DE 19702064649 DE19702064649 DE 19702064649 DE 2064649 A DE2064649 A DE 2064649A DE 2064649 A1 DE2064649 A1 DE 2064649A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- plane
- image
- phase
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000000737 periodic effect Effects 0.000 claims description 8
- 230000001427 coherent effect Effects 0.000 claims description 6
- 238000001228 spectrum Methods 0.000 claims description 6
- 239000011149 active material Substances 0.000 claims description 2
- 229920001169 thermoplastic Polymers 0.000 description 18
- 239000004416 thermosoftening plastic Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 13
- 239000012815 thermoplastic material Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VHQGURIJMFPBKS-UHFFFAOYSA-N 2,4,7-trinitrofluoren-9-one Chemical compound [O-][N+](=O)C1=CC([N+]([O-])=O)=C2C3=CC=C([N+](=O)[O-])C=C3C(=O)C2=C1 VHQGURIJMFPBKS-UHFFFAOYSA-N 0.000 description 1
- BZSXEZOLBIJVQK-UHFFFAOYSA-N 2-methylsulfonylbenzoic acid Chemical compound CS(=O)(=O)C1=CC=CC=C1C(O)=O BZSXEZOLBIJVQK-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910021532 Calcite Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002841 Lewis acid Substances 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000012674 dispersion polymerization Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- SLGWESQGEUXWJQ-UHFFFAOYSA-N formaldehyde;phenol Chemical compound O=C.OC1=CC=CC=C1 SLGWESQGEUXWJQ-UHFFFAOYSA-N 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
- G02B27/4238—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in optical recording or readout devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G16/00—Electrographic processes using deformation of thermoplastic layers; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Holo Graphy (AREA)
- Optical Head (AREA)
- Transforming Electric Information Into Light Information (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33270A | 1970-01-02 | 1970-01-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2064649A1 true DE2064649A1 (de) | 1972-06-22 |
Family
ID=21691033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702064649 Pending DE2064649A1 (de) | 1970-01-02 | 1970-12-31 | Raumliches Filter zur Umwandlung eines Phasenbildes in ein Intensitatsbild |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3630598A (https=) |
| JP (1) | JPS4931665B1 (https=) |
| BE (1) | BE761134A (https=) |
| DE (1) | DE2064649A1 (https=) |
| FR (1) | FR2075915B1 (https=) |
| GB (1) | GB1330709A (https=) |
| NL (1) | NL7100036A (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5130213A (en) * | 1989-08-07 | 1992-07-14 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
| US5079112A (en) * | 1989-08-07 | 1992-01-07 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
| US5258246A (en) * | 1989-08-07 | 1993-11-02 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
| US5638211A (en) | 1990-08-21 | 1997-06-10 | Nikon Corporation | Method and apparatus for increasing the resolution power of projection lithography exposure system |
| JP2995820B2 (ja) | 1990-08-21 | 1999-12-27 | 株式会社ニコン | 露光方法及び方法，並びにデバイス製造方法 |
| US7656504B1 (en) * | 1990-08-21 | 2010-02-02 | Nikon Corporation | Projection exposure apparatus with luminous flux distribution |
| US6710855B2 (en) * | 1990-11-15 | 2004-03-23 | Nikon Corporation | Projection exposure apparatus and method |
| US6967710B2 (en) | 1990-11-15 | 2005-11-22 | Nikon Corporation | Projection exposure apparatus and method |
| US6897942B2 (en) * | 1990-11-15 | 2005-05-24 | Nikon Corporation | Projection exposure apparatus and method |
| US6252647B1 (en) | 1990-11-15 | 2001-06-26 | Nikon Corporation | Projection exposure apparatus |
| US6885433B2 (en) * | 1990-11-15 | 2005-04-26 | Nikon Corporation | Projection exposure apparatus and method |
| US5719704A (en) | 1991-09-11 | 1998-02-17 | Nikon Corporation | Projection exposure apparatus |
| US8270077B2 (en) | 2004-01-16 | 2012-09-18 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
| US20070019179A1 (en) | 2004-01-16 | 2007-01-25 | Damian Fiolka | Polarization-modulating optical element |
| CN101793993B (zh) * | 2004-01-16 | 2013-04-03 | 卡尔蔡司Smt有限责任公司 | 光学元件、光学布置及系统 |
| US7324280B2 (en) * | 2004-05-25 | 2008-01-29 | Asml Holding N.V. | Apparatus for providing a pattern of polarization |
| DE102006031807A1 (de) * | 2005-07-12 | 2007-01-18 | Carl Zeiss Smt Ag | Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage, sowie Depolarisator |
| JP6168383B2 (ja) * | 2012-12-27 | 2017-07-26 | 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． | 欠陥検査装置及び欠陥検査方法 |
| CN113204126B (zh) * | 2021-04-26 | 2022-08-30 | 中国科学院上海光学精密机械研究所 | 多程级联放大激光驱动器的调试装置和方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3335413A (en) * | 1963-12-19 | 1967-08-08 | Gen Electric | Wide band optical recording and narrow band reproduction on a thermo-plastic medium |
| US3470310A (en) * | 1966-05-23 | 1969-09-30 | Rca Corp | Color image display system utilizing a light valve |
| US3480933A (en) * | 1966-10-12 | 1969-11-25 | Ampex | Spatial filtering noise reduction scheme for a magnetooptic readout system |
-
1970
- 1970-01-02 US US332A patent/US3630598A/en not_active Expired - Lifetime
- 1970-12-21 GB GB6055670A patent/GB1330709A/en not_active Expired
- 1970-12-22 JP JP45115545A patent/JPS4931665B1/ja active Pending
- 1970-12-29 FR FR7047701A patent/FR2075915B1/fr not_active Expired
- 1970-12-31 DE DE19702064649 patent/DE2064649A1/de active Pending
- 1970-12-31 BE BE761134A patent/BE761134A/xx unknown
-
1971
- 1971-01-04 NL NL7100036A patent/NL7100036A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL7100036A (https=) | 1971-07-06 |
| US3630598A (en) | 1971-12-28 |
| GB1330709A (en) | 1973-09-19 |
| JPS4931665B1 (https=) | 1974-08-23 |
| FR2075915B1 (https=) | 1977-01-21 |
| FR2075915A1 (https=) | 1971-10-15 |
| BE761134A (fr) | 1971-06-30 |
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