NL7100036A - - Google Patents
Info
- Publication number
- NL7100036A NL7100036A NL7100036A NL7100036A NL7100036A NL 7100036 A NL7100036 A NL 7100036A NL 7100036 A NL7100036 A NL 7100036A NL 7100036 A NL7100036 A NL 7100036A NL 7100036 A NL7100036 A NL 7100036A
- Authority
- NL
- Netherlands
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
- G02B27/4238—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in optical recording or readout devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G16/00—Electrographic processes using deformation of thermoplastic layers; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Holo Graphy (AREA)
- Optical Head (AREA)
- Transforming Electric Information Into Light Information (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33270A | 1970-01-02 | 1970-01-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7100036A true NL7100036A (https=) | 1971-07-06 |
Family
ID=21691033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7100036A NL7100036A (https=) | 1970-01-02 | 1971-01-04 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3630598A (https=) |
| JP (1) | JPS4931665B1 (https=) |
| BE (1) | BE761134A (https=) |
| DE (1) | DE2064649A1 (https=) |
| FR (1) | FR2075915B1 (https=) |
| GB (1) | GB1330709A (https=) |
| NL (1) | NL7100036A (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5130213A (en) * | 1989-08-07 | 1992-07-14 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
| US5079112A (en) * | 1989-08-07 | 1992-01-07 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
| US5258246A (en) * | 1989-08-07 | 1993-11-02 | At&T Bell Laboratories | Device manufacture involving lithographic processing |
| US5638211A (en) | 1990-08-21 | 1997-06-10 | Nikon Corporation | Method and apparatus for increasing the resolution power of projection lithography exposure system |
| JP2995820B2 (ja) | 1990-08-21 | 1999-12-27 | 株式会社ニコン | 露光方法及び方法，並びにデバイス製造方法 |
| US7656504B1 (en) * | 1990-08-21 | 2010-02-02 | Nikon Corporation | Projection exposure apparatus with luminous flux distribution |
| US6710855B2 (en) * | 1990-11-15 | 2004-03-23 | Nikon Corporation | Projection exposure apparatus and method |
| US6967710B2 (en) | 1990-11-15 | 2005-11-22 | Nikon Corporation | Projection exposure apparatus and method |
| US6897942B2 (en) * | 1990-11-15 | 2005-05-24 | Nikon Corporation | Projection exposure apparatus and method |
| US6252647B1 (en) | 1990-11-15 | 2001-06-26 | Nikon Corporation | Projection exposure apparatus |
| US6885433B2 (en) * | 1990-11-15 | 2005-04-26 | Nikon Corporation | Projection exposure apparatus and method |
| US5719704A (en) | 1991-09-11 | 1998-02-17 | Nikon Corporation | Projection exposure apparatus |
| US8270077B2 (en) | 2004-01-16 | 2012-09-18 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
| US20070019179A1 (en) | 2004-01-16 | 2007-01-25 | Damian Fiolka | Polarization-modulating optical element |
| CN101793993B (zh) * | 2004-01-16 | 2013-04-03 | 卡尔蔡司Smt有限责任公司 | 光学元件、光学布置及系统 |
| US7324280B2 (en) * | 2004-05-25 | 2008-01-29 | Asml Holding N.V. | Apparatus for providing a pattern of polarization |
| DE102006031807A1 (de) * | 2005-07-12 | 2007-01-18 | Carl Zeiss Smt Ag | Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage, sowie Depolarisator |
| JP6168383B2 (ja) * | 2012-12-27 | 2017-07-26 | 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． | 欠陥検査装置及び欠陥検査方法 |
| CN113204126B (zh) * | 2021-04-26 | 2022-08-30 | 中国科学院上海光学精密机械研究所 | 多程级联放大激光驱动器的调试装置和方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3335413A (en) * | 1963-12-19 | 1967-08-08 | Gen Electric | Wide band optical recording and narrow band reproduction on a thermo-plastic medium |
| US3470310A (en) * | 1966-05-23 | 1969-09-30 | Rca Corp | Color image display system utilizing a light valve |
| US3480933A (en) * | 1966-10-12 | 1969-11-25 | Ampex | Spatial filtering noise reduction scheme for a magnetooptic readout system |
-
1970
- 1970-01-02 US US332A patent/US3630598A/en not_active Expired - Lifetime
- 1970-12-21 GB GB6055670A patent/GB1330709A/en not_active Expired
- 1970-12-22 JP JP45115545A patent/JPS4931665B1/ja active Pending
- 1970-12-29 FR FR7047701A patent/FR2075915B1/fr not_active Expired
- 1970-12-31 DE DE19702064649 patent/DE2064649A1/de active Pending
- 1970-12-31 BE BE761134A patent/BE761134A/xx unknown
-
1971
- 1971-01-04 NL NL7100036A patent/NL7100036A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3630598A (en) | 1971-12-28 |
| GB1330709A (en) | 1973-09-19 |
| JPS4931665B1 (https=) | 1974-08-23 |
| DE2064649A1 (de) | 1972-06-22 |
| FR2075915B1 (https=) | 1977-01-21 |
| FR2075915A1 (https=) | 1971-10-15 |
| BE761134A (fr) | 1971-06-30 |