DE2052515C3 - Kapazitiver Druckfühler - Google Patents

Kapazitiver Druckfühler

Info

Publication number
DE2052515C3
DE2052515C3 DE2052515A DE2052515A DE2052515C3 DE 2052515 C3 DE2052515 C3 DE 2052515C3 DE 2052515 A DE2052515 A DE 2052515A DE 2052515 A DE2052515 A DE 2052515A DE 2052515 C3 DE2052515 C3 DE 2052515C3
Authority
DE
Germany
Prior art keywords
housing
chamber
membrane
sensor
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2052515A
Other languages
German (de)
English (en)
Other versions
DE2052515B2 (de
DE2052515A1 (de
Inventor
Roger Leonard Eden Prairie Minn. Frick (V.St.A.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25354011&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE2052515(C3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of DE2052515A1 publication Critical patent/DE2052515A1/de
Publication of DE2052515B2 publication Critical patent/DE2052515B2/de
Application granted granted Critical
Publication of DE2052515C3 publication Critical patent/DE2052515C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE2052515A 1969-10-27 1970-10-26 Kapazitiver Druckfühler Expired DE2052515C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86965769A 1969-10-27 1969-10-27

Publications (3)

Publication Number Publication Date
DE2052515A1 DE2052515A1 (de) 1971-05-06
DE2052515B2 DE2052515B2 (de) 1978-08-24
DE2052515C3 true DE2052515C3 (de) 1979-05-10

Family

ID=25354011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2052515A Expired DE2052515C3 (de) 1969-10-27 1970-10-26 Kapazitiver Druckfühler

Country Status (7)

Country Link
US (1) US3618390A (enExample)
JP (1) JPS4923916B1 (enExample)
CA (1) CA944579A (enExample)
DE (1) DE2052515C3 (enExample)
FR (1) FR2066531A5 (enExample)
GB (1) GB1318780A (enExample)
HK (1) HK18277A (enExample)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3838684A (en) * 1971-01-20 1974-10-01 B Manuel Cardiac monitor
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
JPS587182B2 (ja) * 1974-03-08 1983-02-08 横河電機株式会社 サアツオウドウソウチ
DE2458901C3 (de) * 1974-04-23 1986-07-10 The Foxboro Co., Foxboro, Mass. Strömungsmesser
US4086815A (en) * 1975-07-24 1978-05-02 Fuji Electric Co., Ltd. Device for use in sensing pressures
JPS5214470A (en) * 1975-07-24 1977-02-03 Fuji Electric Co Ltd Pressure measuring equipment
JPS5233575A (en) * 1975-09-09 1977-03-14 Fuji Electric Co Ltd Differential pressure measuring device
DE2712846A1 (de) * 1976-03-24 1977-11-24 Ict Instr Inc Messumformer zum messen von druckunterschieden
CA1077294A (en) * 1976-05-03 1980-05-13 Honeywell Inc. Pressure transmitter with simplified pressure sensing head
US4072058A (en) * 1976-05-03 1978-02-07 Honeywell Inc. Differential pressure transmitter with pressure sensor protection
US4120206A (en) * 1977-01-17 1978-10-17 Rosemount Inc. Differential pressure sensor capsule with low acceleration sensitivity
JPS5815049B2 (ja) * 1977-12-20 1983-03-23 富士電機株式会社 差圧測定装置
US4484479A (en) * 1978-04-05 1984-11-27 Richard Eckhardt Gas flow metering
US4172387A (en) * 1978-06-05 1979-10-30 The Foxboro Company Pressure responsive apparatus
DE7903413U1 (de) * 1979-02-08 1979-07-19 Hewlett-Packard Gmbh, 7030 Boeblingen VolumenmeBvorrichtung, insbesondere für die Flüssigkeitschromatographie
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4311053A (en) * 1979-05-14 1982-01-19 Rosemount, Inc. Vibrating beam pressure sensor
US4333350A (en) * 1980-05-01 1982-06-08 Gibb James M Differential pressure sensing device
JPS57500797A (enExample) * 1980-06-12 1982-05-06
FR2490815A1 (fr) * 1980-09-24 1982-03-26 Electro Mecanique Lab Capteur de mesure de pressions
US4370890A (en) * 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
DE3142164A1 (de) 1980-10-27 1982-06-16 Rosemount Engineering Co. Ltd., Bognor Regis, Sussex Vorrichtung zur messung von druckunterschieden
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
US4414851A (en) * 1981-08-28 1983-11-15 Motorola, Inc. Gauge pressure sensor
DE3148403C2 (de) * 1981-12-07 1986-05-07 Siemens AG, 1000 Berlin und 8000 München Miniaturdruckmeßwandler
DE3269049D1 (en) * 1982-05-19 1986-03-27 Hottinger Messtechnik Baldwin Pressure detector with a membrane and an overload stopper
US4565096A (en) * 1983-12-09 1986-01-21 Rosemount Inc. Pressure transducer
US4572000A (en) * 1983-12-09 1986-02-25 Rosemount Inc. Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm
USD297314S (en) 1985-07-15 1988-08-23 Rosemount Inc. Pressure transmitter housing
US4653330A (en) * 1985-07-15 1987-03-31 Rosemount Inc. Pressure transmitter housing
US4617607A (en) * 1985-12-10 1986-10-14 Kavlico Corporation High pressure capacitive transducer
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4741214A (en) * 1986-09-19 1988-05-03 Combustion Engineering, Inc. Capacitive transducer with static compensation
US4798089A (en) * 1987-03-12 1989-01-17 Rosemount Inc. Isolator apparatus
US4754365A (en) * 1987-06-15 1988-06-28 Fischer & Porter Company Differential pressure transducer
USD316975S (en) 1987-09-04 1991-05-21 Rosemount Inc. Housing for a current to pressure transmitter
US5062302A (en) * 1988-04-29 1991-11-05 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection
US4972717A (en) * 1989-09-18 1990-11-27 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
US5499539A (en) * 1992-09-23 1996-03-19 Endress + Hauser Gmbh + Co. Metallic connecting flange for ceramic pressure sensing elements
DE19640960A1 (de) * 1996-10-04 1998-04-09 Bosch Gmbh Robert Kapazitiver Drucksensor mit variabler Kavitätenhöhe
US5988203A (en) * 1997-10-01 1999-11-23 Hutton; Peter B. Two-piece manifold
USD415703S (en) * 1997-12-04 1999-10-26 Hutton Peter B Manifold
USD410398S (en) * 1997-12-04 1999-06-01 Hutton Peter B Manifold
USD407984S (en) * 1997-12-04 1999-04-13 Hutton Peter B Manifold
US6003219A (en) * 1998-04-24 1999-12-21 Rosemount Inc. Method of making a pressure transmitter having pressure sensor having cohered surfaces
US6000427A (en) * 1998-10-19 1999-12-14 Hutton; Peter B. Manifold for use with dual pressure sensor units
USD423387S (en) * 1998-10-19 2000-04-25 Hutton Peter B Instrument manifolds for use with pressure transmitters
US6079443A (en) * 1998-10-19 2000-06-27 Hutton; Peter B. Instrument valve manifolds for use with pressure transmitters
US6358023B1 (en) 2000-08-23 2002-03-19 Paul Guilmette Moment pump
US6435849B1 (en) 2000-09-15 2002-08-20 Paul L. Guilmette Fluid pump
US20040131482A1 (en) * 2003-01-07 2004-07-08 King Peter Joseph Rowing bilge pump
RU2263291C2 (ru) * 2003-06-30 2005-10-27 Федеральное государственное унитарное предприятие "Производственное объединение "Старт" Емкостный датчик давления
JP2005274265A (ja) * 2004-03-24 2005-10-06 Nippon M K S Kk 流量計
WO2005119194A1 (ja) * 2004-06-03 2005-12-15 Nagano Keiki Co., Ltd. 圧力センサモジュール、および圧力検出装置
ITMI20070191A1 (it) * 2007-02-05 2008-08-06 Abb Service Srl Trasmettitore di pressione per il rilevamento di una variabile relativa ad un fluido di processo.
RU2384825C1 (ru) * 2008-12-10 2010-03-20 Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) Датчик для измерения давления
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
CN102346084B (zh) * 2010-07-29 2014-05-14 福建上润精密仪器有限公司 差动电容膜盒的悬浮结构
RU2532236C1 (ru) * 2013-07-16 2014-10-27 Закрытое акционерное общество Промышленная группа "Метран" Конструкция измерительного преобразователя давлений с емкостным сенсором
US8844362B1 (en) * 2013-08-16 2014-09-30 Chevron U.S.A. Inc. System, method, and device for capacitive pressure sensing
RU2545085C1 (ru) * 2013-11-12 2015-03-27 Закрытое акционерное общество Промышленная группа "Метран" Конструкция бипланарного емкостного датчика перепада давления
DE102014102973A1 (de) 2014-03-06 2015-09-10 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014104506A1 (de) 2014-03-31 2015-10-01 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014104831A1 (de) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
DE102014108099A1 (de) 2014-06-10 2015-12-17 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014114882A1 (de) 2014-10-14 2016-04-14 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014117706A1 (de) * 2014-12-02 2016-06-02 Endress + Hauser Gmbh + Co. Kg Kapazitiver Relativdrucksensor
DE102016109645A1 (de) * 2016-05-25 2017-11-30 Endress + Hauser Gmbh + Co. Kg Drucksensorelement und kapazitiver Drucksensor
DE102016111303A1 (de) 2016-06-21 2017-12-21 Endress + Hauser Gmbh + Co. Kg MEMS-Drucksensor
CN111721464B (zh) * 2020-06-10 2025-03-04 蚌埠市创业电子有限责任公司 一种差压传感器基座

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2999385A (en) * 1956-09-17 1961-09-12 Trans Sonics Inc Pressure sensing instrument
US2999386A (en) * 1956-11-02 1961-09-12 Trans Sonics Inc High precision diaphragm type instruments
US3085437A (en) * 1960-05-24 1963-04-16 Gpe Controls Inc Differential pressure transducer
US3232114A (en) * 1962-06-15 1966-02-01 Acton Lab Inc Pressure transducer

Also Published As

Publication number Publication date
HK18277A (en) 1977-04-29
JPS4923916B1 (enExample) 1974-06-19
US3618390A (en) 1971-11-09
DE2052515B2 (de) 1978-08-24
DE2052515A1 (de) 1971-05-06
GB1318780A (en) 1973-05-31
FR2066531A5 (enExample) 1971-08-06
CA944579A (en) 1974-04-02

Similar Documents

Publication Publication Date Title
DE2052515C3 (de) Kapazitiver Druckfühler
DE2801658C2 (enExample)
DE68916384T2 (de) Druckwandler, anwendbar in Ölbohrungen.
EP0111348B1 (de) Kapazitiver Differenzdrucksensor
EP0759547B1 (de) Drucksensor
DE3820418A1 (de) Differenzdruckwandler
DE3814109C2 (de) Kondensatoranordnung zur Verwendung in Druckfühlern
DE60031869T2 (de) Kapazitiver druckwandler
DE69807876T2 (de) Kapazitiver druckwandler mit verbessertem elektrodenträger
DE3883067T2 (de) Kapazitives Manometer zur Absolutdruckmessung.
DE69422851T2 (de) Membran-Druckwandler mit einer Stossschutzvorrichtung und Dichtemessgerät mit einem solchen Wandler
DE4042410C2 (de) Kapazitiver Differenzdruckdetektor
DE2709834A1 (de) Kapazitiver druckfuehler
DE3122438A1 (de) Druckmessdose
DE102009055149A1 (de) Überlastsicherer, Drucksensor, insbesondere Differenzdrucksensor
DE2718931A1 (de) Differenzdruckumformer
DE2848856A1 (de) Kapazitiver druckwandler
EP1275951B1 (de) Drucksensor und Verfahren zu dessen Betriebsüberwachung
EP0152149A2 (de) Optischer Drucksensor
DE2237536A1 (de) Halbleiter-druckwandler
WO1997042477A1 (de) Mikromechanischer druck- und kraftsensor
DE102016124024A1 (de) Drucksensor zur Ermittlung eines Differenzdruckes
DE2824794A1 (de) Druckfuehler
DE2854262A1 (de) Differenzdruck-messeinrichtung
DE2263901B2 (de) Meßumformer

Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)