DE20321019U1 - Prüfstation mit niederinduktivem Weg - Google Patents

Prüfstation mit niederinduktivem Weg Download PDF

Info

Publication number
DE20321019U1
DE20321019U1 DE20321019U DE20321019U DE20321019U1 DE 20321019 U1 DE20321019 U1 DE 20321019U1 DE 20321019 U DE20321019 U DE 20321019U DE 20321019 U DE20321019 U DE 20321019U DE 20321019 U1 DE20321019 U1 DE 20321019U1
Authority
DE
Germany
Prior art keywords
chuck
electrical device
spaced apart
same potential
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20321019U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Beaverton Inc
Original Assignee
Cascade Microtech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/672,655 external-priority patent/US7250779B2/en
Application filed by Cascade Microtech Inc filed Critical Cascade Microtech Inc
Publication of DE20321019U1 publication Critical patent/DE20321019U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/18—Screening arrangements against electric or magnetic fields, e.g. against earth's field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE20321019U 2002-11-25 2003-10-24 Prüfstation mit niederinduktivem Weg Expired - Lifetime DE20321019U1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US42908202P 2002-11-25 2002-11-25
US10/672,655 US7250779B2 (en) 2002-11-25 2003-09-25 Probe station with low inductance path
EP03777879A EP1567871B1 (de) 2002-11-25 2003-10-24 Sondenstation mit niederinduktivitätsweg

Publications (1)

Publication Number Publication Date
DE20321019U1 true DE20321019U1 (de) 2005-09-15

Family

ID=35034396

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20321019U Expired - Lifetime DE20321019U1 (de) 2002-11-25 2003-10-24 Prüfstation mit niederinduktivem Weg

Country Status (1)

Country Link
DE (1) DE20321019U1 (de)

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20051020

R150 Term of protection extended to 6 years

Effective date: 20061116

R151 Term of protection extended to 8 years

Effective date: 20091126

R152 Term of protection extended to 10 years
R152 Term of protection extended to 10 years

Effective date: 20111116

R071 Expiry of right
R071 Expiry of right