DE20309444U1 - Widerstandsbeheiztes Verdampferschiffchen - Google Patents
Widerstandsbeheiztes VerdampferschiffchenInfo
- Publication number
- DE20309444U1 DE20309444U1 DE20309444U DE20309444U DE20309444U1 DE 20309444 U1 DE20309444 U1 DE 20309444U1 DE 20309444 U DE20309444 U DE 20309444U DE 20309444 U DE20309444 U DE 20309444U DE 20309444 U1 DE20309444 U1 DE 20309444U1
- Authority
- DE
- Germany
- Prior art keywords
- resistance
- heated ceramic
- evaporator
- base
- parallel top
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
Claims (5)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20309444U DE20309444U1 (de) | 2003-06-18 | 2003-06-18 | Widerstandsbeheiztes Verdampferschiffchen |
PT03789368T PT1585846E (pt) | 2003-01-08 | 2003-12-19 | Recipiente vaporizador aquecido por resistência |
EP03789368A EP1585846B1 (de) | 2003-01-08 | 2003-12-19 | Widerstandsbeheiztes verdampferschiffchen |
US10/541,329 US7471884B2 (en) | 2003-01-08 | 2003-12-19 | Resistance-heated vaporizer boat |
PCT/EP2003/014676 WO2004063419A1 (en) | 2003-01-08 | 2003-12-19 | Resistance-heated vaporizer boat |
DE60334409T DE60334409D1 (de) | 2003-01-08 | 2003-12-19 | Widerstandsbeheiztes verdampferschiffchen |
AT03789368T ATE483041T1 (de) | 2003-01-08 | 2003-12-19 | Widerstandsbeheiztes verdampferschiffchen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20309444U DE20309444U1 (de) | 2003-06-18 | 2003-06-18 | Widerstandsbeheiztes Verdampferschiffchen |
Publications (1)
Publication Number | Publication Date |
---|---|
DE20309444U1 true DE20309444U1 (de) | 2003-09-25 |
Family
ID=28685560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE20309444U Expired - Lifetime DE20309444U1 (de) | 2003-01-08 | 2003-06-18 | Widerstandsbeheiztes Verdampferschiffchen |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE20309444U1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005027382B4 (de) * | 2005-06-14 | 2010-01-28 | Leybold Optics Gmbh | Verdampferschiffchen für eine Vorrichtung zum Beschichten von Substraten |
EP3470545A1 (de) | 2017-10-10 | 2019-04-17 | 3M Innovative Properties Company | Verdampferschiffchen zum verdampfen von metallen |
EP3767004A1 (de) | 2019-07-17 | 2021-01-20 | 3M Innovative Properties Company | Verdampferschiff zum verdampfen von metallen |
-
2003
- 2003-06-18 DE DE20309444U patent/DE20309444U1/de not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005027382B4 (de) * | 2005-06-14 | 2010-01-28 | Leybold Optics Gmbh | Verdampferschiffchen für eine Vorrichtung zum Beschichten von Substraten |
EP3470545A1 (de) | 2017-10-10 | 2019-04-17 | 3M Innovative Properties Company | Verdampferschiffchen zum verdampfen von metallen |
EP3767004A1 (de) | 2019-07-17 | 2021-01-20 | 3M Innovative Properties Company | Verdampferschiff zum verdampfen von metallen |
WO2021009711A1 (en) | 2019-07-17 | 2021-01-21 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
CN114127327A (zh) * | 2019-07-17 | 2022-03-01 | 3M创新有限公司 | 用于蒸发金属的蒸发舟 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R207 | Utility model specification |
Effective date: 20031030 |
|
R081 | Change of applicant/patentee |
Owner name: SINTEC KERAMIK GMBH, DE Free format text: FORMER OWNER: SINTEC KERAMIK GMBH & CO. KG, 87642 HALBLECH, DE Effective date: 20060726 |
|
R150 | Term of protection extended to 6 years |
Effective date: 20060802 |
|
R081 | Change of applicant/patentee |
Owner name: SINTEC KERAMIK GMBH, DE Free format text: FORMER OWNER: SINTEC KERAMIK GMBH, 87642 HALBLECH, DE Effective date: 20090128 |
|
R151 | Term of protection extended to 8 years |
Effective date: 20090716 |
|
R152 | Term of protection extended to 10 years |
Effective date: 20110419 |
|
R071 | Expiry of right | ||
R071 | Expiry of right |