ATE483041T1 - Widerstandsbeheiztes verdampferschiffchen - Google Patents

Widerstandsbeheiztes verdampferschiffchen

Info

Publication number
ATE483041T1
ATE483041T1 AT03789368T AT03789368T ATE483041T1 AT E483041 T1 ATE483041 T1 AT E483041T1 AT 03789368 T AT03789368 T AT 03789368T AT 03789368 T AT03789368 T AT 03789368T AT E483041 T1 ATE483041 T1 AT E483041T1
Authority
AT
Austria
Prior art keywords
vaporizer body
resistance heated
heated evaporator
evaporator boat
upper side
Prior art date
Application number
AT03789368T
Other languages
English (en)
Inventor
Ulrich Goetz
Rob Lattimer
Original Assignee
Kennametal Sintec Keramik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE20300167U external-priority patent/DE20300167U1/de
Priority claimed from DE20309444U external-priority patent/DE20309444U1/de
Application filed by Kennametal Sintec Keramik Gmbh filed Critical Kennametal Sintec Keramik Gmbh
Application granted granted Critical
Publication of ATE483041T1 publication Critical patent/ATE483041T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Physical Vapour Deposition (AREA)
AT03789368T 2003-01-08 2003-12-19 Widerstandsbeheiztes verdampferschiffchen ATE483041T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE20300167U DE20300167U1 (de) 2003-01-08 2003-01-08 Widerstandsbeheiztes Verdampferschiffchen
DE20309444U DE20309444U1 (de) 2003-06-18 2003-06-18 Widerstandsbeheiztes Verdampferschiffchen
PCT/EP2003/014676 WO2004063419A1 (en) 2003-01-08 2003-12-19 Resistance-heated vaporizer boat

Publications (1)

Publication Number Publication Date
ATE483041T1 true ATE483041T1 (de) 2010-10-15

Family

ID=32714943

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03789368T ATE483041T1 (de) 2003-01-08 2003-12-19 Widerstandsbeheiztes verdampferschiffchen

Country Status (6)

Country Link
US (1) US7471884B2 (de)
EP (1) EP1585846B1 (de)
AT (1) ATE483041T1 (de)
DE (1) DE60334409D1 (de)
PT (1) PT1585846E (de)
WO (1) WO2004063419A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005020946B4 (de) * 2005-05-04 2007-08-02 Esk Ceramics Gmbh & Co. Kg Verfahren und Verdampferschiffchen zum Beschichten von Substraten mit Kupfer oder Silber
DE102005027382B4 (de) * 2005-06-14 2010-01-28 Leybold Optics Gmbh Verdampferschiffchen für eine Vorrichtung zum Beschichten von Substraten
EP2020454B1 (de) * 2007-07-27 2012-09-05 Applied Materials, Inc. Verdampfungsvorrichtung mit geneigtem Tiegel
US8986455B2 (en) * 2007-10-12 2015-03-24 Jln Solar, Inc. Thermal evaporation sources for wide-area deposition
USD752727S1 (en) 2014-05-20 2016-03-29 Vape Holdings, Inc. Ceramic vaporizer
EP3470545A1 (de) 2017-10-10 2019-04-17 3M Innovative Properties Company Verdampferschiffchen zum verdampfen von metallen
EP3767004B1 (de) 2019-07-17 2023-09-27 3M Innovative Properties Company Verdampferschiff zum verdampfen von metallen
WO2022038548A1 (en) * 2020-08-19 2022-02-24 3M Innovative Properties Company Evaporation boat for evaporation of metals

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
US3598958A (en) * 1969-11-26 1971-08-10 Sylvania Electric Prod Resistance heated evaporation boat
US4089643A (en) * 1976-03-19 1978-05-16 Gte Sylvania Incorporated Self-resistance-heated evaporation boat
DE4204938C1 (de) * 1992-02-19 1993-06-24 Leybold Ag, 6450 Hanau, De
US5395180A (en) * 1993-12-14 1995-03-07 Advanced Ceramics Corporation Boron nitride vaporization vessel
DE19545914C1 (de) 1995-12-08 1996-11-07 Sintec Keramik Gmbh Verfahren und Verdampferschiffchen zum Verdampfen von Metall
DE19708599C1 (de) 1997-03-03 1998-04-02 Sintec Keramik Gmbh Keramisches, widerstandsbeheiztes Verdampferschiffchen sowie dessen Verwendung
DE19823908A1 (de) * 1998-05-28 1999-12-02 Kempten Elektroschmelz Gmbh Elliptischer keramischer Verdampfer
KR100889758B1 (ko) * 2002-09-03 2009-03-20 삼성모바일디스플레이주식회사 유기박막 형성장치의 가열용기

Also Published As

Publication number Publication date
US20060223020A1 (en) 2006-10-05
PT1585846E (pt) 2010-11-23
EP1585846B1 (de) 2010-09-29
DE60334409D1 (de) 2010-11-11
US7471884B2 (en) 2008-12-30
WO2004063419A1 (en) 2004-07-29
EP1585846A1 (de) 2005-10-19

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