DE2026069A1 - Verfahren und Vorrichtung zur optischen Präzisions-Positionierung· - Google Patents
Verfahren und Vorrichtung zur optischen Präzisions-Positionierung·Info
- Publication number
- DE2026069A1 DE2026069A1 DE19702026069 DE2026069A DE2026069A1 DE 2026069 A1 DE2026069 A1 DE 2026069A1 DE 19702026069 DE19702026069 DE 19702026069 DE 2026069 A DE2026069 A DE 2026069A DE 2026069 A1 DE2026069 A1 DE 2026069A1
- Authority
- DE
- Germany
- Prior art keywords
- opaque
- plate
- drawn
- markings
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 16
- 238000000034 method Methods 0.000 title claims description 9
- 230000000737 periodic effect Effects 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 3
- 238000005286 illumination Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/14—Control of position or direction using feedback using an analogue comparing device
- G05D3/1436—Control of position or direction using feedback using an analogue comparing device with fine or coarse devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR6917215A FR2044576A5 (enrdf_load_stackoverflow) | 1969-05-27 | 1969-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2026069A1 true DE2026069A1 (de) | 1970-12-03 |
Family
ID=9034640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702026069 Pending DE2026069A1 (de) | 1969-05-27 | 1970-05-27 | Verfahren und Vorrichtung zur optischen Präzisions-Positionierung· |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2026069A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2044576A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1317823A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0000259A1 (en) * | 1977-06-23 | 1979-01-10 | Europäische Atomgemeinschaft (Euratom) | Process and apparatus for the alignment of a transducer forming part of a radiation generator |
| GB2180117B (en) * | 1985-09-05 | 1989-09-06 | Ferranti Plc | Three-dimensional position measuring apparatus |
| GB2285550B (en) * | 1994-01-05 | 1997-09-17 | Creo Products Inc | Optical coordinate measuring system for large objects |
-
1969
- 1969-05-27 FR FR6917215A patent/FR2044576A5/fr not_active Expired
-
1970
- 1970-05-27 GB GB2551870A patent/GB1317823A/en not_active Expired
- 1970-05-27 DE DE19702026069 patent/DE2026069A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2044576A5 (enrdf_load_stackoverflow) | 1971-02-19 |
| GB1317823A (en) | 1973-05-23 |
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