GB1317823A - Photo-electric positioning device - Google Patents
Photo-electric positioning deviceInfo
- Publication number
- GB1317823A GB1317823A GB2551870A GB2551870A GB1317823A GB 1317823 A GB1317823 A GB 1317823A GB 2551870 A GB2551870 A GB 2551870A GB 2551870 A GB2551870 A GB 2551870A GB 1317823 A GB1317823 A GB 1317823A
- Authority
- GB
- United Kingdom
- Prior art keywords
- photo
- reference marks
- outputs
- light
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/14—Control of position or direction using feedback using an analogue comparing device
- G05D3/1436—Control of position or direction using feedback using an analogue comparing device with fine or coarse devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
1317823 Photo-eiectric position finding SOC PARISIENNE DES ANCIENS ETABS BARBIER BENARD & TURENNE 27 May 1970 [27 May 1969] 25518/70 Heading H4D A method of positioning an object comprises producing beams of light, converting said beams to light signals in a modulator, causing the beams or signals to be reflected from first reference marks on an object and to pass second fixed reference marks before they are detected by a sensor, the signals arriving at the sensor being indicative of the displacement of the object and being used to adjust its position. Three aluminium reference marks 2, 3, 4 on an object 1, Fig. 1, are illuminated by light from sources 18, 20 and a third source (not shown) and by means of lenses 5-7 and rhombohedral prisms 15-17 their images are projected on to three aluminium reference marks 11-13, Fig. 3. Disc 24 is rotated and the photo-cell 29-31 outputs are square-waves whose amplitudes are proportional to the positional error. The outputs of photo-cell 31, 30 are used for adjustment in two horizontal orthogonal directions (X, Y) and the difference between the outputs from photo-cells 31, 29 used for rotational correction (f 3 ) (Fig. 2, not shown), the sense of displacement being determined by phase comparison of the photo-cell outputs with a reference square wave. The second reference marks allow for errors in the positioning of the disc 24 axis and the object is thus positioned relative solely to the optical device 8, 9, 10 allowing extreme accuracy. In a modification, (Fig. 4, not shown), the positions of the light sources and the photo-cells are reversed.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR6917215A FR2044576A5 (en) | 1969-05-27 | 1969-05-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1317823A true GB1317823A (en) | 1973-05-23 |
Family
ID=9034640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2551870A Expired GB1317823A (en) | 1969-05-27 | 1970-05-27 | Photo-electric positioning device |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2026069A1 (en) |
FR (1) | FR2044576A5 (en) |
GB (1) | GB1317823A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2180117A (en) * | 1985-09-05 | 1987-03-18 | Ferranti Plc | Three-dimensional position measuring apparatus |
GB2285550A (en) * | 1994-01-05 | 1995-07-12 | Creo Products Inc | Optical coordinate measuring system for large objects |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0000259A1 (en) * | 1977-06-23 | 1979-01-10 | Europäische Atomgemeinschaft (Euratom) | Process and apparatus for the alignment of a transducer forming part of a radiation generator |
-
1969
- 1969-05-27 FR FR6917215A patent/FR2044576A5/fr not_active Expired
-
1970
- 1970-05-27 DE DE19702026069 patent/DE2026069A1/en active Pending
- 1970-05-27 GB GB2551870A patent/GB1317823A/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2180117A (en) * | 1985-09-05 | 1987-03-18 | Ferranti Plc | Three-dimensional position measuring apparatus |
GB2180117B (en) * | 1985-09-05 | 1989-09-06 | Ferranti Plc | Three-dimensional position measuring apparatus |
GB2285550A (en) * | 1994-01-05 | 1995-07-12 | Creo Products Inc | Optical coordinate measuring system for large objects |
GB2285550B (en) * | 1994-01-05 | 1997-09-17 | Creo Products Inc | Optical coordinate measuring system for large objects |
Also Published As
Publication number | Publication date |
---|---|
FR2044576A5 (en) | 1971-02-19 |
DE2026069A1 (en) | 1970-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |