GB1317823A - Photo-electric positioning device - Google Patents

Photo-electric positioning device

Info

Publication number
GB1317823A
GB1317823A GB2551870A GB2551870A GB1317823A GB 1317823 A GB1317823 A GB 1317823A GB 2551870 A GB2551870 A GB 2551870A GB 2551870 A GB2551870 A GB 2551870A GB 1317823 A GB1317823 A GB 1317823A
Authority
GB
United Kingdom
Prior art keywords
photo
reference marks
outputs
light
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2551870A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PARISIENNE DES ANCIENS ETABS B
Original Assignee
PARISIENNE DES ANCIENS ETABS B
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PARISIENNE DES ANCIENS ETABS B filed Critical PARISIENNE DES ANCIENS ETABS B
Publication of GB1317823A publication Critical patent/GB1317823A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • G05D3/1436—Control of position or direction using feedback using an analogue comparing device with fine or coarse devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

1317823 Photo-eiectric position finding SOC PARISIENNE DES ANCIENS ETABS BARBIER BENARD & TURENNE 27 May 1970 [27 May 1969] 25518/70 Heading H4D A method of positioning an object comprises producing beams of light, converting said beams to light signals in a modulator, causing the beams or signals to be reflected from first reference marks on an object and to pass second fixed reference marks before they are detected by a sensor, the signals arriving at the sensor being indicative of the displacement of the object and being used to adjust its position. Three aluminium reference marks 2, 3, 4 on an object 1, Fig. 1, are illuminated by light from sources 18, 20 and a third source (not shown) and by means of lenses 5-7 and rhombohedral prisms 15-17 their images are projected on to three aluminium reference marks 11-13, Fig. 3. Disc 24 is rotated and the photo-cell 29-31 outputs are square-waves whose amplitudes are proportional to the positional error. The outputs of photo-cell 31, 30 are used for adjustment in two horizontal orthogonal directions (X, Y) and the difference between the outputs from photo-cells 31, 29 used for rotational correction (f 3 ) (Fig. 2, not shown), the sense of displacement being determined by phase comparison of the photo-cell outputs with a reference square wave. The second reference marks allow for errors in the positioning of the disc 24 axis and the object is thus positioned relative solely to the optical device 8, 9, 10 allowing extreme accuracy. In a modification, (Fig. 4, not shown), the positions of the light sources and the photo-cells are reversed.
GB2551870A 1969-05-27 1970-05-27 Photo-electric positioning device Expired GB1317823A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6917215A FR2044576A5 (en) 1969-05-27 1969-05-27

Publications (1)

Publication Number Publication Date
GB1317823A true GB1317823A (en) 1973-05-23

Family

ID=9034640

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2551870A Expired GB1317823A (en) 1969-05-27 1970-05-27 Photo-electric positioning device

Country Status (3)

Country Link
DE (1) DE2026069A1 (en)
FR (1) FR2044576A5 (en)
GB (1) GB1317823A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2180117A (en) * 1985-09-05 1987-03-18 Ferranti Plc Three-dimensional position measuring apparatus
GB2285550A (en) * 1994-01-05 1995-07-12 Creo Products Inc Optical coordinate measuring system for large objects

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0000259A1 (en) * 1977-06-23 1979-01-10 Europäische Atomgemeinschaft (Euratom) Process and apparatus for the alignment of a transducer forming part of a radiation generator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2180117A (en) * 1985-09-05 1987-03-18 Ferranti Plc Three-dimensional position measuring apparatus
GB2180117B (en) * 1985-09-05 1989-09-06 Ferranti Plc Three-dimensional position measuring apparatus
GB2285550A (en) * 1994-01-05 1995-07-12 Creo Products Inc Optical coordinate measuring system for large objects
GB2285550B (en) * 1994-01-05 1997-09-17 Creo Products Inc Optical coordinate measuring system for large objects

Also Published As

Publication number Publication date
FR2044576A5 (en) 1971-02-19
DE2026069A1 (en) 1970-12-03

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees