DE2013106A1 - Ionengetter-Vakuumpumpe - Google Patents
Ionengetter-VakuumpumpeInfo
- Publication number
- DE2013106A1 DE2013106A1 DE19702013106 DE2013106A DE2013106A1 DE 2013106 A1 DE2013106 A1 DE 2013106A1 DE 19702013106 DE19702013106 DE 19702013106 DE 2013106 A DE2013106 A DE 2013106A DE 2013106 A1 DE2013106 A1 DE 2013106A1
- Authority
- DE
- Germany
- Prior art keywords
- housing
- electrons
- grid
- vacuum pump
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 21
- 230000005686 electrostatic field Effects 0.000 claims description 18
- 238000000859 sublimation Methods 0.000 claims description 14
- 230000008022 sublimation Effects 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 24
- 150000002500 ions Chemical class 0.000 description 11
- 230000005684 electric field Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Particle Accelerators (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81102869A | 1969-03-27 | 1969-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2013106A1 true DE2013106A1 (de) | 1970-10-08 |
Family
ID=25205343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702013106 Pending DE2013106A1 (de) | 1969-03-27 | 1970-03-19 | Ionengetter-Vakuumpumpe |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3588593A (enrdf_load_stackoverflow) |
| JP (1) | JPS5026772B1 (enrdf_load_stackoverflow) |
| CH (1) | CH512820A (enrdf_load_stackoverflow) |
| DE (1) | DE2013106A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2039994A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1247501A (enrdf_load_stackoverflow) |
| SE (1) | SE361380B (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS531264U (enrdf_load_stackoverflow) * | 1976-06-15 | 1978-01-09 | ||
| JPS5974797U (ja) * | 1982-11-09 | 1984-05-21 | 三菱樹脂株式会社 | 電子部品収納ケ−ス |
| US5697827A (en) * | 1996-01-11 | 1997-12-16 | Rabinowitz; Mario | Emissive flat panel display with improved regenerative cathode |
| DE102009042417B4 (de) | 2009-07-16 | 2011-11-24 | Vacom Steuerungsbau Und Service Gmbh | Orbitron-Ionengetterpumpe |
| US11569077B2 (en) | 2017-07-11 | 2023-01-31 | Sri International | Compact electrostatic ion pump |
| EP3474311A1 (en) * | 2017-10-20 | 2019-04-24 | Tofwerk AG | Ion molecule reactor |
| JP7579270B2 (ja) * | 2019-04-19 | 2024-11-07 | シャイン テクノロジーズ リミテッド ライアビリティ カンパニー | イオン源および中性子発生装置 |
| CN114753991B (zh) * | 2022-05-12 | 2022-10-04 | 之江实验室 | 可伸缩式吸气剂泵抽真空装置及应用方法 |
-
1969
- 1969-03-27 US US811028A patent/US3588593A/en not_active Expired - Lifetime
-
1970
- 1970-02-23 GB GB8671/70A patent/GB1247501A/en not_active Expired
- 1970-03-12 SE SE03317/70A patent/SE361380B/xx unknown
- 1970-03-19 DE DE19702013106 patent/DE2013106A1/de active Pending
- 1970-03-25 FR FR7010813A patent/FR2039994A5/fr not_active Expired
- 1970-03-26 CH CH464670A patent/CH512820A/de not_active IP Right Cessation
- 1970-03-27 JP JP45025568A patent/JPS5026772B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3588593A (en) | 1971-06-28 |
| GB1247501A (en) | 1971-09-22 |
| JPS5026772B1 (enrdf_load_stackoverflow) | 1975-09-03 |
| SE361380B (enrdf_load_stackoverflow) | 1973-10-29 |
| CH512820A (de) | 1971-09-15 |
| FR2039994A5 (enrdf_load_stackoverflow) | 1971-01-15 |
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