DE19982615T1 - Cryopumpe mit einem Auslassfilter - Google Patents

Cryopumpe mit einem Auslassfilter

Info

Publication number
DE19982615T1
DE19982615T1 DE1999182615 DE19982615T DE19982615T1 DE 19982615 T1 DE19982615 T1 DE 19982615T1 DE 1999182615 DE1999182615 DE 1999182615 DE 19982615 T DE19982615 T DE 19982615T DE 19982615 T1 DE19982615 T1 DE 19982615T1
Authority
DE
Germany
Prior art keywords
cryopump
outlet filter
outlet
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE1999182615
Other languages
English (en)
Inventor
Gary Wooster
Frank Skuncik
Michael Richardson
Richard Mazzola
Douglas Funsch
Harry Ledgard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of DE19982615T1 publication Critical patent/DE19982615T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/794—With means for separating solid material from the fluid
    • Y10T137/8085—Hollow strainer, fluid inlet and outlet perpendicular to each other

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE1999182615 1998-01-21 1999-01-19 Cryopumpe mit einem Auslassfilter Withdrawn DE19982615T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/010,403 US5974809A (en) 1998-01-21 1998-01-21 Cryopump with an exhaust filter
PCT/US1999/001111 WO1999037918A1 (en) 1998-01-21 1999-01-19 Cryopump with an exhaust filter

Publications (1)

Publication Number Publication Date
DE19982615T1 true DE19982615T1 (de) 2001-02-22

Family

ID=21745609

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1999182615 Withdrawn DE19982615T1 (de) 1998-01-21 1999-01-19 Cryopumpe mit einem Auslassfilter

Country Status (7)

Country Link
US (1) US5974809A (de)
JP (1) JP4303886B2 (de)
KR (1) KR100576958B1 (de)
DE (1) DE19982615T1 (de)
FR (1) FR2777951B1 (de)
GB (1) GB2349428B (de)
WO (1) WO1999037918A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6327863B1 (en) 2000-05-05 2001-12-11 Helix Technology Corporation Cryopump with gate valve control
US7194867B2 (en) * 2004-03-19 2007-03-27 Brooks Automation, Inc. Integrated rough/purge/vent (RPV) valve
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
DE102004046908A1 (de) * 2004-09-28 2006-04-13 Leybold Vacuum Gmbh Vakuumvorrichtung
WO2006085868A2 (en) * 2005-02-08 2006-08-17 Sumitomo Heavy Industries, Ltd. Improved cryopump
US10760562B2 (en) 2007-01-17 2020-09-01 Edwards Vacuum Llc Pressure burst free high capacity cryopump
KR100871822B1 (ko) * 2007-06-28 2008-12-03 스미도모쥬기가이고교 가부시키가이샤 개량 크라이오펌프
KR101012045B1 (ko) * 2007-07-23 2011-01-31 코바렌트 마테리얼 가부시키가이샤 감압 장치 및 이것에 이용하는 무기 재료질 다공체
WO2011040002A1 (ja) * 2009-09-29 2011-04-07 アルバック・クライオ株式会社 クライオポンプ
JP5178926B2 (ja) * 2010-02-08 2013-04-10 株式会社日立ハイテクノロジーズ 荷電粒子顕微鏡及びイオン顕微鏡
JP5379101B2 (ja) * 2010-09-13 2013-12-25 住友重機械工業株式会社 クライオポンプ及びフィルタ装置
JP5779253B2 (ja) 2010-11-24 2015-09-16 ブルックス オートメーション インコーポレイテッド 制御された水素ガス放出を伴うクライオポンプ
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
ES2527505T3 (es) * 2011-11-29 2015-01-26 Cryostar Sas Bombas criogénicas
US10113793B2 (en) * 2012-02-08 2018-10-30 Quantum Design International, Inc. Cryocooler-based gas scrubber
US9174144B2 (en) 2012-04-20 2015-11-03 Sumitomo (Shi) Cryogenics Of America Inc Low profile cryopump
US9186601B2 (en) 2012-04-20 2015-11-17 Sumitomo (Shi) Cryogenics Of America Inc. Cryopump drain and vent
JP5570550B2 (ja) * 2012-05-21 2014-08-13 住友重機械工業株式会社 クライオポンプ
JP7455037B2 (ja) * 2020-09-30 2024-03-25 住友重機械工業株式会社 クライオポンプおよびクライオポンプの再生方法
CN115522177B (zh) * 2021-07-23 2023-05-09 上海汉钟精机股份有限公司 用于太阳能电池片的镀膜工艺的智能排粉控制方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR747452A (fr) * 1932-02-13 1933-06-17 Telefunken Gmbh Perfectionnements aux montages pour la régulation automatique de volume des récepteurs
US4834136A (en) * 1985-01-22 1989-05-30 Helix Technology Corporation Pressure relief filter and valve and cryopump utilizing the same
US4719938A (en) * 1985-01-22 1988-01-19 Helix Technology Corporation Self-cleaning valve and cryopump utilizing the same
US4697617A (en) * 1985-01-22 1987-10-06 Helix Technology Corporation Pressure relief filter and valve and cryopump utilizing the same
US4655046A (en) * 1985-07-19 1987-04-07 Helix Technology Corporation Cryopump with exhaust filter
EP0466776B1 (de) * 1989-04-07 1994-01-12 Helix Technology Corporation Überdruckventil und kryopumpe die dieses verwendet
CA2096419A1 (en) * 1990-11-19 1992-05-20 Gerd Flick Process for regenerating a cryopump and suitable cryopump for implementing this process
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
DE9111236U1 (de) * 1991-09-10 1992-07-09 Leybold AG, 6450 Hanau Kryopumpe
US5228299A (en) * 1992-04-16 1993-07-20 Helix Technology Corporation Cryopump water drain
US5906102A (en) * 1996-04-12 1999-05-25 Helix Technology Corporation Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve

Also Published As

Publication number Publication date
GB2349428A (en) 2000-11-01
FR2777951A1 (fr) 1999-10-29
KR100576958B1 (ko) 2006-05-10
FR2777951B1 (fr) 2003-10-03
GB0016349D0 (en) 2000-08-23
JP2002501146A (ja) 2002-01-15
JP4303886B2 (ja) 2009-07-29
WO1999037918A1 (en) 1999-07-29
GB2349428B (en) 2002-05-22
US5974809A (en) 1999-11-02
KR20010040385A (ko) 2001-05-15

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8139 Disposal/non-payment of the annual fee