DE19800844A1 - Method for wave front measurement using Shack-Hartmann sensor - Google Patents
Method for wave front measurement using Shack-Hartmann sensorInfo
- Publication number
- DE19800844A1 DE19800844A1 DE1998100844 DE19800844A DE19800844A1 DE 19800844 A1 DE19800844 A1 DE 19800844A1 DE 1998100844 DE1998100844 DE 1998100844 DE 19800844 A DE19800844 A DE 19800844A DE 19800844 A1 DE19800844 A1 DE 19800844A1
- Authority
- DE
- Germany
- Prior art keywords
- spot
- grid
- lenticular
- screen
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000005259 measurement Methods 0.000 title claims 2
- 239000011159 matrix material Substances 0.000 claims abstract description 6
- 230000004075 alteration Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 210000001747 pupil Anatomy 0.000 claims description 2
- 230000006978 adaptation Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 2
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 1
- 239000006187 pill Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Bei der Messung von Wellenfronten mittels Shack-Hartmann-Sensor treten bei größeren Wellenfrontneigungen Eindeutigkeitsprobleme auf, da dabei leicht der Bereich einer Suba pertur der dazugehörigen Linse im Linsenfeld vom Fokusspot überschritten werden kann. Da durch entstehen Zuordnungsprobleme. Durch Verkürzung der Fokuslänge bei konstantem Linsendurchmesser läßt sich zwar der Eindeutigkeitsbereich vergrößern. Dabei geht allerdings die erwünschte Empfindlichkeit verloren. Deshalb wird in dem vorliegenden Patent durch ein orts-variantes Linsenarray das Eindeutigkeitsproblem überwunden, ohne daß Genauigkeit seinbußen hingenommen werden müssen.When measuring wave fronts using the Shack-Hartmann sensor, larger ones occur Wavefront inclinations problems with uniqueness, since this is easily the area of a Suba perture of the associated lens in the lens field can be exceeded by the focus spot. There due to assignment problems. By shortening the focus length at constant The unambiguity range can be increased in the lens diameter. However, it works lost the desired sensitivity. Therefore, in the present patent by location-variant lens array overcomes the uniqueness problem without sacrificing accuracy to suffer their penalties.
Orts-Varianz kann in das Linsenarray des Shack-Hartmann Sensors auf verschiedene Weise
eingeführt werden. Es bieten sich dazu mehrere Methoden an:
Location variance can be introduced into the lens array of the Shack-Hartmann sensor in various ways. There are several methods for this:
- - Vorschalten einer geeigneten Transparenz-Maske vor das Linsenraster- Upstream of a suitable transparency mask in front of the lens grid
- - Vorschalten einer zeitlich variablen Transparenzmaske in Form eines LCD-Modulators oder eines ferroelektrischen Modulators- Upstream of a time-variable transparency mask in the form of an LCD modulator or a ferroelectric modulator
- - Vorschalten einer Polarisationsmaske zusammen mit einem drehbaren Polarisator vor dem CCD-Chip- Upstream of a polarization mask together with a rotatable polarizer in front of the CCD chip
- - Vorschalten einer Farb-Kodiermaske zusammen mit Benutzung einer 3-Chip-Farb-CCD- Kamera- Upstream of a color coding mask together with the use of a 3-chip color CCD camera
- - Versehen der Einzellinsen mit astigmatischen Aberrationen deutlich unterscheidbarer Ori entierung der Hauptachsen bei der Spotbestimmung.- Providing the individual lenses with astigmatic aberrations of clearly distinguishable Ori Main axes in spot determination.
- - Bei der Verwendung von diffraktiven Linsen lassen sich sehr gut auch allgemeinere Spot bilder mit Mehrachsensymmetrie oder ähnlichen Merkmalen realisieren.- When using diffractive lenses, it is also very easy to use more general spots Realize images with multi-axis symmetry or similar features.
Die Philosophie hinter der Orts-Varianz besteht im Einführen einer Signatur für die einzelnen Linsen im Raster derart, daß nach der Detektion eine Spot/Subaperturzuordnung erfolgen kann. Dabei wird entweder von mehreren unterscheidbaren Helligkeitsstufen oder von mehre ren Bildern mit unterschiedlichen und dazu aufgelockerten Arrays, beziehungsweise von spe ziell kodierten Linsenarrays ausgegangen. Es ergeben sich für die Kodierung eine Reihe von Möglichkeiten, die im Zusammenhang mit der software-Lösung für die Wellenfrontrekon struktion gesehen werden müssen. The philosophy behind the location variance is to introduce a signature for each Lenses in a grid in such a way that a spot / subaperture assignment takes place after the detection can. It is either of several distinguishable brightness levels or of several ren pictures with different and loosened up arrays, or of special target-encoded lens arrays. For the coding there are a number of Possibilities related to the software solution for the wavefront recon structure must be seen.
Je nach Dynamik des CCD-Arrays kann man mehrere Intensitätsstufen über einem Rauschpe gel in der Spotebene unterscheiden. Das Anbringen einer Transparenzmaske ermöglicht die Zuordnung auch über einen Subaperturbereich hinaus.Depending on the dynamics of the CCD array, you can have several intensity levels over one noise level distinguish gel in the spot level. The attachment of a transparency mask enables the Assignment also beyond a sub-aperture area.
Ein schaltbares Linsenarray kann durch die Kombination eines Linsenarrays mit einem binä ren LCD-Array in Reihenschaltung realisiert werden. Das LCD-Array dient dabei als zeitva riable Maske, die aus einem dichten Array von Linsenaperturen ein beliebig aufgelockertes Array erzeugen kann. Damit kann der Eindeutigkeitsbereich für den Fokusspot einer einzelnen Linse beliebig vergrößert werden. Um eine volle Auswertung zu erreichen, sind allerdings mehrere Spotbilder auszuwerten. Im Extremfall kann man daran denken, jede Linse allein auf Transparenz zu schalten bzw. ganze Zeilen oder Spalten zu verwenden. Sicherlich sind aber andere Kodierungen ebenso erfolgreich eindeutig auswertbar zu gestalten und damit der Auf wand an Einzelaufnahmen zu senken.A switchable lens array can be combined by combining a lens array with a binary ren LCD array can be realized in series connection. The LCD array serves as a time riable mask, which is loosened up from a dense array of lens apertures Can create array. This allows the area of uniqueness for the focus spot of an individual Lens can be enlarged as required. To achieve a full evaluation, however, are evaluate multiple spot images. In extreme cases, you can think of each lens alone Switch transparency or use entire rows or columns. Certainly are to make other codings just as successful and clearly evaluable and thus the opening wall to lower single shots.
Eine alternative Methode könnte in der Aufprägung einer Linsensignatur bestehen. Ange nommen, man verwendet Mikrolinsen mit astigmatischen Eigenschaften, dann ließe sich die Hauptachsenlage zur Signatur heranziehen. Die Auswertesoftware kann dann aufgrund der Achsenlage eine Zuordnung zu einem Pupillengebiet vornehmen. Auf diesem Wege lassen sich eindeutige Zuordnungen zwischen den Spots auf dem CCD-Chip und Punkten in der Pu pillenebene vornehmen. Damit wäre man von der strikten Fesselung an den Subaperturbereich einer Einzellinse des Arrays für die Ablagen der Spots befreit und auf diese Weise der Meßbe reich des Shack-Hartmann Sensors erweitert in Richtung auf stärkere Aberrationen der zu messenden Wellenfronten. Durch Einführen einer Signatur läßt sich der Eindeutigkeitsbereich lateral beträchtlich erweitern. Wegen der begrenzten Anzahl von unterscheidbaren Signaturen muß das erweiterte Subaperturgebiet schließlich auch periodisch wiederholt werden mit dem Resultat, daß wiederum Mehrdeutigkeiten allerdings in vermindertem Maßstab auftreten kön nen. Man hat dabei ohnehin zu berücksichtigen, daß bei sehr großen Ablagen des Spots relativ zur Linsenachse schließlich eine Verwaschung des Spots auftreten muß.An alternative method could be to stamp a lens signature. Ange if you use microlenses with astigmatic properties, then you can Use the main axis position for the signature. The evaluation software can then on the basis of Make an assignment to a pupil area. Leave this way there are clear assignments between the spots on the CCD chip and points in the pu make pill level. This would take you from the strict bondage to the subaperture area a single lens of the array for the storage of the spots and in this way the Meßbe range of the Shack-Hartmann sensor expands towards stronger aberrations measuring wave fronts. The area of uniqueness can be created by introducing a signature expand considerably laterally. Because of the limited number of distinguishable signatures the extended subaperture area must also be repeated periodically with the The result is that ambiguities can occur on a smaller scale nen. One has to take into account that with very large shelves of the spot relative a washout of the spot must finally occur to the lens axis.
Der Shack-Hartmann Sensor kann sowohl mit refraktiven aber in einem beschränkten Wel lenlängenbereich auch mit diffraktiven Linsenrastern betrieben werden. Diffraktive Linsen ermöglichen nun die sehr allgemeine Gestaltung von Punktbildern. Es ist dann eine Frage des Dynamikbereichs der Kamera, der Größe der zu messenden Aberrationen und der Software wie hoch die Anzahl unterscheidbarer Signaturen ist.The Shack-Hartmann sensor can be used with refractive but in a limited range length range can also be operated with diffractive lenticular grids. Diffractive lenses now enable the very general design of point images. It is then a question of Dynamic range of the camera, the size of the aberrations to be measured and the software the number of distinguishable signatures.
Auch der Polarisationsfreiheitsgrad läßt sich zur Signatur verwenden, allerdings kann auf die sem Wege nur ein Faktor 2 herausgeholt werden. Ohnehin müssen zwei Aufnahmen mit un terschiedlicher Polarisatorstellung vor dem CCD-Array benutzt werden. In der Linsenebene muß dann ein Schachbrett-Polarisator angeordnet werden, der die Signatur einführt und vor dem CCD-Chip wird ein um 90 Grad drehbarer Polarisator benötigt, um die beiden Zustände zu unterscheiden.The degree of polarization freedom can also be used for the signature only a factor of 2 can be extracted. In any case, two shots with un different polarizer position in front of the CCD array. In the lens plane a checkerboard polarizer must then be arranged, which introduces the signature and before The CCD chip requires a polarizer that can be rotated by 90 degrees to determine the two states to distinguish.
Mit einer 3-Chip-Farb-CCD-Kamera lassen sich noch weitere Freiheitsgrade in den SHS ein bauen, wenn er mit weißem Licht und refraktiven Linsen betrieben wird.With a 3-chip color CCD camera, even more degrees of freedom can be incorporated into the SHS build when operated with white light and refractive lenses.
Die orts-variante Ausgestaltung des Shack-Hartmann Sensors soll an Hand eines Ausfüh rungsbeispiels (s. Fig. 1) erörtert werden. Das zu untersuchende Wellenfeld fällt von links auf eine Kombination aus einer Liquid-Crystal-Matrix mit einzeln ansteuerbaren Subaperturen und einem angepaßten Mikrolinsenraster, wobei jede Subapertur der LCD-Matrix mit einer Linse des Rasters koinzidiert. In der Fokalebene des Linsenrasters ist ein CCD-Chip ausrei chender Pixelanzahl angeordnet, welcher zur Detektion der Spotintensitäten herangezogen werden kann. Die LCD-Matrix wird von einem PC derart gesteuert, daß nacheinander unter schiedliche Rasterfelder zu einem Feld von Spotbildern führen, wobei die Subaperturen vom PC vorgegeben werden und damit bekannt sind. Dies wird zur eindeutigen Zuordnung Spot/Subapertur via Software genutzt.The location-variant design of the Shack-Hartmann sensor is to be discussed using an exemplary embodiment (see FIG. 1). The wave field to be examined falls from the left onto a combination of a liquid crystal matrix with individually controllable subapertures and an adapted microlens grid, each subaperture of the LCD matrix coinciding with a lens of the grid. In the focal plane of the lenticular grid, a sufficient number of pixels is arranged, which can be used to detect the spot intensities. The LCD matrix is controlled by a PC in such a way that different grid fields lead successively to a field of spot images, the sub-apertures being predetermined by the PC and thus being known. This is used to uniquely assign spot / subaperture via software.
Claims (8)
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DE1998100844 DE19800844A1 (en) | 1998-01-13 | 1998-01-13 | Method for wave front measurement using Shack-Hartmann sensor |
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Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1136806A2 (en) * | 2000-03-24 | 2001-09-26 | Carl Zeiss | Device and procedure for a space resolved determination of the refractive power of an optical element |
WO2003051189A2 (en) * | 2001-12-14 | 2003-06-26 | Technovision Gmbh Gesellschaft Für Die Entwicklung Medizinischer Technologien | Improved hartmann-shack wavefront sensor apparatus and method |
WO2003054613A2 (en) * | 2001-12-11 | 2003-07-03 | Bausch & Lomb Incorporated | Method and apparatus for improving the dynamic range and accuracy of a shack-hartmann wavefront sensor |
US6707020B1 (en) * | 1999-12-28 | 2004-03-16 | Mza Associates Corporation | Adaptive dynamic range wavefront sensor |
WO2004109225A1 (en) * | 2003-06-05 | 2004-12-16 | Universität Stuttgart | Switched point light source array and its use in interferometry |
EP1491855A1 (en) * | 2003-06-23 | 2004-12-29 | Leica Geosystems AG | Optical inclination sensor |
DE10328145A1 (en) * | 2003-06-21 | 2005-01-13 | Technische Universität Carolo-Wilhelmina Zu Braunschweig | Imaging characteristics measuring method for transparent object e.g. optical component, using light transmitted through object for providing images of spaced raster structures at receiver |
DE10348509A1 (en) * | 2003-10-18 | 2005-05-19 | Carl Zeiss Jena Gmbh | Determining image errors by computing test object Zernike coefficients involves detecting pupil edge according to position, size in computer system in addition to wavefront measurement by evaluating light from object recorded by CCD camera |
DE102007043390A1 (en) | 2007-09-12 | 2009-03-19 | Uvex Arbeitsschutz Gmbh | Safety goggles i.e. industrial safety glasses, manufacturing method, involves testing viewing glass for optical defects, and modifying and/or adjusting manufacturing requirements for viewing glass based on optical defects |
CN100498266C (en) * | 2005-06-01 | 2009-06-10 | 中国科学院光电技术研究所 | transient three-dimensional flow field optical chromatography measuring system |
CN1844873B (en) * | 2006-05-22 | 2010-09-22 | 中国科学院光电技术研究所 | Supersonic flow field detection system based on H-S wave-front sensor and detection method thereof |
CN102507155A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Device for detecting wavefront of large-caliber optical system |
CN103217273A (en) * | 2013-03-25 | 2013-07-24 | 上海理工大学 | Multifocal lens diopter detection system and detection method thereof |
CN103257033A (en) * | 2013-05-15 | 2013-08-21 | 中国科学院光电技术研究所 | Window glass transmission wavefront detection method based on sub-aperture splicing interference detection |
CN103969031A (en) * | 2014-05-14 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring response matrix of liquid crystal corrector through least square method |
CN110687074A (en) * | 2019-10-28 | 2020-01-14 | 华中科技大学 | Wavefront sensor-based optical part uniformity detection device and method |
WO2020156867A1 (en) * | 2019-01-31 | 2020-08-06 | Centre National De La Recherche Scientifique | System for inspecting surfaces of an optical wave using a graduated density filter |
CN112097923A (en) * | 2020-07-30 | 2020-12-18 | 福建华科光电有限公司 | Simple wavefront measurement method for optical element |
CN112197876A (en) * | 2020-09-27 | 2021-01-08 | 中国科学院光电技术研究所 | Single far-field type depth learning wavefront restoration method based on four-quadrant discrete phase modulation |
US11293806B2 (en) | 2017-04-06 | 2022-04-05 | Pxe Computational Imagimg Ltd | Wavefront sensor and method of using it |
-
1998
- 1998-01-13 DE DE1998100844 patent/DE19800844A1/en not_active Withdrawn
Cited By (35)
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US6707020B1 (en) * | 1999-12-28 | 2004-03-16 | Mza Associates Corporation | Adaptive dynamic range wavefront sensor |
DE10014334A1 (en) * | 2000-03-24 | 2001-11-15 | Zeiss Carl | Device and method for spatially resolved refractive power determination |
DE10014334C2 (en) * | 2000-03-24 | 2002-03-21 | Zeiss Carl | Device and method for spatially resolved refractive power determination |
US6515739B2 (en) | 2000-03-24 | 2003-02-04 | Carl-Zeiss-Stiftung | Apparatus and process for spatially resolved refractive power determination |
EP1136806A3 (en) * | 2000-03-24 | 2003-10-01 | Carl Zeiss | Device and procedure for a space resolved determination of the refractive power of an optical element |
EP1136806A2 (en) * | 2000-03-24 | 2001-09-26 | Carl Zeiss | Device and procedure for a space resolved determination of the refractive power of an optical element |
WO2003054613A2 (en) * | 2001-12-11 | 2003-07-03 | Bausch & Lomb Incorporated | Method and apparatus for improving the dynamic range and accuracy of a shack-hartmann wavefront sensor |
WO2003054613A3 (en) * | 2001-12-11 | 2003-08-14 | Bausch & Lomb | Method and apparatus for improving the dynamic range and accuracy of a shack-hartmann wavefront sensor |
WO2003051189A2 (en) * | 2001-12-14 | 2003-06-26 | Technovision Gmbh Gesellschaft Für Die Entwicklung Medizinischer Technologien | Improved hartmann-shack wavefront sensor apparatus and method |
WO2003051189A3 (en) * | 2001-12-14 | 2004-03-04 | Technovision Gmbh Ges Fuer Die | Improved hartmann-shack wavefront sensor apparatus and method |
WO2004109225A1 (en) * | 2003-06-05 | 2004-12-16 | Universität Stuttgart | Switched point light source array and its use in interferometry |
DE10328145A1 (en) * | 2003-06-21 | 2005-01-13 | Technische Universität Carolo-Wilhelmina Zu Braunschweig | Imaging characteristics measuring method for transparent object e.g. optical component, using light transmitted through object for providing images of spaced raster structures at receiver |
AU2004252226B2 (en) * | 2003-06-23 | 2008-09-18 | Leica Geosystems Ag | Optical inclinometer |
WO2005001377A3 (en) * | 2003-06-23 | 2005-05-19 | Leica Geosystems Ag | Optical inclinometer |
EP1491855A1 (en) * | 2003-06-23 | 2004-12-29 | Leica Geosystems AG | Optical inclination sensor |
US7649621B2 (en) | 2003-06-23 | 2010-01-19 | Leica Geosystems Ag | Optical inclinometer |
WO2005001377A2 (en) * | 2003-06-23 | 2005-01-06 | Leica Geosystems Ag | Optical inclinometer |
DE10348509A1 (en) * | 2003-10-18 | 2005-05-19 | Carl Zeiss Jena Gmbh | Determining image errors by computing test object Zernike coefficients involves detecting pupil edge according to position, size in computer system in addition to wavefront measurement by evaluating light from object recorded by CCD camera |
CN100498266C (en) * | 2005-06-01 | 2009-06-10 | 中国科学院光电技术研究所 | transient three-dimensional flow field optical chromatography measuring system |
CN1844873B (en) * | 2006-05-22 | 2010-09-22 | 中国科学院光电技术研究所 | Supersonic flow field detection system based on H-S wave-front sensor and detection method thereof |
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CN102507155A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Device for detecting wavefront of large-caliber optical system |
CN103217273A (en) * | 2013-03-25 | 2013-07-24 | 上海理工大学 | Multifocal lens diopter detection system and detection method thereof |
CN103257033A (en) * | 2013-05-15 | 2013-08-21 | 中国科学院光电技术研究所 | Window glass transmission wavefront detection method based on sub-aperture splicing interference detection |
CN103969031B (en) * | 2014-05-14 | 2016-07-06 | 中国科学院长春光学精密机械与物理研究所 | Method of least square measures the method for liquid crystal corrector response matrix |
CN103969031A (en) * | 2014-05-14 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring response matrix of liquid crystal corrector through least square method |
US11293806B2 (en) | 2017-04-06 | 2022-04-05 | Pxe Computational Imagimg Ltd | Wavefront sensor and method of using it |
WO2020156867A1 (en) * | 2019-01-31 | 2020-08-06 | Centre National De La Recherche Scientifique | System for inspecting surfaces of an optical wave using a graduated density filter |
FR3092396A1 (en) * | 2019-01-31 | 2020-08-07 | Centre National De La Recherche Scientifique | Density gradient filter optical wave surface control system |
CN113994179A (en) * | 2019-01-31 | 2022-01-28 | 法国国家科学研究中心 | System for inspecting surfaces of light waves using density gradient filters |
US11754449B2 (en) | 2019-01-31 | 2023-09-12 | Centre National De La Recherche Scientifique | System for inspecting surfaces of an optical wave using a graduated density filter |
CN110687074A (en) * | 2019-10-28 | 2020-01-14 | 华中科技大学 | Wavefront sensor-based optical part uniformity detection device and method |
CN112097923A (en) * | 2020-07-30 | 2020-12-18 | 福建华科光电有限公司 | Simple wavefront measurement method for optical element |
CN112197876A (en) * | 2020-09-27 | 2021-01-08 | 中国科学院光电技术研究所 | Single far-field type depth learning wavefront restoration method based on four-quadrant discrete phase modulation |
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