DE19781728T1 - Optisches Verfahren zum Bestimmen mechanischer Eigenschaften eines Materials - Google Patents

Optisches Verfahren zum Bestimmen mechanischer Eigenschaften eines Materials

Info

Publication number
DE19781728T1
DE19781728T1 DE19781728T DE19781728T DE19781728T1 DE 19781728 T1 DE19781728 T1 DE 19781728T1 DE 19781728 T DE19781728 T DE 19781728T DE 19781728 T DE19781728 T DE 19781728T DE 19781728 T1 DE19781728 T1 DE 19781728T1
Authority
DE
Germany
Prior art keywords
mechanical properties
optical method
determining mechanical
determining
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19781728T
Other languages
English (en)
Other versions
DE19781728B4 (de
Inventor
Humphrey J Maris
Robert J Stoner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brown University Research Foundation Inc
Original Assignee
Brown University Research Foundation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/808,632 external-priority patent/US5844684A/en
Application filed by Brown University Research Foundation Inc filed Critical Brown University Research Foundation Inc
Publication of DE19781728T1 publication Critical patent/DE19781728T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/011—Velocity or travel time
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0237—Thin materials, e.g. paper, membranes, thin films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02854—Length, thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02881—Temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE19781728T 1996-04-26 1997-04-10 Optisches Verfahren zum Bestimmen mechanischer Eigenschaften eines Materials Pending DE19781728T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US1748196P 1996-04-26 1996-04-26
US1739196P 1996-05-08 1996-05-08
US08/808,632 US5844684A (en) 1997-02-28 1997-02-28 Optical method for determining the mechanical properties of a material
PCT/US1997/005956 WO1997041418A1 (en) 1996-04-26 1997-04-10 Optical method for determining the mechanical properties of a material

Publications (1)

Publication Number Publication Date
DE19781728T1 true DE19781728T1 (de) 1999-03-25

Family

ID=27360784

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19781728A Expired - Lifetime DE19781728B4 (de) 1996-04-26 1997-04-10 Optisches Verfahren und System zum Bestimmen mechanischer Eigenschaften eines Materials
DE19781728T Pending DE19781728T1 (de) 1996-04-26 1997-04-10 Optisches Verfahren zum Bestimmen mechanischer Eigenschaften eines Materials

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19781728A Expired - Lifetime DE19781728B4 (de) 1996-04-26 1997-04-10 Optisches Verfahren und System zum Bestimmen mechanischer Eigenschaften eines Materials

Country Status (3)

Country Link
JP (1) JP4025369B2 (de)
DE (2) DE19781728B4 (de)
WO (1) WO1997041418A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6317216B1 (en) 1999-12-13 2001-11-13 Brown University Research Foundation Optical method for the determination of grain orientation in films
US6490470B1 (en) 2001-06-19 2002-12-03 Optosonics, Inc. Thermoacoustic tissue scanner
JP4950813B2 (ja) * 2007-08-30 2012-06-13 大日本スクリーン製造株式会社 分光エリプソメータ、膜厚測定装置および分光エリプソメータのフォーカス調整方法
JP5534315B2 (ja) * 2010-03-01 2014-06-25 独立行政法人理化学研究所 物性測定装置、物性測定方法及びプログラム
JP2011180039A (ja) * 2010-03-02 2011-09-15 Sigma Koki Kk 被検体損傷分析装置
EP3132467A4 (de) 2014-04-17 2017-11-01 Femtometrix, Inc. Wafermetrologietechnologien
WO2015159864A1 (ja) * 2014-04-18 2015-10-22 国立大学法人九州工業大学 半導体ウェーハのバルク品質評価方法および装置
WO2016077617A1 (en) * 2014-11-12 2016-05-19 Femtometrix, Inc. Systems for parsing material properties from within shg signals
CN113167741A (zh) 2018-05-15 2021-07-23 菲拓梅里克斯公司 二次谐波产生(shg)光学检查系统设计
CN112556585A (zh) * 2020-11-19 2021-03-26 深圳中科飞测科技股份有限公司 一种测量系统及测量方法
CN116608802A (zh) * 2023-07-17 2023-08-18 中国空气动力研究与发展中心计算空气动力研究所 厚度变化时温度和厚度同步测量方法、装置、设备及介质

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606860A (ja) * 1983-06-15 1985-01-14 Hitachi Ltd 非接触式超音波探傷方法およびその装置
US4710030A (en) * 1985-05-17 1987-12-01 Bw Brown University Research Foundation Optical generator and detector of stress pulses
US4750822A (en) * 1986-03-28 1988-06-14 Therma-Wave, Inc. Method and apparatus for optically detecting surface states in materials
US5074669A (en) * 1989-12-12 1991-12-24 Therma-Wave, Inc. Method and apparatus for evaluating ion implant dosage levels in semiconductors
US5748318A (en) * 1996-01-23 1998-05-05 Brown University Research Foundation Optical stress generator and detector

Also Published As

Publication number Publication date
JP2001519892A (ja) 2001-10-23
WO1997041418A1 (en) 1997-11-06
JP4025369B2 (ja) 2007-12-19
DE19781728B4 (de) 2007-10-18

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