DE19781069T1 - Führungsbuchse und Verfahren zum Ausbilden einer Schicht über einer Führungsbuchse - Google Patents

Führungsbuchse und Verfahren zum Ausbilden einer Schicht über einer Führungsbuchse

Info

Publication number
DE19781069T1
DE19781069T1 DE19781069T DE19781069T DE19781069T1 DE 19781069 T1 DE19781069 T1 DE 19781069T1 DE 19781069 T DE19781069 T DE 19781069T DE 19781069 T DE19781069 T DE 19781069T DE 19781069 T1 DE19781069 T1 DE 19781069T1
Authority
DE
Germany
Prior art keywords
guide bushing
forming
layer over
bushing
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19781069T
Other languages
English (en)
Other versions
DE19781069C2 (de
Inventor
Ryota Koike
Osamu Sugiyama
Yukio Miya
Takashi Toida
Toshiichi Sekine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Publication of DE19781069T1 publication Critical patent/DE19781069T1/de
Application granted granted Critical
Publication of DE19781069C2 publication Critical patent/DE19781069C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
    • B23B31/20—Longitudinally-split sleeves, e.g. collet chucks
    • B23B31/201—Characterized by features relating primarily to remote control of the gripping means
    • B23B31/202—Details of the jaws
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2231/00—Details of chucks, toolholder shanks or tool shanks
    • B23B2231/20—Collet chucks
    • B23B2231/2048—Collets comprising inserts
    • B23B2231/2059—Hard inserts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electrochemistry (AREA)
  • Turning (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
DE19781069T 1996-07-08 1997-07-08 Führungsbuchse und Verfahren zum Ausbilden einer harten Kohlenstoffschicht über einer Führungsbuchse Expired - Fee Related DE19781069C2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP17784796 1996-07-08
JP19618196 1996-07-25
JP21555896 1996-08-15
PCT/JP1997/002365 WO1998001600A1 (en) 1996-07-08 1997-07-08 Guide bush and method of forming film on guide bush

Publications (2)

Publication Number Publication Date
DE19781069T1 true DE19781069T1 (de) 1998-12-03
DE19781069C2 DE19781069C2 (de) 1999-12-16

Family

ID=27324489

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19781069T Expired - Fee Related DE19781069C2 (de) 1996-07-08 1997-07-08 Führungsbuchse und Verfahren zum Ausbilden einer harten Kohlenstoffschicht über einer Führungsbuchse

Country Status (4)

Country Link
US (1) US6056443A (de)
CN (1) CN1107742C (de)
DE (1) DE19781069C2 (de)
WO (1) WO1998001600A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6126793A (en) * 1995-10-17 2000-10-03 Citizen Watch Co., Ltd. Method of forming films over inner surface of cylindrical member
US5941647A (en) * 1996-08-19 1999-08-24 Citizen Watch Co., Ltd. Guide bush and method of forming hard carbon film over the inner surface of the guide bush
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
IL150889A (en) * 2000-02-01 2008-03-20 Toto Ltd Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment and gas recovery method for the hydrostatic gas bearing device
JP2003097552A (ja) * 2001-09-21 2003-04-03 Nsk Ltd 摩擦付加装置および直動案内装置
JP3945752B2 (ja) * 2002-01-15 2007-07-18 シチズンホールディングス株式会社 ガイドブッシュ
JP3918603B2 (ja) * 2002-03-27 2007-05-23 株式会社デンソー 燃料ポンプ用軸受とその製造方法および燃料ポンプ
JP2004138128A (ja) 2002-10-16 2004-05-13 Nissan Motor Co Ltd 自動車エンジン用摺動部材
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP3891433B2 (ja) 2003-04-15 2007-03-14 日産自動車株式会社 燃料噴射弁
EP1479946B1 (de) 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Kolben für eine Brennkraftmaschine
EP1482190B1 (de) 2003-05-27 2012-12-05 Nissan Motor Company Limited Wälzkörper
JP2004360649A (ja) 2003-06-06 2004-12-24 Nissan Motor Co Ltd エンジン用ピストンピン
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
CN101760286B (zh) 2003-08-06 2013-03-20 日产自动车株式会社 低摩擦滑动机构、低摩擦剂组合物以及减小摩擦的方法
JP2005054617A (ja) 2003-08-08 2005-03-03 Nissan Motor Co Ltd 動弁機構
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005090489A (ja) * 2003-08-11 2005-04-07 Nissan Motor Co Ltd 内燃機関用バルブリフター
JP4117553B2 (ja) 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
DE602004008547T2 (de) * 2003-08-13 2008-05-21 Nissan Motor Co., Ltd., Yokohama Struktur zur Verbindung von einem Kolben mit einer Kurbelwelle
JP4539205B2 (ja) 2003-08-21 2010-09-08 日産自動車株式会社 冷媒圧縮機
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
EP1954429B1 (de) * 2005-12-02 2015-05-27 United Technologies Corporation Metallfreie diamantartige kohlenstoffbeschichtungen
DE102009028504C5 (de) * 2009-08-13 2014-10-30 Federal-Mogul Burscheid Gmbh Kolbenring mit einer Beschichtung
JP5904537B2 (ja) * 2011-04-20 2016-04-13 Ntn株式会社 非晶質炭素膜の成膜方法
CN112620663B (zh) * 2013-03-18 2023-07-21 西铁城时计株式会社 导衬控制装置以及导衬的调整方法
CN111173840B (zh) 2015-06-30 2021-10-26 美国圣戈班性能塑料公司 滑动轴承
DE102020209818A1 (de) 2020-08-04 2022-02-10 Robert Bosch Gesellschaft mit beschränkter Haftung Universaler Substrathalter für plasmagestützte Beschichtungsanlagen

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Publication number Priority date Publication date Assignee Title
JPS5570901U (de) * 1978-11-09 1980-05-16
JPS5570901A (en) * 1978-11-21 1980-05-28 Sharp Corp Squelch unit
JPS61201780A (ja) * 1985-03-01 1986-09-06 Sumitomo Electric Ind Ltd 筒状絶縁性部材のセラミツクス被覆方法およびそのための装置
JP2598640B2 (ja) * 1987-03-27 1997-04-09 京セラ株式会社 グロー放電分解装置
JPH0270059A (ja) * 1987-12-02 1990-03-08 Idemitsu Petrochem Co Ltd 器具およびその製造方法
JPH04141303A (ja) * 1990-10-01 1992-05-14 Fusao Yamada 棒材加工用の主軸移動型自動旋盤における固定形ガイドブッシュとこれを用いたワーク繰り出し方法
JP2981012B2 (ja) * 1991-05-07 1999-11-22 旭ダイヤモンド工業株式会社 ダイヤモンド被覆工具の製造方法
JP3379150B2 (ja) * 1993-06-14 2003-02-17 住友電気工業株式会社 ダイヤモンド被覆材料およびその製造方法
JP3224488B2 (ja) * 1995-03-28 2001-10-29 シチズン時計株式会社 硬質カーボン膜の形成方法
JPH0931655A (ja) * 1995-07-14 1997-02-04 Citizen Watch Co Ltd 硬質カーボン膜の形成方法
US5922418A (en) * 1996-08-15 1999-07-13 Citizen Watch Co., Ltd. Method of forming a DLC film over the inner surface of guide bush
US5941647A (en) * 1996-08-19 1999-08-24 Citizen Watch Co., Ltd. Guide bush and method of forming hard carbon film over the inner surface of the guide bush
US5939152A (en) * 1996-08-19 1999-08-17 Citizen Watch Co., Ltd. Method of forming hard carbon film over the inner surface of guide bush
US5879763A (en) * 1997-09-03 1999-03-09 Citizen Watch Co., Ltd. Method of forming hard carbon film over inner surface of cylindrical member

Also Published As

Publication number Publication date
CN1107742C (zh) 2003-05-07
WO1998001600A1 (en) 1998-01-15
CN1197486A (zh) 1998-10-28
US6056443A (en) 2000-05-02
DE19781069C2 (de) 1999-12-16

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