DE19712622C5 - Anordnung und Verfahren zur automatischen Korrektur fehlerbehafteter Abtastsignale inkrementaler Positionsmeßeinrichtungen - Google Patents

Anordnung und Verfahren zur automatischen Korrektur fehlerbehafteter Abtastsignale inkrementaler Positionsmeßeinrichtungen Download PDF

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Publication number
DE19712622C5
DE19712622C5 DE19712622A DE19712622A DE19712622C5 DE 19712622 C5 DE19712622 C5 DE 19712622C5 DE 19712622 A DE19712622 A DE 19712622A DE 19712622 A DE19712622 A DE 19712622A DE 19712622 C5 DE19712622 C5 DE 19712622C5
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Germany
Prior art keywords
scanning signals
signals
correction
unit
analog
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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DE19712622A
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German (de)
English (en)
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DE19712622B4 (de
DE19712622A1 (de
Inventor
Alfons Dipl.-Ing. Spies
Wolfgang Dr. Holzapfel
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE19712622A priority Critical patent/DE19712622C5/de
Priority to JP07436598A priority patent/JP4034414B2/ja
Priority to US09/047,702 priority patent/US5956659A/en
Publication of DE19712622A1 publication Critical patent/DE19712622A1/de
Publication of DE19712622B4 publication Critical patent/DE19712622B4/de
Application granted granted Critical
Publication of DE19712622C5 publication Critical patent/DE19712622C5/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Optical Transform (AREA)
DE19712622A 1997-03-26 1997-03-26 Anordnung und Verfahren zur automatischen Korrektur fehlerbehafteter Abtastsignale inkrementaler Positionsmeßeinrichtungen Expired - Fee Related DE19712622C5 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19712622A DE19712622C5 (de) 1997-03-26 1997-03-26 Anordnung und Verfahren zur automatischen Korrektur fehlerbehafteter Abtastsignale inkrementaler Positionsmeßeinrichtungen
JP07436598A JP4034414B2 (ja) 1997-03-26 1998-03-23 増分位置測定装置の誤差を含む走査信号を自動的に修正する装置と方法
US09/047,702 US5956659A (en) 1997-03-26 1998-03-25 Arrangement and method for the automatic correction of error-containing scanning signals of incremental position-measuring devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712622A DE19712622C5 (de) 1997-03-26 1997-03-26 Anordnung und Verfahren zur automatischen Korrektur fehlerbehafteter Abtastsignale inkrementaler Positionsmeßeinrichtungen

Publications (3)

Publication Number Publication Date
DE19712622A1 DE19712622A1 (de) 1998-10-01
DE19712622B4 DE19712622B4 (de) 2007-07-05
DE19712622C5 true DE19712622C5 (de) 2010-07-15

Family

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Family Applications (1)

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DE19712622A Expired - Fee Related DE19712622C5 (de) 1997-03-26 1997-03-26 Anordnung und Verfahren zur automatischen Korrektur fehlerbehafteter Abtastsignale inkrementaler Positionsmeßeinrichtungen

Country Status (3)

Country Link
US (1) US5956659A (https=)
JP (1) JP4034414B2 (https=)
DE (1) DE19712622C5 (https=)

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IT1279641B1 (it) * 1995-10-03 1997-12-16 Marposs Spa Apparecchio per il controllo del diametro di perni di biella in moto orbitale
DE19652562C2 (de) * 1996-12-17 1999-07-22 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE19702931C1 (de) * 1997-01-28 1998-07-02 Bosch Gmbh Robert Anordnung zur Nachlauferfassung von elektrischen Stellmotoren mit inkrementaler Positionserfassung
DE19826875A1 (de) * 1998-06-17 1999-12-23 Heidenhain Gmbh Dr Johannes Numerische Steuerung mit einem räumlich getrennten Eingabegerät
DE10014056A1 (de) * 1999-03-30 2000-10-19 Heidenhain Gmbh Dr Johannes Verfahren und Schaltungsanordnung zur Korrektur von periodischen Signalen eines inkrementalen Positionsmessystems
DE10066138B4 (de) * 1999-03-30 2004-09-23 Dr. Johannes Heidenhain Gmbh Verfahren und Schaltungsanordnung zur Korrektur von periodischen Signalen eines inkrementalen Positionsmesssystems
DE19920596C2 (de) * 1999-05-05 2003-10-30 Maerzhaeuser Senso Tech Gmbh Verfahren zum Messen der Relativlage zweier Objekte
DE10034733B4 (de) * 1999-08-02 2004-07-08 Siemens Ag Ermittlungsverfahren für ein Lagesignal und/oder für Korrekturwerte für Messsignale
IT1321212B1 (it) * 2000-03-06 2003-12-31 Marposs Spa Apparecchiatura per il controllo del diametro di perni .
DE10025461A1 (de) * 2000-05-23 2001-12-06 Mahr Gmbh Messeinrichtung nach dem Interferenzprinzip
DE10054075A1 (de) * 2000-10-31 2002-05-08 Heidenhain Gmbh Dr Johannes Verfahren zur Positionsbestimmung und Positionsmesseinrichtung
DE10056926A1 (de) 2000-11-20 2002-07-18 Optolab Licensing Gmbh Verfahren und Vorrichtung zur Konditionierung eines periodischen Analogsignals
US6556946B2 (en) 2000-12-19 2003-04-29 Caterpillar Inc Linear position sensor
US6487787B1 (en) * 2001-08-03 2002-12-03 Mitutoyo Corporation System and method for determination of error parameters for performing self-calibration and other functions without an external position reference in a transducer
JP2003121135A (ja) * 2001-10-10 2003-04-23 Futaba Corp リニヤスケールの読出装置
DE20204471U1 (de) * 2002-03-21 2003-04-24 Dr. Johannes Heidenhain Gmbh, 83301 Traunreut Positionsmesseinrichtung
DE10244848B4 (de) 2002-09-20 2008-01-24 Dr. Johannes Heidenhain Gmbh Verfahren zur Korrektur der Abtastsignale inkrementaler Positionsmesseinrichtungen
DE10244583A1 (de) * 2002-09-25 2004-04-08 Dr. Johannes Heidenhain Gmbh Messsystem und Verfahren zu dessen Funktionsüberprüfung
DE10313676A1 (de) * 2003-03-26 2004-10-07 Imi Norgren-Herion Fluidtronic Gmbh & Co. Kg Positionsmeßvorrichtung für fluidische Zylinder-Kolben-Anordnungen
DE102004010785B4 (de) * 2004-03-05 2015-10-08 Dr. Johannes Heidenhain Gmbh Konfigurierbarer Eingangsverstärker für Positionsmesseinrichtungen
DE102004025156B3 (de) * 2004-05-21 2005-07-21 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Verfahren zur Fehlerkorrektur eines Wegsensorsignals
DE102004038621B3 (de) * 2004-08-09 2006-02-16 Siemens Ag Ermittlungsverfahren für ein Lagesignal
DE102006012074B4 (de) 2006-03-16 2015-11-05 Robert Bosch Gmbh Postionsmesseinrichtung mit Überwachungsvorrichtung
DE102006023213B3 (de) 2006-05-17 2007-09-27 Siemens Ag Betriebsverfahren für einen Geber und eine mit dem Geber kommunizierende Steuereinrichtung
DE102006040237A1 (de) * 2006-08-28 2008-03-20 Hiwin Mikrosystem Corp. Stelleinrichtung eines Erfassungslesekopfs eines magnetischen Lineals
SI22403A (sl) * 2006-09-21 2008-04-30 Anton Pletersek Postopek za samodejno reguliranje amplitude vhodnih signalov
DE102008043556B4 (de) 2008-11-07 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102009032353A1 (de) 2009-07-08 2011-09-08 Hommel-Etamic Gmbh Verfahren zur Ermittlung der Form eines Werkstücks
DE102009042252B4 (de) 2009-09-22 2014-03-06 Jenoptik Industrial Metrology Germany Gmbh Meßvorrichtung
DE102010013069B4 (de) * 2010-03-26 2012-12-06 Hommel-Etamic Gmbh Meßvorrichtung
US8493572B2 (en) 2010-05-05 2013-07-23 Mitutoyo Corporation Optical encoder having contamination and defect resistant signal processing
DE102010035147B4 (de) 2010-08-23 2016-07-28 Jenoptik Industrial Metrology Germany Gmbh Meßvorrichtung
DE102012018580B4 (de) 2012-09-20 2015-06-11 Jenoptik Industrial Metrology Germany Gmbh Messvorrichtung und Messverfahren zur Inprozess-Messung an Prüflingen während eines Bearbeitungsvorganges an einer Bearbeitungsmaschine, insbesondere einer Schleifmaschine
US9876487B2 (en) 2013-09-27 2018-01-23 International Business Machines Corporation Contactless readable programmable transponder to monitor chip join
US20160203220A1 (en) * 2015-01-13 2016-07-14 Bank Of America Corporation Method and apparatus for natural language searching based on mccs
US9734254B2 (en) 2015-01-13 2017-08-15 Bank Of America Corporation Method and apparatus for automatic completion of an entry into an input field
EP3255385B1 (en) * 2016-06-09 2019-01-30 ams AG A controller to reduce integral non-linearity errors of a magnetic rotary encoder
US10389281B2 (en) 2016-10-20 2019-08-20 Texas Instruments Incorporated Correcting offset and gain drift related angle errors with motor position detectors
DE102018108956A1 (de) * 2018-04-16 2019-10-17 Jungheinrich Aktiengesellschaft Verfahren zum Betrieb einer optischen Sensoreinheit eines Flurförderzeugs sowie eine optische Sensoreinheit
JP7646372B2 (ja) 2021-01-20 2025-03-17 キヤノン株式会社 被検物の位置又は角度を算出する算出方法、プログラム、情報処理装置及びシステム
DE102023103646B4 (de) * 2023-02-15 2024-10-10 Schaeffler Technologies AG & Co. KG Verfahren zur dynamischen Korrektur der Orthogonalität von zwei wellenförmigen Drehwinkelsignalen

Citations (5)

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DE2729697A1 (de) * 1977-07-01 1979-01-04 Heidenhain Gmbh Dr Johannes Verfahren zur interpolation
DE3024716A1 (de) * 1980-06-30 1982-01-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verfahren zur interpolation
DE3201005A1 (de) * 1982-01-15 1983-07-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Einrichtung zur fehlerkorrektur bei positionsmesssystemen
EP0643285A2 (de) * 1993-09-14 1995-03-15 Baumüller Nürnberg Gmbh System zur Messung der Absolutposition des beweglichen, zyklischen Teilungsmarken-Trägers eines inkrementalen Positionsgebers
DE29614974U1 (de) * 1996-06-11 1996-11-28 Woelke Magnetbandtechnik Gmbh Steuervorrichtung zur Kompensation von Offset-Anteilen eines periodischen Signals

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DE3239108A1 (de) * 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
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DE3024716A1 (de) * 1980-06-30 1982-01-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verfahren zur interpolation
DE3201005A1 (de) * 1982-01-15 1983-07-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Einrichtung zur fehlerkorrektur bei positionsmesssystemen
EP0643285A2 (de) * 1993-09-14 1995-03-15 Baumüller Nürnberg Gmbh System zur Messung der Absolutposition des beweglichen, zyklischen Teilungsmarken-Trägers eines inkrementalen Positionsgebers
DE29614974U1 (de) * 1996-06-11 1996-11-28 Woelke Magnetbandtechnik Gmbh Steuervorrichtung zur Kompensation von Offset-Anteilen eines periodischen Signals

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C.Wang, G.Zhang. S.Guo, J.Jiang "Auto correction of interpolation errors in optical encoders",Proc. of SPIE, Vol.2718, S.439-447, 1996 *
C.Wang, G.Zhang. S.Guo, J.Jiang "Auto correction of interpolation errors in optical encoders",Proc. of SPIE, Vol.2718, S.439-447, 1996 P.L.M.Heydemann "Determination and correction of quadrature fringe measurement errors in interferometers" Applied optics, Vol .20, No.3, S. 3382-3384, 1981 K.P.Birch "Optical fringe subdivision with nanometric accuracy", Precision Engineering, Vol.12, No.4, S.195-198, 1980
K.P.Birch "Optical fringe subdivision with nanometric accuracy", Precision Engineering, Vol.12, No.4, S.195-198, 1980 *
P.L.M.Heydemann "Determination and correction of quadrature fringe measurement errors in interferometers" Applied optics, Vol .20, No.3, S. 3382-3384, 1981 *

Also Published As

Publication number Publication date
US5956659A (en) 1999-09-21
JP4034414B2 (ja) 2008-01-16
DE19712622B4 (de) 2007-07-05
DE19712622A1 (de) 1998-10-01
JPH10339650A (ja) 1998-12-22

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R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee