DE1917543B2 - Lichtempfindliches gemisch - Google Patents

Lichtempfindliches gemisch

Info

Publication number
DE1917543B2
DE1917543B2 DE19691917543 DE1917543A DE1917543B2 DE 1917543 B2 DE1917543 B2 DE 1917543B2 DE 19691917543 DE19691917543 DE 19691917543 DE 1917543 A DE1917543 A DE 1917543A DE 1917543 B2 DE1917543 B2 DE 1917543B2
Authority
DE
Germany
Prior art keywords
light
sensitive mixture
sensitive
mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19691917543
Other languages
English (en)
Other versions
DE1917543C3 (de
DE1917543A1 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1917543A1 publication Critical patent/DE1917543A1/de
Publication of DE1917543B2 publication Critical patent/DE1917543B2/de
Application granted granted Critical
Publication of DE1917543C3 publication Critical patent/DE1917543C3/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/28—Processing photosensitive materials; Apparatus therefor for obtaining powder images
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/675—Compositions containing polyhalogenated compounds as photosensitive substances
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • G03F7/0295—Photolytic halogen compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/026—Layers in which during the irradiation a chemical reaction occurs whereby electrically conductive patterns are formed in the layers, e.g. for chemixerography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/126—Halogen compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/127—Spectral sensitizer containing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Photoreceptors In Electrophotography (AREA)
DE1917543*A 1968-04-10 1969-03-31 Lichtempfindliches Gemisch Expired DE1917543C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72037768A 1968-04-10 1968-04-10

Publications (3)

Publication Number Publication Date
DE1917543A1 DE1917543A1 (de) 1969-10-23
DE1917543B2 true DE1917543B2 (de) 1973-06-28
DE1917543C3 DE1917543C3 (de) 1974-01-24

Family

ID=24893797

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1917543*A Expired DE1917543C3 (de) 1968-04-10 1969-03-31 Lichtempfindliches Gemisch

Country Status (7)

Country Link
US (1) US3640718A (de)
JP (1) JPS4936260B1 (de)
CH (1) CH514156A (de)
DE (1) DE1917543C3 (de)
FR (1) FR2007425A1 (de)
GB (1) GB1261938A (de)
NL (1) NL6904928A (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3905815A (en) * 1971-12-17 1975-09-16 Minnesota Mining & Mfg Photopolymerizable sheet material with diazo resin layer
US3935012A (en) * 1973-07-12 1976-01-27 Minnesota Mining And Manufacturing Company Photosensitive sheet materials
US4069054A (en) * 1975-09-02 1978-01-17 Minnesota Mining And Manufacturing Company Photopolymerizable composition containing a sensitized aromatic sulfonium compound and a cationacally polymerizable monomer
JPS5495687A (en) * 1978-01-11 1979-07-28 Fuji Photo Film Co Ltd Photopolymerizable composition
JPS6053300B2 (ja) * 1978-08-29 1985-11-25 富士写真フイルム株式会社 感光性樹脂組成物
US4460677A (en) * 1981-03-26 1984-07-17 Minnesota Mining And Manufacturing Company Visible light sensitive, thermally developable imaging systems
US4515886A (en) * 1983-02-16 1985-05-07 Toyo Soda Manufacturing Co., Ltd. Photosensitive compositions
US4698286A (en) * 1985-06-03 1987-10-06 Hercules Incorporated Plasma developable photoresist compositions containing perylene coumarin photosensitizer
CA1315591C (en) * 1986-02-20 1993-04-06 Takeshi Ishitsuka Visible ray-recording hologram material
US5187045A (en) * 1988-09-07 1993-02-16 Minnesota Mining And Manufacturing Company Halomethyl-1,3,5-triazines containing a sensitizer moiety
US4985562A (en) * 1988-09-07 1991-01-15 Minnesota Mining And Manufacturing Company Halomethyl-1,3,5-triazines containing an amine-containing moiety
US5034526A (en) * 1988-09-07 1991-07-23 Minnesota Mining And Manufacturing Company Halomethyl-1,3,5-triazines containing a sensitizer moiety
US5153323A (en) * 1988-09-07 1992-10-06 Minnesota Mining And Manufacturing Company Halomethyl-1,3,5-triazines containing a photoinitiator moiety
US5387682A (en) * 1988-09-07 1995-02-07 Minnesota Mining And Manufacturing Company Halomethyl-1,3,5-triazines containing a monomeric moiety
US5116977A (en) * 1988-09-07 1992-05-26 Minnesota Mining And Manufacturing Company Halomethyl-1,3,5-triazines containing an amine-containing moiety
US5011762A (en) * 1990-08-14 1991-04-30 Industrial Technology Research Institute Photosensitive compositions having enhanced photopolymerization rate
US5422204A (en) * 1991-07-19 1995-06-06 Canon Kabushiki Kaisha Photo-crosslinkable resin composition and hologram recording medium
US5374501A (en) * 1992-08-17 1994-12-20 Minnesota Mining And Manufacturing Company Alkali soluble photopolymer in color proofing constructions
US5460918A (en) * 1994-10-11 1995-10-24 Minnesota Mining And Manufacturing Company Thermal transfer donor and receptor with silicated surface for lithographic printing applications
US5856373A (en) * 1994-10-31 1999-01-05 Minnesota Mining And Manufacturing Company Dental visible light curable epoxy system with enhanced depth of cure
US5707780A (en) 1995-06-07 1998-01-13 E. I. Du Pont De Nemours And Company Photohardenable epoxy composition
TW439016B (en) * 1996-09-20 2001-06-07 Sumitomo Chemical Co Positive resist composition
US5847133A (en) * 1997-05-23 1998-12-08 Minnesota Mining And Manufacturing Company Ionic halomethyl-1,3,5-triazine photoinitiators
US6010821A (en) 1997-05-23 2000-01-04 Minnesota Mining And Manufacturing Company Aqueous developable color proofing elements
US6930134B2 (en) * 2002-11-12 2005-08-16 Tokuyama Corporation Photocationic polymerization initiator and photocationically polymerizable composition
WO2004059389A2 (en) * 2002-12-23 2004-07-15 Aprilis, Inc. Sensitizer dyes for photoacid generating systems
KR20170008735A (ko) * 2014-05-08 2017-01-24 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 리소그래피용 막형성재료, 리소그래피용 막형성용 조성물, 리소그래피용 막, 패턴 형성방법 및 정제방법
KR20170005413A (ko) * 2014-05-08 2017-01-13 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 레지스트재료, 레지스트 조성물 및 레지스트 패턴형성방법
CN106462073B (zh) * 2014-05-21 2019-11-29 Az电子材料（卢森堡）有限公司 上层膜形成用组合物以及使用了其的抗蚀图案形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3526506A (en) * 1966-06-13 1970-09-01 Minnesota Mining & Mfg Heat reactive,light desensitizing compositions

Also Published As

Publication number Publication date
GB1261938A (en) 1972-01-26
CH514156A (de) 1971-10-15
US3640718A (en) 1972-02-08
FR2007425A1 (de) 1970-01-09
DE1917543C3 (de) 1974-01-24
NL6904928A (de) 1969-10-14
DE1917543A1 (de) 1969-10-23
JPS4936260B1 (de) 1974-09-28

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977