DE1900454A1 - Hoechstvakuumkammer - Google Patents

Hoechstvakuumkammer

Info

Publication number
DE1900454A1
DE1900454A1 DE19691900454 DE1900454A DE1900454A1 DE 1900454 A1 DE1900454 A1 DE 1900454A1 DE 19691900454 DE19691900454 DE 19691900454 DE 1900454 A DE1900454 A DE 1900454A DE 1900454 A1 DE1900454 A1 DE 1900454A1
Authority
DE
Germany
Prior art keywords
housing
vacuum chamber
maximum vacuum
cuff
chamber according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691900454
Other languages
German (de)
English (en)
Inventor
Alain Houyvet
Pierre Noe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE1900454A1 publication Critical patent/DE1900454A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
DE19691900454 1968-01-05 1969-01-04 Hoechstvakuumkammer Pending DE1900454A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR135093 1968-01-05

Publications (1)

Publication Number Publication Date
DE1900454A1 true DE1900454A1 (de) 1969-09-04

Family

ID=8644212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691900454 Pending DE1900454A1 (de) 1968-01-05 1969-01-04 Hoechstvakuumkammer

Country Status (8)

Country Link
US (1) US3512369A (US07709020-20100504-C00041.png)
BE (1) BE725393A (US07709020-20100504-C00041.png)
DE (1) DE1900454A1 (US07709020-20100504-C00041.png)
ES (1) ES362123A1 (US07709020-20100504-C00041.png)
FR (1) FR1557891A (US07709020-20100504-C00041.png)
GB (1) GB1181750A (US07709020-20100504-C00041.png)
LU (1) LU57621A1 (US07709020-20100504-C00041.png)
NL (1) NL6900130A (US07709020-20100504-C00041.png)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2319035A1 (fr) * 1975-07-22 1977-02-18 Physimeca Appareil pour faire le vide a l'interieur d'une enceinte
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2737779A (en) * 1946-05-24 1956-03-13 Ernest O Lawrence Condensable vapor extraction apparatus
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
US3327491A (en) * 1966-06-08 1967-06-27 Andonian Associates Inc Windowless vacuum chamber for exposing a cooled device to successive samplers

Also Published As

Publication number Publication date
US3512369A (en) 1970-05-19
FR1557891A (US07709020-20100504-C00041.png) 1969-02-21
NL6900130A (US07709020-20100504-C00041.png) 1969-07-08
LU57621A1 (US07709020-20100504-C00041.png) 1969-04-08
GB1181750A (en) 1970-02-18
BE725393A (US07709020-20100504-C00041.png) 1969-05-16
ES362123A1 (es) 1970-11-01

Similar Documents

Publication Publication Date Title
DE2844719C2 (US07709020-20100504-C00041.png)
EP0267935B1 (de) Ventil für sterilisierbehälter und verfahren zum steueren des ventils
CH620845A5 (US07709020-20100504-C00041.png)
DE3049110C2 (de) Pneumatisches Dreiwege-Ventil
DE69100324T2 (de) Stossdämpfer eines Flugzeuges.
DE2908515C2 (US07709020-20100504-C00041.png)
EP0380754A2 (de) Kraftausgeglichenes Hubventil
DE4003466A1 (de) Verschlussvorrichtung fuer eine rohrleitung zum transport von losen produkten
DE1900454A1 (de) Hoechstvakuumkammer
DE1751816A1 (de) Zylindervorrichtung mit Doppelhub
DE1961702C3 (de) Gerät zur Herstellung verdichteter Gegenstände aus Metallpulverchargen
DE2904248A1 (de) Absperrschieber
DE3338580C2 (US07709020-20100504-C00041.png)
DE2104502C3 (de) Hydraulische Hubvorrichtung
DE3016823C2 (de) Drehschieberanordnung für eine Brennkraftmaschine
DE4128389A1 (de) Doppelt wirkender betaetigungszylinder
EP0080565A2 (de) Einrichtung zur Endabbremsung des Arbeitskolbens eines doppeltwirkenden Arbeitszylinders
DE2820345C2 (de) Kuppelventil für die vakuumdichte Verbindung einer stationären und einer beweglichen evakuierbaren Kammer
DE1062999B (de) Schnellschlussventil mit Druckmittelantrieb
DE1431108A1 (de) Vorrichtung zum Heben von insbesondere flaechigem Gut
DE2903724C2 (de) Rohrleitungsschieber
EP0078897B1 (de) Unterdruckkupplung für vakuumverfestigte Giessformen
DE3512509C2 (US07709020-20100504-C00041.png)
EP0023531B1 (de) Vorrichtung zum druckmittelgesteuerten Anheben und Absenken von Hebebühnen
DE2634319A1 (de) Steuerventilanordnung