DE1623803B2 - Verfahren zur herstellung von reflexions und transmissions gittern - Google Patents
Verfahren zur herstellung von reflexions und transmissions gitternInfo
- Publication number
- DE1623803B2 DE1623803B2 DE19671623803 DE1623803A DE1623803B2 DE 1623803 B2 DE1623803 B2 DE 1623803B2 DE 19671623803 DE19671623803 DE 19671623803 DE 1623803 A DE1623803 A DE 1623803A DE 1623803 B2 DE1623803 B2 DE 1623803B2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- grid
- photoresist layer
- reflection
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 230000005540 biological transmission Effects 0.000 title claims description 9
- 238000000034 method Methods 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 4
- 230000001427 coherent effect Effects 0.000 claims description 3
- 239000010432 diamond Substances 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000001828 Gelatine Substances 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
- G02B17/061—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
- G02B23/06—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors having a focussing action, e.g. parabolic mirror
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DER0045258 | 1967-02-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1623803A1 DE1623803A1 (de) | 1970-01-02 |
| DE1623803B2 true DE1623803B2 (de) | 1971-11-11 |
Family
ID=7407562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671623803 Pending DE1623803B2 (de) | 1967-02-11 | 1967-02-11 | Verfahren zur herstellung von reflexions und transmissions gittern |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH504005A (enrdf_load_stackoverflow) |
| DE (1) | DE1623803B2 (enrdf_load_stackoverflow) |
| FR (1) | FR1554267A (enrdf_load_stackoverflow) |
| GB (1) | GB1206035A (enrdf_load_stackoverflow) |
| SE (1) | SE341915B (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4340107B4 (de) * | 1993-11-22 | 2006-05-18 | Carl Zeiss Jena Gmbh | Verfahren zur Herstellung eines Teils mit einer fein strukturierten konkaven Oberfläche |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2188175B1 (enrdf_load_stackoverflow) * | 1972-06-07 | 1974-12-27 | Thomson Csf | |
| GB1506400A (en) * | 1975-12-08 | 1978-04-05 | Rank Organisation Ltd | Diffraction gratings |
| GB1537703A (en) * | 1976-01-27 | 1979-01-04 | Rca Corp | Fabrication of rectangular relief profiles in photoresist |
| FR2360824A1 (fr) * | 1976-08-04 | 1978-03-03 | Laude Jean Pierre | Appareil de projection de lumiere dispersee |
| DE3172095D1 (en) * | 1980-01-25 | 1985-10-10 | Demolux | Process for the manufacture of an optically active surface element |
| US4469407A (en) * | 1982-02-08 | 1984-09-04 | Polaroid Corporation | Laser apodizing filter |
| US4828356A (en) * | 1987-12-22 | 1989-05-09 | Hughes Aircraft Company | Method for fabrication of low efficiency diffraction gratings and product obtained thereby |
| GB8824131D0 (en) * | 1988-10-14 | 1988-11-23 | Secretary Trade Ind Brit | Method of making product with feature having multiplicity of fine lines |
-
1967
- 1967-02-11 DE DE19671623803 patent/DE1623803B2/de active Pending
-
1968
- 1968-01-29 CH CH130268A patent/CH504005A/de not_active IP Right Cessation
- 1968-02-09 FR FR1554267D patent/FR1554267A/fr not_active Expired
- 1968-02-09 GB GB649468A patent/GB1206035A/en not_active Expired
- 1968-02-12 SE SE182368A patent/SE341915B/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4340107B4 (de) * | 1993-11-22 | 2006-05-18 | Carl Zeiss Jena Gmbh | Verfahren zur Herstellung eines Teils mit einer fein strukturierten konkaven Oberfläche |
Also Published As
| Publication number | Publication date |
|---|---|
| CH504005A (de) | 1971-02-28 |
| GB1206035A (en) | 1970-09-23 |
| SE341915B (enrdf_load_stackoverflow) | 1972-01-17 |
| FR1554267A (enrdf_load_stackoverflow) | 1969-01-17 |
| DE1623803A1 (de) | 1970-01-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| SH | Request for examination between 03.10.1968 and 22.04.1971 |