DE1539155A1 - Ionenpumpe - Google Patents
IonenpumpeInfo
- Publication number
- DE1539155A1 DE1539155A1 DE19671539155 DE1539155A DE1539155A1 DE 1539155 A1 DE1539155 A1 DE 1539155A1 DE 19671539155 DE19671539155 DE 19671539155 DE 1539155 A DE1539155 A DE 1539155A DE 1539155 A1 DE1539155 A1 DE 1539155A1
- Authority
- DE
- Germany
- Prior art keywords
- ion pump
- anodes
- pump according
- ion
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 title claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000010936 titanium Substances 0.000 description 13
- 229910052719 titanium Inorganic materials 0.000 description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 5
- 102000006391 Ion Pumps Human genes 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR61989A FR1492121A (fr) | 1966-05-18 | 1966-05-18 | Perfectionnements aux pompes ioniques |
| FR99193A FR91990E (fr) | 1966-05-18 | 1967-03-17 | Perfectionnements aux pompes ioniques |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1539155A1 true DE1539155A1 (de) | 1970-03-05 |
Family
ID=26170721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671539155 Pending DE1539155A1 (de) | 1966-05-18 | 1967-05-12 | Ionenpumpe |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE697340A (OSRAM) |
| DE (1) | DE1539155A1 (OSRAM) |
| FR (2) | FR1492121A (OSRAM) |
| GB (1) | GB1182473A (OSRAM) |
-
1966
- 1966-05-18 FR FR61989A patent/FR1492121A/fr not_active Expired
-
1967
- 1967-03-17 FR FR99193A patent/FR91990E/fr not_active Expired
- 1967-04-21 BE BE697340D patent/BE697340A/xx unknown
- 1967-05-12 DE DE19671539155 patent/DE1539155A1/de active Pending
- 1967-05-18 GB GB2305367A patent/GB1182473A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1182473A (en) | 1970-02-25 |
| FR91990E (fr) | 1968-09-06 |
| FR1492121A (fr) | 1967-08-18 |
| BE697340A (OSRAM) | 1967-10-23 |
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