DE1423597B2 - Vorrichtung zum Vergleichen eines Prüflings mit einem Meisterstück - Google Patents
Vorrichtung zum Vergleichen eines Prüflings mit einem MeisterstückInfo
- Publication number
- DE1423597B2 DE1423597B2 DE19611423597 DE1423597A DE1423597B2 DE 1423597 B2 DE1423597 B2 DE 1423597B2 DE 19611423597 DE19611423597 DE 19611423597 DE 1423597 A DE1423597 A DE 1423597A DE 1423597 B2 DE1423597 B2 DE 1423597B2
- Authority
- DE
- Germany
- Prior art keywords
- scanning
- mirror
- bundle
- beams
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000012360 testing method Methods 0.000 title claims description 21
- 230000010287 polarization Effects 0.000 claims description 14
- 210000001747 pupil Anatomy 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G04—HOROLOGY
- G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
- G04D7/00—Measuring, counting, calibrating, testing or regulating apparatus
- G04D7/004—Optical measuring and testing apparatus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES0074763 | 1961-07-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE1423597A1 DE1423597A1 (de) | 1969-05-22 |
DE1423597B2 true DE1423597B2 (de) | 1970-10-08 |
Family
ID=7504877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19611423597 Withdrawn DE1423597B2 (de) | 1961-07-11 | 1961-07-11 | Vorrichtung zum Vergleichen eines Prüflings mit einem Meisterstück |
Country Status (3)
Country | Link |
---|---|
BE (1) | BE620045A (enrdf_load_stackoverflow) |
CH (1) | CH398092A (enrdf_load_stackoverflow) |
DE (1) | DE1423597B2 (enrdf_load_stackoverflow) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2750109C2 (de) * | 1977-11-09 | 1991-03-07 | Spindler & Hoyer GmbH & Co, 3400 Göttingen | Vorrichtung zur kontaktlosen Messung linearer Wegstrecken, insbesondere des Durchmessers |
FR2443078A1 (fr) * | 1978-03-21 | 1980-06-27 | Thomas Ets Louis Et Pierre | Systeme optique pour controle de fabrication |
JPS55110904A (en) * | 1979-02-20 | 1980-08-27 | Hajime Sangyo Kk | Defect detecting device |
JPS58103604A (ja) * | 1981-12-16 | 1983-06-20 | Teijin Ltd | フイルムの厚さ測定方法及び測定装置 |
DE3314465A1 (de) * | 1983-04-21 | 1984-10-25 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren zur optischen oberflaechenpruefung |
DE3446354A1 (de) * | 1984-12-19 | 1986-06-26 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optoelektronische vergleichsvorrichtung fuer strukturen auf ebenen oberflaechen oder fuer flaechige strukturen |
FR2743147B1 (fr) * | 1995-12-28 | 1998-02-27 | Acep France | Appareil de controle visuel des caracteristiques de surface de pieces reproduites |
RU2179328C1 (ru) * | 2001-06-19 | 2002-02-10 | Кияшко Сергей Николаевич | Способ дифференциально-фазовой профилометрии и/или профилографии и устройство для его реализации |
-
0
- BE BE620045D patent/BE620045A/xx unknown
-
1961
- 1961-07-11 DE DE19611423597 patent/DE1423597B2/de not_active Withdrawn
-
1962
- 1962-07-11 CH CH824462A patent/CH398092A/de unknown
Also Published As
Publication number | Publication date |
---|---|
CH398092A (de) | 1965-08-31 |
DE1423597A1 (de) | 1969-05-22 |
BE620045A (enrdf_load_stackoverflow) |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3125013B1 (de) | Optisches system zur erzeugung eines sich zeitlich ändernden musters für ein konfokalmikroskop | |
DE3534019A1 (de) | Optische bahnueberwachungsvorrichtung | |
DE69517220T2 (de) | Optisches Projektionssystem | |
DE1921507B1 (de) | Einrichtung zur Erzeugung phasenverschobener elektrischer Signale | |
DE1423597B2 (de) | Vorrichtung zum Vergleichen eines Prüflings mit einem Meisterstück | |
DE3102450A1 (de) | Vorrichtung zum messen eines augenbrechungsfehlers | |
EP0412410A2 (de) | Zweistrahlphotometer | |
DE1135201B (de) | Kontrolleinrichtung zur Feststellung von Fremdkoerpern in einem durch-scheinenden Behaelter mit Mitteln zur Beleuchtung einer zu kontrollierenden Zone des Behaelters | |
DE1423597C (de) | Vorrichtung zum Vergleichen eines Prüflings mit einem Meisterstuck | |
AT233278B (de) | Vorrichtung zum Vergleichen eines Prüflings mit einem Meisterstück | |
DE1422235B2 (de) | Vorrichtung zum photoelektrischen abtasten durchlaufenden gutes | |
DE19756936C1 (de) | Interferometer nach Michelson | |
DE1804028B2 (de) | Ablesevorrichtung für Meßteilungen oder andere periodische Objekte | |
DE4021487C2 (de) | Optisches Reflexionssystem | |
DE1497539C3 (enrdf_load_stackoverflow) | ||
DE3925614C2 (enrdf_load_stackoverflow) | ||
EP0916971A2 (de) | Schaltbares, mikrooptisches Strahlenumlenksystem | |
EP0567980A1 (de) | Vorrichtung zur Vermessung von Krümmungsprofilen von Kanten | |
DE1422235C (de) | Vorrichtung zum photoelektrischen Abtasten durchlaufenden Gutes | |
DE1497539B2 (enrdf_load_stackoverflow) | ||
DE2655704B2 (de) | Vorrichtung zum Ermitteln von Fremdkörpern in Glasflaschen | |
DE1944631A1 (de) | Verfahren und Vorrichtung zur Kontrolle der Qualitaet einheitlicher Motive bzw. Einheitszeichen von Masken fuer integrierte Schaltkreise | |
DE2706726A1 (de) | Vorrichtung zum ueberpruefen von getraenkeflaschen auf sauberkeit | |
DE579663C (de) | Verfahren zur Bildabtastung mit einer oder mehreren rotierenden Blendenscheiben | |
DE19851176B4 (de) | Anordnung zur Bestimmung von Krümmungsradien |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
E77 | Valid patent as to the heymanns-index 1977 | ||
EHJ | Ceased/non-payment of the annual fee |