DE112013000944T8 - Störschalldämmende Abdeckung für Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung - Google Patents

Störschalldämmende Abdeckung für Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung Download PDF

Info

Publication number
DE112013000944T8
DE112013000944T8 DE112013000944.7T DE112013000944T DE112013000944T8 DE 112013000944 T8 DE112013000944 T8 DE 112013000944T8 DE 112013000944 T DE112013000944 T DE 112013000944T DE 112013000944 T8 DE112013000944 T8 DE 112013000944T8
Authority
DE
Germany
Prior art keywords
charged particle
particle beam
beam device
noise
insulating cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112013000944.7T
Other languages
German (de)
English (en)
Other versions
DE112013000944T5 (de
Inventor
c/o Hitachi High-Technologies Co Kikuchi Hideki
c/o Hitachi High-Technologies Corp Ueda Kota
c/o Hitachi High-Technologies Corp Nagaoki Isao
c/o Hitachi Ltd. Muto Daisuke
c/o Hitachi Ltd. Takano Yasushi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp, Hitachi High Tech Corp filed Critical Hitachi High Technologies Corp
Publication of DE112013000944T5 publication Critical patent/DE112013000944T5/de
Application granted granted Critical
Publication of DE112013000944T8 publication Critical patent/DE112013000944T8/de
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/172—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general using resonance effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0216—Means for avoiding or correcting vibration effects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
DE112013000944.7T 2012-03-13 2013-02-18 Störschalldämmende Abdeckung für Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung Expired - Fee Related DE112013000944T8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-055233 2012-03-13
JP2012055233A JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置
PCT/JP2013/053788 WO2013136909A1 (ja) 2012-03-13 2013-02-18 荷電粒子線装置用防音カバー及び荷電粒子線装置

Publications (2)

Publication Number Publication Date
DE112013000944T5 DE112013000944T5 (de) 2014-12-11
DE112013000944T8 true DE112013000944T8 (de) 2014-12-24

Family

ID=49160828

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013000944.7T Expired - Fee Related DE112013000944T8 (de) 2012-03-13 2013-02-18 Störschalldämmende Abdeckung für Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung

Country Status (5)

Country Link
US (1) US20150041676A1 (https=)
JP (1) JP5838106B2 (https=)
CN (1) CN104081491A (https=)
DE (1) DE112013000944T8 (https=)
WO (1) WO2013136909A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115901831A (zh) * 2014-12-22 2023-04-04 应用材料公司 用于检查基板的设备、用于检查基板的方法、大面积基板检查设备及其操作方法
JP2017050046A (ja) 2015-08-31 2017-03-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US11687008B2 (en) * 2018-02-22 2023-06-27 Applied Materials, Inc. Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof
US20250054723A1 (en) * 2023-08-10 2025-02-13 Fei Company Thermal conditioning enclosure for a charged particle instrument

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769706B2 (ja) * 1993-01-21 1995-07-31 株式会社東和製作所 吸音ゴム板
JP2006079870A (ja) * 2004-09-08 2006-03-23 Hitachi High-Technologies Corp 荷電粒子線装置
JP2008009014A (ja) * 2006-06-28 2008-01-17 Kobe Steel Ltd 多孔質防音構造体
JP5308006B2 (ja) * 2006-11-02 2013-10-09 株式会社神戸製鋼所 吸音構造体
NL1036433A1 (nl) * 2008-01-31 2009-08-03 Asml Netherlands Bv Lithographic apparatus, method and device manufacturing method.
JP2009220652A (ja) * 2008-03-14 2009-10-01 Tokai Rubber Ind Ltd 防音カバー
US8835883B2 (en) * 2010-06-16 2014-09-16 Hitachi High-Technologies Corporation Charged particle radiation device and soundproof cover
JP5537386B2 (ja) * 2010-11-09 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JP5838106B2 (ja) 2015-12-24
DE112013000944T5 (de) 2014-12-11
CN104081491A (zh) 2014-10-01
US20150041676A1 (en) 2015-02-12
WO2013136909A1 (ja) 2013-09-19
JP2013191333A (ja) 2013-09-26

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee