DE112008001338T5 - Akusto-optisch gütegeschalteter CO2-Laser - Google Patents
Akusto-optisch gütegeschalteter CO2-Laser Download PDFInfo
- Publication number
- DE112008001338T5 DE112008001338T5 DE112008001338T DE112008001338T DE112008001338T5 DE 112008001338 T5 DE112008001338 T5 DE 112008001338T5 DE 112008001338 T DE112008001338 T DE 112008001338T DE 112008001338 T DE112008001338 T DE 112008001338T DE 112008001338 T5 DE112008001338 T5 DE 112008001338T5
- Authority
- DE
- Germany
- Prior art keywords
- laser
- cell
- resonator
- radio frequency
- pulses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims abstract description 23
- 239000003623 enhancer Substances 0.000 claims abstract description 4
- 230000005284 excitation Effects 0.000 claims abstract description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 26
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 13
- 239000001569 carbon dioxide Substances 0.000 claims description 12
- 229910052732 germanium Inorganic materials 0.000 claims description 10
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 27
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 19
- 239000013078 crystal Substances 0.000 description 17
- 230000005855 radiation Effects 0.000 description 10
- 238000013459 approach Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 238000002679 ablation Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 101100232929 Caenorhabditis elegans pat-4 gene Proteins 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0315—Waveguide lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
- H01S3/076—Folded-path lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
- H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US93154407P | 2007-05-24 | 2007-05-24 | |
| US60/931,544 | 2007-05-24 | ||
| US12/113,315 US7903699B2 (en) | 2007-05-24 | 2008-05-01 | Acousto-optically Q-switched CO2 laser |
| US12/113,315 | 2008-05-01 | ||
| PCT/US2008/005672 WO2008143772A1 (en) | 2007-05-24 | 2008-05-02 | Acousto-optically q-switched co2 laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112008001338T5 true DE112008001338T5 (de) | 2010-04-15 |
Family
ID=39529335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112008001338T Withdrawn DE112008001338T5 (de) | 2007-05-24 | 2008-05-02 | Akusto-optisch gütegeschalteter CO2-Laser |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7903699B2 (enExample) |
| JP (1) | JP2010534923A (enExample) |
| DE (1) | DE112008001338T5 (enExample) |
| GB (1) | GB2461487A (enExample) |
| WO (1) | WO2008143772A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012002470A1 (de) | 2012-02-03 | 2013-08-08 | Iai Industrial Systems B.V. | CO2-Laser mit schneller Leistungssteuerung |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7903699B2 (en) * | 2007-05-24 | 2011-03-08 | Coherent, Inc. | Acousto-optically Q-switched CO2 laser |
| JP5758569B2 (ja) * | 2008-06-12 | 2015-08-05 | ギガフォトン株式会社 | スラブ型レーザ装置 |
| WO2013084608A1 (ja) | 2011-12-07 | 2013-06-13 | 三菱電機株式会社 | Ｃｏ２レーザ装置およびｃｏ２レーザ加工装置 |
| US9414498B2 (en) | 2013-09-20 | 2016-08-09 | Coherent, Inc. | Via-hole drilling in a printed circuit board using a carbon monoxide laser |
| CN104051936A (zh) * | 2014-06-09 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | 主动锁模co2激光器 |
| US9925620B2 (en) | 2015-08-19 | 2018-03-27 | Coherent, Inc. | Carbon monoxide laser machining system |
| US10274806B2 (en) | 2015-11-06 | 2019-04-30 | Coherent, Inc. | Pulse-dividing method and apparatus for a pulsed carbon monoxide laser |
| US10423047B2 (en) | 2016-07-27 | 2019-09-24 | Coherent, Inc. | Laser machining method and apparatus |
| US10401704B2 (en) * | 2016-11-11 | 2019-09-03 | Asml Netherlands B.V. | Compensating for a physical effect in an optical system |
| CN108832476B (zh) * | 2018-06-27 | 2020-05-19 | 武汉市威佳激光有限责任公司 | 一种多通道声光复合调q光源及调q方法 |
| DE102018221189A1 (de) | 2018-12-07 | 2020-06-10 | Carl Zeiss Smt Gmbh | Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element |
| CN110970794B (zh) * | 2019-12-20 | 2020-10-30 | 中国科学院半导体研究所 | 用于提高激光器功率的声光q开关、谐振腔和脉冲激光器 |
| JP7519333B2 (ja) * | 2021-07-02 | 2024-07-19 | 住友重機械工業株式会社 | レーザ制御装置及びレーザパルス切出し方法 |
| WO2023010056A2 (en) * | 2021-07-27 | 2023-02-02 | Wavegate Corporation | Full-duplex epg system and electro-optical percutaneous lead |
| WO2025098700A1 (en) * | 2023-11-06 | 2025-05-15 | Asml Netherlands B.V. | Method and system for triggering a seed laser |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5021631A (en) | 1989-06-07 | 1991-06-04 | Codilaser S.A. | System for marking moving objects by laser beams |
| US6788722B1 (en) | 2000-07-10 | 2004-09-07 | Coherent, Inc. | High power waveguide laser |
| US6798816B2 (en) | 2002-10-21 | 2004-09-28 | Coherent, Inc. | Folded tapered-waveguide CO2 laser |
| US6826204B2 (en) | 2001-04-04 | 2004-11-30 | Coherent, Inc. | Q-switched CO2 laser for material processing |
| US7058093B2 (en) | 2001-04-04 | 2006-06-06 | Coherent, Inc. | Q-switched, cavity dumped laser systems for material processing |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3465358A (en) * | 1966-07-21 | 1969-09-02 | Bell Telephone Labor Inc | Q-switched molecular laser |
| US3638137A (en) * | 1969-01-10 | 1972-01-25 | Hughes Aircraft Co | Method of q-switching and mode locking a laser beam and structure |
| US4499582A (en) * | 1980-04-05 | 1985-02-12 | Heinrich Karning | Laser system |
| US5157684A (en) * | 1991-10-23 | 1992-10-20 | United Technologies Corporation | Optically pulsed laser |
| JPH05167164A (ja) | 1991-12-11 | 1993-07-02 | Toshiba Corp | レーザ発振装置 |
| JP2759743B2 (ja) | 1993-08-26 | 1998-05-28 | 理化学研究所 | パルス・レーザー光の周波数シフト方法およびその装置 |
| DE19526331A1 (de) | 1995-07-19 | 1997-01-23 | Baasel Carl Lasertech | Laser-Materialbearbeitungsvorrichtung mit Güteschalter |
| US7046709B2 (en) * | 2003-11-18 | 2006-05-16 | Coherent, Inc. | CO2 waveguide laser with beryllium oxide waveguides |
| US7411989B2 (en) * | 2006-12-13 | 2008-08-12 | Coherent, Inc. | Mechanically Q-switched CO2 laser |
| US7903699B2 (en) | 2007-05-24 | 2011-03-08 | Coherent, Inc. | Acousto-optically Q-switched CO2 laser |
-
2008
- 2008-05-01 US US12/113,315 patent/US7903699B2/en active Active
- 2008-05-02 JP JP2010509332A patent/JP2010534923A/ja active Pending
- 2008-05-02 DE DE112008001338T patent/DE112008001338T5/de not_active Withdrawn
- 2008-05-02 WO PCT/US2008/005672 patent/WO2008143772A1/en not_active Ceased
-
2009
- 2009-11-17 GB GB0920130A patent/GB2461487A/en not_active Withdrawn
-
2011
- 2011-02-03 US US13/020,298 patent/US8050306B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5021631A (en) | 1989-06-07 | 1991-06-04 | Codilaser S.A. | System for marking moving objects by laser beams |
| US6788722B1 (en) | 2000-07-10 | 2004-09-07 | Coherent, Inc. | High power waveguide laser |
| US6826204B2 (en) | 2001-04-04 | 2004-11-30 | Coherent, Inc. | Q-switched CO2 laser for material processing |
| US7058093B2 (en) | 2001-04-04 | 2006-06-06 | Coherent, Inc. | Q-switched, cavity dumped laser systems for material processing |
| US6798816B2 (en) | 2002-10-21 | 2004-09-28 | Coherent, Inc. | Folded tapered-waveguide CO2 laser |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012002470A1 (de) | 2012-02-03 | 2013-08-08 | Iai Industrial Systems B.V. | CO2-Laser mit schneller Leistungssteuerung |
| WO2013113306A1 (de) | 2012-02-03 | 2013-08-08 | Iai Industrial Systems B.V. | Co2-laser mit schneller leistungssteuerung |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010534923A (ja) | 2010-11-11 |
| GB0920130D0 (en) | 2009-12-30 |
| GB2461487A (en) | 2010-01-06 |
| WO2008143772A1 (en) | 2008-11-27 |
| US20090232167A1 (en) | 2009-09-17 |
| US20110122897A1 (en) | 2011-05-26 |
| US7903699B2 (en) | 2011-03-08 |
| US8050306B2 (en) | 2011-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R005 | Application deemed withdrawn due to failure to request examination |