JP2010534923A - 音響光学ｑスイッチｃｏ２レーザ - Google Patents

音響光学ｑスイッチｃｏ２レーザ Download PDF

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Publication number
JP2010534923A
JP2010534923A JP2010509332A JP2010509332A JP2010534923A JP 2010534923 A JP2010534923 A JP 2010534923A JP 2010509332 A JP2010509332 A JP 2010509332A JP 2010509332 A JP2010509332 A JP 2010509332A JP 2010534923 A JP2010534923 A JP 2010534923A
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laser
cell
resonator
power
pulse
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JP2010509332A
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Japanese (ja)
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JP2010534923A5 (enExample
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シークイン、バーノン・エー
チェノースキー、ピーター・ピー
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コヒーレント・インク
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Publication of JP2010534923A5 publication Critical patent/JP2010534923A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/117—Q-switching using intracavity acousto-optic devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0315—Waveguide lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
    • H01S3/076—Folded-path lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lasers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2010509332A 2007-05-24 2008-05-02 音響光学ｑスイッチｃｏ２レーザ Pending JP2010534923A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US93154407P 2007-05-24 2007-05-24
US12/113,315 US7903699B2 (en) 2007-05-24 2008-05-01 Acousto-optically Q-switched CO2 laser
PCT/US2008/005672 WO2008143772A1 (en) 2007-05-24 2008-05-02 Acousto-optically q-switched co2 laser

Publications (2)

Publication Number Publication Date
JP2010534923A true JP2010534923A (ja) 2010-11-11
JP2010534923A5 JP2010534923A5 (enExample) 2011-06-02

Family

ID=39529335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010509332A Pending JP2010534923A (ja) 2007-05-24 2008-05-02 音響光学ｑスイッチｃｏ２レーザ

Country Status (5)

Country Link
US (2) US7903699B2 (enExample)
JP (1) JP2010534923A (enExample)
DE (1) DE112008001338T5 (enExample)
GB (1) GB2461487A (enExample)
WO (1) WO2008143772A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5657139B2 (ja) * 2011-12-07 2015-01-21 三菱電機株式会社 Ｃｏ２レーザ装置およびｃｏ２レーザ加工装置
JP2023007738A (ja) * 2021-07-02 2023-01-19 住友重機械工業株式会社 レーザ制御装置及びレーザパルス切出し方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7903699B2 (en) * 2007-05-24 2011-03-08 Coherent, Inc. Acousto-optically Q-switched CO2 laser
JP5758569B2 (ja) * 2008-06-12 2015-08-05 ギガフォトン株式会社 スラブ型レーザ装置
DE102012002470A1 (de) 2012-02-03 2013-08-08 Iai Industrial Systems B.V. CO2-Laser mit schneller Leistungssteuerung
US9414498B2 (en) 2013-09-20 2016-08-09 Coherent, Inc. Via-hole drilling in a printed circuit board using a carbon monoxide laser
CN104051936A (zh) * 2014-06-09 2014-09-17 中国科学院长春光学精密机械与物理研究所 主动锁模co2激光器
US9925620B2 (en) 2015-08-19 2018-03-27 Coherent, Inc. Carbon monoxide laser machining system
US10274806B2 (en) 2015-11-06 2019-04-30 Coherent, Inc. Pulse-dividing method and apparatus for a pulsed carbon monoxide laser
US10423047B2 (en) 2016-07-27 2019-09-24 Coherent, Inc. Laser machining method and apparatus
US10401704B2 (en) * 2016-11-11 2019-09-03 Asml Netherlands B.V. Compensating for a physical effect in an optical system
CN108832476B (zh) * 2018-06-27 2020-05-19 武汉市威佳激光有限责任公司 一种多通道声光复合调q光源及调q方法
DE102018221189A1 (de) 2018-12-07 2020-06-10 Carl Zeiss Smt Gmbh Verfahren zum Bilden von Nanostrukturen an einer Oberfläche und optisches Element
CN110970794B (zh) * 2019-12-20 2020-10-30 中国科学院半导体研究所 用于提高激光器功率的声光q开关、谐振腔和脉冲激光器
WO2023010056A2 (en) * 2021-07-27 2023-02-02 Wavegate Corporation Full-duplex epg system and electro-optical percutaneous lead
WO2025098700A1 (en) * 2023-11-06 2025-05-15 Asml Netherlands B.V. Method and system for triggering a seed laser

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4499582A (en) * 1980-04-05 1985-02-12 Heinrich Karning Laser system
JPH05167164A (ja) * 1991-12-11 1993-07-02 Toshiba Corp レーザ発振装置
JPH0766483A (ja) * 1993-08-26 1995-03-10 Rikagaku Kenkyusho パルス・レーザー光の周波数シフト方法およびその装置
EP0754518A1 (de) * 1995-07-19 1997-01-22 Carl Baasel Lasertechnik GmbH Laser-Materialbearbeitungsvorrichtung mit akusto-optischem Güteschalter
WO2002082596A2 (en) * 2001-04-04 2002-10-17 Coherent Deos Q-switched co2 laser for material processing
US20050105581A1 (en) * 2003-11-18 2005-05-19 Vernon Seguin CO2 waveguide laser with beryllium oxide waveguides

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US3465358A (en) * 1966-07-21 1969-09-02 Bell Telephone Labor Inc Q-switched molecular laser
US3638137A (en) * 1969-01-10 1972-01-25 Hughes Aircraft Co Method of q-switching and mode locking a laser beam and structure
ES2013193A6 (es) * 1989-06-07 1990-04-16 Codilaser Sa Sistema para marcaje de objetos en movimiento mediante rayos laser.
US5157684A (en) * 1991-10-23 1992-10-20 United Technologies Corporation Optically pulsed laser
US6788722B1 (en) 2000-07-10 2004-09-07 Coherent, Inc. High power waveguide laser
WO2002082600A2 (en) * 2001-04-04 2002-10-17 Coherent Deos Q-switched cavity dumped co2 laser for material processing
US6798816B2 (en) * 2002-10-21 2004-09-28 Coherent, Inc. Folded tapered-waveguide CO2 laser
US7411989B2 (en) * 2006-12-13 2008-08-12 Coherent, Inc. Mechanically Q-switched CO2 laser
US7903699B2 (en) 2007-05-24 2011-03-08 Coherent, Inc. Acousto-optically Q-switched CO2 laser

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4499582A (en) * 1980-04-05 1985-02-12 Heinrich Karning Laser system
JPH05167164A (ja) * 1991-12-11 1993-07-02 Toshiba Corp レーザ発振装置
JPH0766483A (ja) * 1993-08-26 1995-03-10 Rikagaku Kenkyusho パルス・レーザー光の周波数シフト方法およびその装置
EP0754518A1 (de) * 1995-07-19 1997-01-22 Carl Baasel Lasertechnik GmbH Laser-Materialbearbeitungsvorrichtung mit akusto-optischem Güteschalter
WO2002082596A2 (en) * 2001-04-04 2002-10-17 Coherent Deos Q-switched co2 laser for material processing
US20050105581A1 (en) * 2003-11-18 2005-05-19 Vernon Seguin CO2 waveguide laser with beryllium oxide waveguides

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5657139B2 (ja) * 2011-12-07 2015-01-21 三菱電機株式会社 Ｃｏ２レーザ装置およびｃｏ２レーザ加工装置
US9059567B2 (en) 2011-12-07 2015-06-16 Mitsubishi Electric Corporation CO2 laser device and CO2 laser processing device
DE112012005144B4 (de) 2011-12-07 2018-07-05 Mitsubishi Electric Corporation CO2 Laservorrichtung und Materialbearbeitungsvorrichtung
JP2023007738A (ja) * 2021-07-02 2023-01-19 住友重機械工業株式会社 レーザ制御装置及びレーザパルス切出し方法
JP7519333B2 (ja) 2021-07-02 2024-07-19 住友重機械工業株式会社 レーザ制御装置及びレーザパルス切出し方法

Also Published As

Publication number Publication date
DE112008001338T5 (de) 2010-04-15
GB0920130D0 (en) 2009-12-30
GB2461487A (en) 2010-01-06
WO2008143772A1 (en) 2008-11-27
US20090232167A1 (en) 2009-09-17
US20110122897A1 (en) 2011-05-26
US7903699B2 (en) 2011-03-08
US8050306B2 (en) 2011-11-01

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