DE112007002253B8 - Grenzflächenschallwellenvorrichtung und Verfahren zur Herstellung derselben - Google Patents

Grenzflächenschallwellenvorrichtung und Verfahren zur Herstellung derselben Download PDF

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Publication number
DE112007002253B8
DE112007002253B8 DE112007002253.1T DE112007002253T DE112007002253B8 DE 112007002253 B8 DE112007002253 B8 DE 112007002253B8 DE 112007002253 T DE112007002253 T DE 112007002253T DE 112007002253 B8 DE112007002253 B8 DE 112007002253B8
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DE
Germany
Prior art keywords
producing
same
acoustic wave
surface acoustic
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112007002253.1T
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English (en)
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DE112007002253T5 (de
DE112007002253B4 (de
Inventor
Shin Saijo
Toshiyuki Fuyutsume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE112007002253T5 publication Critical patent/DE112007002253T5/de
Application granted granted Critical
Publication of DE112007002253B4 publication Critical patent/DE112007002253B4/de
Publication of DE112007002253B8 publication Critical patent/DE112007002253B8/de
Active legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE112007002253.1T 2006-09-29 2007-07-20 Grenzflächenschallwellenvorrichtung und Verfahren zur Herstellung derselben Active DE112007002253B8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006-267805 2006-09-29
JP2006267805 2006-09-29
PCT/JP2007/064323 WO2008041404A1 (fr) 2006-09-29 2007-07-20 Dispositif à ondes limites élastiques, et procédé pour sa fabrication

Publications (3)

Publication Number Publication Date
DE112007002253T5 DE112007002253T5 (de) 2009-08-06
DE112007002253B4 DE112007002253B4 (de) 2015-12-24
DE112007002253B8 true DE112007002253B8 (de) 2016-03-10

Family

ID=39268269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112007002253.1T Active DE112007002253B8 (de) 2006-09-29 2007-07-20 Grenzflächenschallwellenvorrichtung und Verfahren zur Herstellung derselben

Country Status (4)

Country Link
US (1) US7902717B2 (de)
JP (1) JP5112323B2 (de)
DE (1) DE112007002253B8 (de)
WO (1) WO2008041404A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2557420B1 (de) 2011-08-12 2015-10-14 Nxp B.V. Halbleitervorrichtung mit Au-Cu-Elektroden und Verfahren zur Herstellung der Halbleitervorrichtung
DE102019204755A1 (de) 2018-04-18 2019-10-24 Skyworks Solutions, Inc. Akustikwellenvorrichtung mit mehrschichtigem piezoelektrischem substrat

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0314308A (ja) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd 弾性表面波フィルタ
JPH08139546A (ja) * 1994-11-14 1996-05-31 Murata Mfg Co Ltd 弾性表面波素子の電極形成方法
US20060071579A1 (en) * 2003-02-10 2006-04-06 Hajime Kando Elastic boundary wave device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02278909A (ja) 1989-04-19 1990-11-15 Seiko Epson Corp 弾性表面波装置
JPH10145167A (ja) 1996-11-05 1998-05-29 Japan Radio Co Ltd Ｓａｗ伝搬特性調整方法並びにその応用方法及び回路
JPH10335974A (ja) 1997-05-29 1998-12-18 Matsushita Electric Ind Co Ltd 弾性境界波素子
JP2003309442A (ja) * 2002-04-17 2003-10-31 Toyo Commun Equip Co Ltd 弾性表面波デバイスの製造方法
JP2005005763A (ja) 2003-06-09 2005-01-06 Alps Electric Co Ltd 表面弾性波素子及びフィルタ
CN101964642A (zh) * 2004-01-13 2011-02-02 株式会社村田制作所 边界声波装置
JP2005354430A (ja) * 2004-06-10 2005-12-22 Epson Toyocom Corp 弾性表面波変換器及びそれを用いた弾性表面波デバイス
JP4637600B2 (ja) * 2005-02-07 2011-02-23 京セラ株式会社 弾性表面波素子および通信装置
TWI325687B (en) * 2006-02-23 2010-06-01 Murata Manufacturing Co Boundary acoustic wave device and method for producing the same
US7741843B2 (en) * 2007-05-02 2010-06-22 CaseWestern Reserve University Determining phase-encoding direction for parallel MRI

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0314308A (ja) * 1989-06-13 1991-01-23 Murata Mfg Co Ltd 弾性表面波フィルタ
JPH08139546A (ja) * 1994-11-14 1996-05-31 Murata Mfg Co Ltd 弾性表面波素子の電極形成方法
US20060071579A1 (en) * 2003-02-10 2006-04-06 Hajime Kando Elastic boundary wave device

Also Published As

Publication number Publication date
WO2008041404A1 (fr) 2008-04-10
JPWO2008041404A1 (ja) 2010-02-04
JP5112323B2 (ja) 2013-01-09
DE112007002253T5 (de) 2009-08-06
DE112007002253B4 (de) 2015-12-24
US20090179521A1 (en) 2009-07-16
US7902717B2 (en) 2011-03-08

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