DE102023120356A1 - Excimer-lampe - Google Patents
Excimer-lampe Download PDFInfo
- Publication number
- DE102023120356A1 DE102023120356A1 DE102023120356.8A DE102023120356A DE102023120356A1 DE 102023120356 A1 DE102023120356 A1 DE 102023120356A1 DE 102023120356 A DE102023120356 A DE 102023120356A DE 102023120356 A1 DE102023120356 A1 DE 102023120356A1
- Authority
- DE
- Germany
- Prior art keywords
- discharge vessel
- virtual temperature
- excimer lamp
- excimer
- quartz glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 50
- 238000005259 measurement Methods 0.000 claims abstract description 18
- 238000012423 maintenance Methods 0.000 abstract description 40
- 238000000034 method Methods 0.000 description 22
- 239000006185 dispersion Substances 0.000 description 18
- 239000007789 gas Substances 0.000 description 17
- 239000000523 sample Substances 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 15
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 13
- 238000010586 diagram Methods 0.000 description 13
- 229910052731 fluorine Inorganic materials 0.000 description 13
- 239000011737 fluorine Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 10
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 9
- 230000009467 reduction Effects 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 230000014509 gene expression Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 238000000862 absorption spectrum Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000001237 Raman spectrum Methods 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical group [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- 229910008284 Si—F Inorganic materials 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000004255 ion exchange chromatography Methods 0.000 description 1
- 238000012417 linear regression Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004846 x-ray emission Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Discharge Lamp (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022124618A JP2024021634A (ja) | 2022-08-04 | 2022-08-04 | エキシマランプ |
| JP2022-124618 | 2022-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102023120356A1 true DE102023120356A1 (de) | 2024-02-15 |
Family
ID=89753752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102023120356.8A Pending DE102023120356A1 (de) | 2022-08-04 | 2023-08-01 | Excimer-lampe |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2024021634A (ko) |
| KR (1) | KR20240019741A (ko) |
| CN (1) | CN117524842A (ko) |
| DE (1) | DE102023120356A1 (ko) |
| TW (1) | TW202414509A (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192351A (ja) | 2007-02-01 | 2008-08-21 | Ushio Inc | 放電ランプ |
-
2022
- 2022-08-04 JP JP2022124618A patent/JP2024021634A/ja active Pending
-
2023
- 2023-07-12 CN CN202310848596.XA patent/CN117524842A/zh active Pending
- 2023-07-24 TW TW112127479A patent/TW202414509A/zh unknown
- 2023-08-01 DE DE102023120356.8A patent/DE102023120356A1/de active Pending
- 2023-08-03 KR KR1020230101506A patent/KR20240019741A/ko unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192351A (ja) | 2007-02-01 | 2008-08-21 | Ushio Inc | 放電ランプ |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20240019741A (ko) | 2024-02-14 |
| TW202414509A (zh) | 2024-04-01 |
| JP2024021634A (ja) | 2024-02-16 |
| CN117524842A (zh) | 2024-02-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R082 | Change of representative |
Representative=s name: MAIWALD GMBH, DE |